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Microsystem Technologies
Erschienen in: Microsystem Technologies 4/2017

11.02.2016 | Technical Paper

Design and control of a novel piezo-driven XY parallel nanopositioning stage

verfasst von: Xiaozhi Zhang, Yulong Zhang, Qingsong Xu

Erschienen in: Microsystem Technologies | Ausgabe 4/2017

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Abstract

This paper presents the mechanism and control design of a modular XY nanopositioning stage employing flexure mechanisms and piezoelectric actuators. A new compact parallel flexure stage with two translational degrees-of-freedom is presented. The dual-stacked bridge-type amplifier is employed by a serial connection of two amplifiers. Static and dynamic analytical modeling of the XY stage are carried out, which are verified by performing finite element analysis simulations. Owing to a larger amplification ratio of the bridge-type amplifier and acceptable decoupling property, the stage exhibits a nearly decoupled two-dimensional large motion. Moreover, the adaptive discrete sliding mode control scheme is devised to achieve precise positioning for the stage. The performance and effectiveness of this presented design are verified by several experimental studies.
Vorheriger Artikel Influence of surface effects on vibration behavior of a rotary functionally graded nanobeam based on Eringen’s nonlocal elasticity
Nächster Artikel Gas-assisted light-cure microstructure transfer molding and transfer transformation

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Metadaten
Titel
Design and control of a novel piezo-driven XY parallel nanopositioning stage
verfasst von
Xiaozhi Zhang
Yulong Zhang
Qingsong Xu
Publikationsdatum
11.02.2016
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 4/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-2854-y

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