Development and analysis of electro-optical microresonator with low range natural frequency

Microresonators are fundamental components integrated in a hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micromirror devices, material characterization, gyroscopes, etc. A constituent part of the microresonator is a diffractive optical element (DOE). Different methods and materials are used to produce diffraction gratings for DOEs. Two-dimensional or three-dimensional periodic structures of micrometer-scale period are widely used in microsystems or their components. They can be used as elements for microscale synthesis, processing, and analysis of chemical and biological samples. On the other hand microresonator was designed using composite piezoelectric material. In case when microscopes, vibrometers or other direct measurement methods are destructive and hardly can be employed for in situ analysis, indirect measurement of electrical signal generated by composite piezoelectric layer allows to measure natural frequency changes. Also piezoelectric layer allows to create a novel microresonator with controllable parameters, which could assure much higher functionality of microelectromechanical systems. The novel microresonator for pollution detection is proposed. Mathematical model of the microresonator and its dynamical, electrical and optical characteristics are presented.