Characterization of a novel segmented micro mirror

The static and dynamic characteristics of a designed novel segmented micromirror are discussed. At first, the equivalent elastic coefficients of supporting structure are deduced based on energy theory for mirrors under different actuating states. Then the static deflection as a function of driving voltage, resonant frequency and transient response are analyzed with respect to the piston movement along Z-axis. The results show that the deflection can reach 2 μm when 115 V voltage is applied, the resonant frequency is 58.805 kHz and the rise time is only 2.86 × 10⁻⁶ s, which hold promise of application. The validity of the theory analysis in this paper is also proved through the comparison with the simulation results obtained with ANSYS.