nach oben

International Journal of Mechanics and Materials in Design

Erschienen in:

10.03.2020

The effect of finite electrical conductivity of small-scale beam resonators on their vibrational response under electrostatic fields

verfasst von: Reza Moheimani, Abdolreza Pasharavesh, Hamid Dalir

Erschienen in: International Journal of Mechanics and Materials in Design | Ausgabe 3/2020

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

Electrostatic actuation is one of the most commonly used methods for excitation and measurement in micro and nanoscale resonators. In the dynamical behavior analyses of such systems, the resonating beam is often assumed to be a perfect conductor. In this paper, the effect of electrical resistivity on the vibrational response of these systems, including the natural frequency and damping, is investigated. The governing coupled nonlinear partial differential equations of motion are derived and a new finite element method formulation is presented by developing a new electromechanical element. The numerical natural frequencies are compared with experimental measurements and the achieved correlation is better than that in the prior studies. Results indicate that there is a jump in the frequency and damping of the system at a critical resistivity. As the system size decreases and the applied voltage approaches the pull-in voltage, the electrical resistivity completely dominates the response nature of the system. An experiment is also conducted, and good agreement with the theory is observed regarding the effect of electrical resistivity.

Vorheriger Artikel Size-dependent electromechanical responses of a bilayer piezoelectric microbeam

Nächster Artikel Atomistic simulation of agglomeration of metal nanoparticles considering the induced charge density of surface atoms

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Abdel-Rahman, E.M., Younis, M.I., Nayfeh, A.H.: Characterization of the mechanical behavior of an electrically actuated microbeam. J. Micromech. Microeng. 12(6), 759 (2002)

Ayan, A., Turkay, D., Unlu, B., Naghinazhadahmadi, P., Oliaei, S.N.B., Boztug, C., Yerci, S.: strain engineering of Germanium Nanobeams by electrostatic Actuation. Sci. Rep. 9(1), 4963 (2019)

Batra, R., Porfiri, M., Spinello, D.: Effects of Casimir force on pull-in instability in micromembranes. EPL (Europhys. Lett.) 77(2), 20010 (2007)

Batra, R., Porfiri, M., Spinello, D.: Effects of van der Waals force and thermal stresses on pull-in instability of clamped rectangular microplates. Sensors 8(2), 1048–1069 (2008a)

Batra, R., Porfiri, M., Spinello, D.: Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force. Int. J. Solids Struct. 45(11–12), 3558–3583 (2008b)MATH

Batra, R., Porfiri, M., Spinello, D.: Vibrations of narrow microbeams predeformed by an electric field. J. Sound Vibr. 309(3–5), 600–612 (2008c)

Bøggild, P., Hansen, T.M., Tanasa, C., Grey, F.: Fabrication and actuation of customized nanotweezers with a 25 nm gap. Nanotechnology 12(3), 331 (2001)

Brenes, A., Vysotskyi, B., Lefeuvre, E., Juillard, J.: Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements. Mech. Syst. Signal Process. 112, 10–21 (2018)

Caruntu, D.I., Martinez, I.: Reduced order model of parametric resonance of electrostatically actuated MEMS cantilever resonators. Int. J. Non-Linear Mech. 66, 28–32 (2014)

Caruntu, D.I., Botello, M.A., Reyes, C.A., Beatriz, J.S.: Voltage-amplitude response of superharmonic resonance of second order of electrostatically actuated MEMS cantilever resonators. J. Comput. Nonlinear Dyn. 14(3), 031005 (2019)

Cerini, F., Ferrari, M., Ferrari, V., Russo, A., Urquia, M.A., Ardito, R., De Masi, B., Sedmik, R.: Electro-mechanical modelling and experimental characterization of a high-aspect-ratio electrostatic-capacitive MEMS device. Sens. Actuators A Phys. 266, 219–231 (2017)

Chen, C., Ma, M., Zhe Liu, J., Zheng, Q., Xu, Z.: Viscous damping of nanobeam resonators: humidity, thermal noise, and a paddling effect. J. Appl. Phys. 110(3), 034320 (2011)

