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Microsystem Technologies

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20.03.2017 | Technical Paper

Design, fabrication and characterization of 1.0 μm Gap Al based interdigitated electrode for biosensors

verfasst von: R. D. A. A. Rajapaksha, U. Hashim, C. A. N. Fernando

Erschienen in: Microsystem Technologies | Ausgabe 10/2017

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Abstract

Interdigitated electrode (IDE) based electrical biosensors are promising in the medical application field. The aim of the research study is design, fabricate and characterize of low cost, high sensitive biosensor for medical applications. IDE pattern was designed using AutoCAD software with 1 μm finger gap. Fabrication process was done using conventional photolithography process and standard CMOS process. Fabricated electrode was physically characterized using SEM images, electrically validated through I–V measurements and chemically tested with different pH buffer solutions. Al IDE was well fabricated with 0.1 μm tolerance between design mask and fabricated IDEs. Electrical measurements confirmed that IDE was well fabricated without any shortage and results of similar IDE samples were confirmed that the repeatability of the device. The extremely small current variations in nano ampere range were quantitatively detected using extra small volume of 1 μl for different pH buffer solutions. It is confirmed that IDEs are sensitive in both alkali and hydroxyl ions medium.

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Titel: Design, fabrication and characterization of 1.0 μm Gap Al based interdigitated electrode for biosensors
verfasst von: R. D. A. A. Rajapaksha
U. Hashim
C. A. N. Fernando
Publikationsdatum: 20.03.2017
Verlag: Springer Berlin Heidelberg
Erschienen in: Microsystem Technologies / Ausgabe 10/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-017-3373-1

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