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Erschienen in: The International Journal of Advanced Manufacturing Technology 1-2/2022

08.02.2022 | ORIGINAL ARTICLE

A real-time dressing method for metal lapping pads based on the thermal deformation effect

verfasst von: Lingyu Zhao, Huiying Zhao, Hairong Wang, Ruiqing Xie, Mingchen Cao, Mingzhuang Zhang, Shijie Zhao

Erschienen in: The International Journal of Advanced Manufacturing Technology | Ausgabe 1-2/2022

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Abstract

Surface shape and accuracy of the metal lapping pad have a significant impact on the performance of the lapping process for flat optical components, which are usually improved by the dressing process. A real-time dressing system for metal lapping pad surface shape (RDLS system) based on the bimetal thermal deformation effect is proposed. Unlike traditional dressing methods (e.g., turning dressing with a diamond tool), the real-time dressing based on the RDLS system is a material-loss-free and in-process dressing method. A full-aperture lapping turntable based on the RDLS system was designed, in which the working heat was analyzed. The displacement models of the lapping pad surface were established by regression analysis. Finally, several experiments were conducted to verify the functionality of the RDLS system. During turning dressing (turntable rotational speed n = 100 rpm), the displacement error was compensated by the RDLS system, which was caused by the working heat of the turntable shaft system. During the lapping processing for optical elements (n ≤ 20 rpm), the correction displacement was controlled by the RDLS system, which realized the real-time dressing of the lapping pad surface. The process performance of the plane optical component was optimized with the RDLS system (process parameter: the coolant temperature t). The effectiveness and practicality of the RDLS system were demonstrated experimentally.

