1 Introduction
2 Piezoresistive force sensor
2.1 Deposition of DLC sensor
2.2 Deposition of manganin sensor
2.3 DLC sensor design
2.4 Manganin sensor design
2.5 Calibration procedure
2.5.1 Force dependency
2.5.2 Temperature dependency
3 Thermoresistive thin-film sensors
3.1 Deposition
3.2 Design and structuring
3.3 Calibration procedure
4 Experimental setup and tests
Rake angle \(\gamma\) | Clearance angle \(\alpha\) | Main cutting angle \(\kappa\) | Cutting fluid |
---|---|---|---|
0\(^\circ\) | 7\(^\circ\) | 95\(^\circ\) | none |
Cutting speed \(v_c\) in m/min | Feed rate \(f\) in \(mm\)/rev | Depth of cut \(a_p\) in mm | |
Force sensor tests | 100 | 0.20, 0.30 | 0.3, 0.6, 0.9 |
Temperature sensor tests | 100, 150, 200 | 0.10, 0.20 | 0.6 |