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Erschienen in: Microsystem Technologies 1/2019

19.05.2018 | Technical Paper

The properties of free-standing epoxy polymer multi-mode optical waveguides

verfasst von: Václav Prajzler, Miloš Neruda, Petr Jašek, Pavla Nekvindová

Erschienen in: Microsystem Technologies | Ausgabe 1/2019

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Abstract

The paper reports on the fabrication and characterisation of free-standing multimode optical epoxy polymer waveguides consisting of a core made of EpoCore and EpoClad polymer cladding and cover protection layers. The 50 × 50 μm2 rectangular waveguides are intended for short-reach optical interconnection and optimised for an operating wavelength of 850 nm. The waveguides of the proposed shapes were fabricated by a standard photolithography process on a silicon substrate provided with a Poly(vinyl alcohol) thin layer. The free-standing structure was then achieved by peeling the deposited EpoClad/EpoCore/EpoClad structures of that substrate. The optical scattering losses of the created planar waveguides, measured by the fibre probe technique at 632.8 and 964 nm, were 0.30 dB cm−1 at 632.8 nm and 0.17 dB cm−1 at 964 nm. Propagation optical loss measurements for rectangular waveguides were performed by the cut-back method and the best samples had optical losses below 0.55 dB cm−1 at 850 and 1310 nm.

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Metadaten
Titel
The properties of free-standing epoxy polymer multi-mode optical waveguides
verfasst von
Václav Prajzler
Miloš Neruda
Petr Jašek
Pavla Nekvindová
Publikationsdatum
19.05.2018
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 1/2019
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-3960-9

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