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Literatur
1.
Zurück zum Zitat Li YG, Zhang QH, Wang J, Xu Q, Ye H (2017) 1.6 Precision grinding, lapping, polishing, and post-processing of optical glass. Reference. Compr Mater Finish 154–170 Li YG, Zhang QH, Wang J, Xu Q, Ye H (2017) 1.6 Precision grinding, lapping, polishing, and post-processing of optical glass. Reference. Compr Mater Finish 154–170
2.
Zurück zum Zitat Satake U, Enomoto T, Miyagawa T, Ohsumi T, Nakagawa H, Funabashi K (2019) Stabilization of removal rate in small tool polishing of glass lenses. Int J Autom Tech 13(2):221–229CrossRef Satake U, Enomoto T, Miyagawa T, Ohsumi T, Nakagawa H, Funabashi K (2019) Stabilization of removal rate in small tool polishing of glass lenses. Int J Autom Tech 13(2):221–229CrossRef
3.
Zurück zum Zitat Sun R, Nozoe A, Nagahashi J, Arima K, Kawai K, Yamamura K (2021) Novel highly-efficient and dress-free polishing technique with plasma-assisted surface modification and dressing. Precis Eng 72:224–236CrossRef Sun R, Nozoe A, Nagahashi J, Arima K, Kawai K, Yamamura K (2021) Novel highly-efficient and dress-free polishing technique with plasma-assisted surface modification and dressing. Precis Eng 72:224–236CrossRef
4.
Zurück zum Zitat Xu J, Zhu YW, Zhu NN, Wang JB, Li J (2014) Self-conditioning mechanism of hydrophilic fixed abrasive pad. Nanotechnol Precis Eng 12(6):429–434 Xu J, Zhu YW, Zhu NN, Wang JB, Li J (2014) Self-conditioning mechanism of hydrophilic fixed abrasive pad. Nanotechnol Precis Eng 12(6):429–434
5.
Zurück zum Zitat Yeh HM, Chen KS (2010) Development of a pad conditioning simulation module with a diamond dresser for CMP applications. Int J Adv Manuf Technol 50(1–4):1–12CrossRef Yeh HM, Chen KS (2010) Development of a pad conditioning simulation module with a diamond dresser for CMP applications. Int J Adv Manuf Technol 50(1–4):1–12CrossRef
6.
Zurück zum Zitat Liao D, Yuan Z, Tang C, Xie R, Chen X (2013) Mid-spatial frequency error (PSD-2) of optics induced during CCOS and full-aperture polishing. J Eur Opt Soc Rapid Publ 8:13031 Liao D, Yuan Z, Tang C, Xie R, Chen X (2013) Mid-spatial frequency error (PSD-2) of optics induced during CCOS and full-aperture polishing. J Eur Opt Soc Rapid Publ 8:13031
7.
Zurück zum Zitat Tsai MY, Sung JC (2009) Dressing behaviors of PCD conditioners on CMP polishing pads. Adv Mater Res 76–78:201–206CrossRef Tsai MY, Sung JC (2009) Dressing behaviors of PCD conditioners on CMP polishing pads. Adv Mater Res 76–78:201–206CrossRef
8.
Zurück zum Zitat Kim HM, Park GH, Seo YG, Moon DJ, Cho BJ, Park JG (2015) Comparison between sapphire lapping processes using 2-body and 3-body modes as a function of diamond abrasive size. Wear 332–333:794–799CrossRef Kim HM, Park GH, Seo YG, Moon DJ, Cho BJ, Park JG (2015) Comparison between sapphire lapping processes using 2-body and 3-body modes as a function of diamond abrasive size. Wear 332–333:794–799CrossRef
9.
Zurück zum Zitat Lee H (2020) Simulation on polishing pad wear in CMP conditioning with split conditioner disk. Int Conf Electr Inf Commun (ICEIC) 1–2 Lee H (2020) Simulation on polishing pad wear in CMP conditioning with split conditioner disk. Int Conf Electr Inf Commun (ICEIC) 1–2
10.
Zurück zum Zitat Pham QP, Chen CCA (2017) Study on pad cutting rate and surface roughness in diamond dressing process. Int J Precis Eng Manuf 18(12):1683–1691CrossRef Pham QP, Chen CCA (2017) Study on pad cutting rate and surface roughness in diamond dressing process. Int J Precis Eng Manuf 18(12):1683–1691CrossRef
11.
Zurück zum Zitat Chen CCA, Pham QP (2017) Study on diamond dressing for non-uniformity of pad surface topography in CMP process. Int J Adv Manuf Technol 91:3573–3582CrossRef Chen CCA, Pham QP (2017) Study on diamond dressing for non-uniformity of pad surface topography in CMP process. Int J Adv Manuf Technol 91:3573–3582CrossRef
12.
Zurück zum Zitat Ma F, Huang H (2020) Experimental research on the biological in-process dressing (BID) of Cu-Co matrix diamond tools. J Clean Prod 275:124070 Ma F, Huang H (2020) Experimental research on the biological in-process dressing (BID) of Cu-Co matrix diamond tools. J Clean Prod 275:124070
13.
Zurück zum Zitat Chiou YC, Lee RT, Yau CL (2007) A novel method of composite electroplating on lap in lapping process. Int J Mach Tools Manuf 47(2):361–367CrossRef Chiou YC, Lee RT, Yau CL (2007) A novel method of composite electroplating on lap in lapping process. Int J Mach Tools Manuf 47(2):361–367CrossRef
14.
Zurück zum Zitat Pan R, Tang Y, Zhong B, Chen D, Wang Z, Fan J, Zhang C (2019) Qualitative motion control optimization of the pad dressing process for bonnet tool. IEEE-ASME Trans Mechatron 24(3):1141–1152CrossRef Pan R, Tang Y, Zhong B, Chen D, Wang Z, Fan J, Zhang C (2019) Qualitative motion control optimization of the pad dressing process for bonnet tool. IEEE-ASME Trans Mechatron 24(3):1141–1152CrossRef
15.
