Four-leg independent mechanism for MEMS microrobot

In this paper, the development of a quadruped micro-electro mechanical system (MEMS) microrobot with a four-leg independent mechanism is described. As the actuator mechanism inside small robot bodies is difficult to realize, many microrobots use external field forces such as magnetism and vibration. In this paper, artificial muscle wires that are family of shape memory alloy are used for the force of the actuator. The artificial muscle wire shows the large displacement by passing the electrical current through the material itself. The double four-link mechanism is adopted for the leg system. The link mechanism transforms the linear motion of the artificial muscle wire to the foot step-like pedaling motion. The location of the backward swing motion is lower than that of forward swing motion. This motion generates the locomotion force. As a result, the total length of the constructed quadruped MEMS microrobot was 6 mm. The microrobot could perform similar gait pattern changes as the quadruped animal.