Dance, R., Butler, N., Gray, R., MacLellan, D., Rusby, D., Scott, G., Zielbauer, B., Bagnoud, V., Xu, H., Robinson, A.: Role of lattice structure and low temperature resistivity in fast-electron-beam filamentation in carbon. Plasma Phys. Control. Fusion 58(1), 014027 (2015)

Ijntema, D.J., Tilmans, H.A.: Static and dynamic aspects of an air-gap capacitor. Sens. Actuators A Phys. 35(2), 121–128 (1992)

Kaisti, M., Panula, T., Leppänen, J., Punkkinen, R., Tadi, M.J., Vasankari, T., Jaakkola, S., Kiviniemi, T., Airaksinen, J., Kostiainen, P.: Clinical assessment of a non-invasive wearable MEMS pressure sensor array for monitoring of arterial pulse waveform, heart rate and detection of atrial fibrillation. NPJ Digit. Med. 2(1), 39 (2019)

Karimipour, I., Beni, Y.T., Akbarzadeh, A.: Size-dependent nonlinear forced vibration and dynamic stability of electrically actuated micro-plates. Commun. Nonlinear Sci. Numer. Simul. 78, 104856 (2019)MathSciNet

Kim, P., Lieber, C.M.: Nanotube nanotweezers. Science 286(5447), 2148–2150 (1999)

Kohlmann, M.: A new model for electrostatic MEMS with two free boundaries. J. Math. Anal. Appl. 408(2), 513–524 (2013)MathSciNetMATH

König, E.-R., Wachutka, G.: Multi-parameter homotopy for the numerical analysis of MEMS. Sens. Actuators A Phys. 110(1–3), 39–51 (2004)

Kuang, J.-H., Chen, C.-J.: Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method. J. Micromech. Microeng. 14(4), 647 (2004)

Legtenberg, R., Tilmans, H.A.: Electrostatically driven vacuum-encapsulated polysilicon resonators part I. Design and fabrication. Sens. Actuators A Phys. 45(1), 57–66 (1994)

Lin, W.-H., Zhao, Y.-P.: Nonlinear behavior for nanoscale electrostatic actuators with Casimir force. Chaos, Solitons Fractals 23(5), 1777–1785 (2005)MATH

McKenna, P., MacLellan, D., Butler, N., Dance, R., Gray, R., Robinson, A., Neely, D., Desjarlais, M.: Influence of low-temperature resistivity on fast electron transport in solids: scaling to fast ignition electron beam parameters. Plasma Phys. Control. Fusion 57(6), 064001 (2015)

Miandoab, E.M., Yousefi-Koma, A., Pishkenari, H.N., Tajaddodianfar, F.: Study of nonlinear dynamics and chaos in MEMS/NEMS resonators. Commun. Nonlinear Sci. Numer. Simul. 22(1–3), 611–622 (2015)

Moheimani, R., Ahmadian, M.: On free vibration of functionally graded Euler–Bernoulli beam models based on the non-local theory. In: ASME 2012 International Mechanical Engineering Congress and Exposition 2012, pp. 169–173

Nayfeh, A.H., Younis, M.I.: A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping. J. Micromech. Microeng. 14(2), 170 (2003)

Palmer, H.B.: The capacitance of a parallel-plate capacitor by the Schwartz-Christoffel transformation. Electr. Eng. 56(3), 363–368 (1937)

Pasharavesh, A., Ahmadian, M.T.: Analytical and numerical simulations of energy harvesting using MEMS devices operating in nonlinear regime. Eur. Phys. J. B 91(10), 241 (2018)MathSciNet

Pasharavesh, A., Ahmadian, M.: Toward wideband piezoelectric harvesters through self-powered transitions to high-energy response. ASME J. Vib. Acoust. (2019). https://doi.org/10.1115/1.4045379CrossRef

Pasharavesh, A., Ahmadian, M., Zohoor, H.: On the energy extraction from large amplitude vibrations of MEMS-based piezoelectric harvesters. Acta Mech. 228(10), 3445–3468 (2017)MathSciNetMATH

Pasharavesh, A., Ahmadian, M., Zohoor, H.: Complex modal analysis and coupled electromechanical simulation of energy harvesting piezoelectric laminated beams. Proc. Inst. Mech. Eng. Part C J. Mech. Eng. Sci. 233(7), 2526–2537 (2019)