Zurück zum Zitat Tsai MY, Li PH, Sung JC (2012) Organic diamond disk versus brazed diamond disk for dressing a chemical–mechanical polishing pad. Diam Relat Mat 23:144–149CrossRef Tsai MY, Li PH, Sung JC (2012) Organic diamond disk versus brazed diamond disk for dressing a chemical–mechanical polishing pad. Diam Relat Mat 23:144–149CrossRef
16.
Zurück zum Zitat Lee T, Kim H, Lee S, Park C, Kim D, Jeong H (2017) Self-dressing effect using a fixed abrasive platen for single-sided lapping of sapphire substrate. J Mech Sci Technol 31(12):5649–5655CrossRef Lee T, Kim H, Lee S, Park C, Kim D, Jeong H (2017) Self-dressing effect using a fixed abrasive platen for single-sided lapping of sapphire substrate. J Mech Sci Technol 31(12):5649–5655CrossRef
17.
Zurück zum Zitat Xie RQ, Zhao SJ, Liao DF, Chen XH, Wang J, Xu Q, Zhao HY, Jiang ZD (2019) Surface characteristics of polished YAG laser crystal. Cryst Res Technol 54(5):1800274CrossRef Xie RQ, Zhao SJ, Liao DF, Chen XH, Wang J, Xu Q, Zhao HY, Jiang ZD (2019) Surface characteristics of polished YAG laser crystal. Cryst Res Technol 54(5):1800274CrossRef
18.
Zurück zum Zitat Bedoya A, Marín E, Mansanares AM, Zambrano-Arjona MA, Riech I, Calderón A (2015) On the thermal characterization of solids by photoacoustic calorimetry: thermal diffusivity and linear thermal expansion coefficient. Thermochim Acta 614:52–58CrossRef Bedoya A, Marín E, Mansanares AM, Zambrano-Arjona MA, Riech I, Calderón A (2015) On the thermal characterization of solids by photoacoustic calorimetry: thermal diffusivity and linear thermal expansion coefficient. Thermochim Acta 614:52–58CrossRef
19.
Zurück zum Zitat Li Y, Dong S, Yan S, Liu X, Li E, He P, Xu B (2019) Elimination of voids by laser remelting during laser cladding Ni based alloy on gray cast iron. Opt Laser Technol 112:30–38CrossRef Li Y, Dong S, Yan S, Liu X, Li E, He P, Xu B (2019) Elimination of voids by laser remelting during laser cladding Ni based alloy on gray cast iron. Opt Laser Technol 112:30–38CrossRef
21.
Zurück zum Zitat Xu ZL (2006) Elasticity. Higher Education Press, Beijing Xu ZL (2006) Elasticity. Higher Education Press, Beijing
22.
Zurück zum Zitat Wei X, Feng X, Miao E, Qian M, Pan Q (2022) Sub-regional thermal error compensation modeling for CNC machine tool worktables. Precis Eng 73:313–325CrossRef Wei X, Feng X, Miao E, Qian M, Pan Q (2022) Sub-regional thermal error compensation modeling for CNC machine tool worktables. Precis Eng 73:313–325CrossRef
23.
Zurück zum Zitat Ma C, Liu J, Wang S (2020) Thermal error compensation of linear axis with fixed-fixed installation. Int J Mech Sci 175:105531 Ma C, Liu J, Wang S (2020) Thermal error compensation of linear axis with fixed-fixed installation. Int J Mech Sci 175:105531
24.
Zurück zum Zitat Liu J, Ma C, Gui H, Wang S (2021) Thermally-induced error compensation of spindle system based on long short term memory neural networks. Appl Soft Comput 102:107094 Liu J, Ma C, Gui H, Wang S (2021) Thermally-induced error compensation of spindle system based on long short term memory neural networks. Appl Soft Comput 102:107094
25.
Zurück zum Zitat Reddy TN, Shanmugaraj V, Vinod P, Krishna SG (2020) Real-time thermal error compensation strategy for precision machine tools. Mater Today Proc 22:2386–2396 Reddy TN, Shanmugaraj V, Vinod P, Krishna SG (2020) Real-time thermal error compensation strategy for precision machine tools. Mater Today Proc 22:2386–2396
26.
Zurück zum Zitat Preston FW (1927) The theory and design of plate glass polishing machines. J Soc Glass Tech 11:214–256 Preston FW (1927) The theory and design of plate glass polishing machines. J Soc Glass Tech 11:214–256
27.
Zurück zum Zitat Li C, Wu Y, Li X, Ma L, Zhang F, Huang H (2020) Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals. J Mater Process Technol 279:116577 Li C, Wu Y, Li X, Ma L, Zhang F, Huang H (2020) Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals. J Mater Process Technol 279:116577
29.
Zurück zum Zitat Liu JC, Tan KH, Zhang D (2017) Multi-response optimization of post-fire performance of strain hardening cementitious composite. Cem Concr Compos 80:80–90CrossRef Liu JC, Tan KH, Zhang D (2017) Multi-response optimization of post-fire performance of strain hardening cementitious composite. Cem Concr Compos 80:80–90CrossRef
31.
Zurück zum Zitat Asiltürk I, Akkus H (2011) Determining the effect of cutting parameters on surface roughness in hard turning using the Taguchi method. Measurement 44(9):1697–1704 Asiltürk I, Akkus H (2011) Determining the effect of cutting parameters on surface roughness in hard turning using the Taguchi method. Measurement 44(9):1697–1704
Metadaten
Titel
A real-time dressing method for metal lapping pads based on the thermal deformation effect
verfasst von
Lingyu Zhao
Huiying Zhao
Hairong Wang
Ruiqing Xie
Mingchen Cao
Mingzhuang Zhang
Shijie Zhao
Publikationsdatum
08.02.2022
Verlag
Springer London
Erschienen in
The International Journal of Advanced Manufacturing Technology / Ausgabe 1-2/2022
Print ISSN: 0268-3768
Elektronische ISSN: 1433-3015
DOI
https://doi.org/10.1007/s00170-022-08869-y

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