Qin, Z., Pang, X., Safaei, B., Chu, F.: Free vibration analysis of rotating functionally graded CNT reinforced composite cylindrical shells with arbitrary boundary conditions. Compos. Struct. 220, 847–860 (2019)

Rahmanian, S., Hosseini-Hashemi, S.: Size-dependent resonant response of a double-layered viscoelastic nanoresonator under electrostatic and piezoelectric actuations incorporating surface effects and Casimir regime. Int. J. Non-Linear Mech. 109, 118–131 (2019)

Ramezani, A., Alasty, A., Akbari, J.: Pull-in parameters of cantilever type nanomechanical switches in presence of Casimir force. Nonlinear Anal. Hybrid Syst. 1(3), 364–382 (2007)MATH

Ruther, P., Herwik, S., Kisban, S., Seidl, K., Paul, O.: Recent progress in neural probes using silicon MEMS technology. IEEJ Trans. Electr. Electron. Eng. 5(5), 505–515 (2010)

Safaei, B., Moradi-Dastjerdi, R., Qin, Z., Chu, F.: Frequency-dependent forced vibration analysis of nanocomposite sandwich plate under thermo-mechanical loads. Compos. Part B Eng. 161, 44–54 (2019)

Seymour, J.P., Wu, F., Wise, K.D., Yoon, E.: State-of-the-art MEMS and microsystem tools for brain research. Microsyst. Nanoeng. 3, 16066 (2017)

Siahpour, S., Zand, M.M., Mousavi, M.: Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation. Microsyst. Technol. 24(3), 1545–1552 (2018)

Singh, T., Elhady, A., Jia, H., Mojdeh, A., Kaplan, C., Sharma, V., Basha, M., Abdel-Rahman, E.: Modeling of low-damping laterally actuated electrostatic MEMS. Mechatronics 52, 1–6 (2018)

Tilmans, H.A., Legtenberg, R.: Electrostatically driven vacuum-encapsulated polysilicon resonators: part II. Theory and performance. Sens. Actuators A Phys. 45(1), 67–84 (1994)

Younis, M.I.: Modeling and simulation of microelectromechanical systems in multi-physics fields. Virginia Tech (2004)

Zand, M.M., Ahmadian, M.: Vibrational analysis of electrostatically actuated microstructures considering nonlinear effects. Commun. Nonlinear Sci. Numer. Simul. 14(4), 1664–1678 (2009)

Zand, M.M., Ahmadian, M., Rashidian, B.: Semi-analytic solutions to nonlinear vibrations of microbeams under suddenly applied voltages. J. Sound Vibr. 325(1–2), 382–396 (2009)

Zhang, W.-M., Yan, H., Peng, Z.-K., Meng, G.: Electrostatic pull-in instability in MEMS/NEMS: a review. Sens. Actuators A Phys. 214, 187–218 (2014)

Titel: The effect of finite electrical conductivity of small-scale beam resonators on their vibrational response under electrostatic fields
verfasst von: Reza Moheimani
Abdolreza Pasharavesh
Hamid Dalir
Publikationsdatum: 10.03.2020
Verlag: Springer Netherlands
Erschienen in: International Journal of Mechanics and Materials in Design / Ausgabe 3/2020
Print ISSN: 1569-1713
Elektronische ISSN: 1573-8841
DOI: https://doi.org/10.1007/s10999-020-09488-9

Premium Partner

Marktübersichten

Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.

Zur Marktübersicht

Springer Professional

Abstract

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Weitere Artikel der Ausgabe 3/2020

Boussinesq problem with the surface effect based on surface energy density

Size-dependent electromechanical responses of a bilayer piezoelectric microbeam

Potential of combating transmission of COVID-19 using novel self-cleaning superhydrophobic surfaces: part I—protection strategies against fomites

Potential of combating transmission of COVID-19 using novel self-cleaning superhydrophobic surfaces: part II—thermal, chemical, and mechanical durability

Atomistic simulation of agglomeration of metal nanoparticles considering the induced charge density of surface atoms

Transient response of a sandwich beam with functionally graded porous core traversed by a non-uniformly distributed moving mass

Premium Partner

Marktübersichten