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2018 | OriginalPaper | Buchkapitel

Investigation of Titanium Aluminium Nitride (TiAlN): A Review

verfasst von : Soham Das, Bibhu Prasad Swain

Erschienen in: Advances in Electronics, Communication and Computing

Verlag: Springer Singapore

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Abstract

Titanium aluminium nitride (TiAlN) thin films are now commonly used as protective layer in various fields as these films have high thermal stability and sound corrosion resistance. Due to high hardness and wear resistance at elevated temperature, it is one of the most important thin film coating material for cutting tools. Various deposition methods such as physical vapour deposition (PVD), chemical vapour deposition (CVD), sputtering technique, etc., are used by many researchers to synthesize TiAlN coatings. To analyse morphological, structural, and mechanical characteristics, various tests such as SEM, AFM, xrd, Raman, and nanoindentation have been carried out by many researchers. This paper basically summarizes the properties of TiAlN monolayer, nanolayer, and multilayer thin films.

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Literatur
1.
Zurück zum Zitat Gago, R., Soldera, F., Hubner, R., Lehmann, J., Munnik, F., Vazquez, L., Redondo-Cubero, J.A., Endrino, L.: X-ray absorption near-edge structure of hexagonal ternary phases in sputter-deposited TiAlN films. J. Alloy. Comp. 561, 87–94 (2013) Gago, R., Soldera, F., Hubner, R., Lehmann, J., Munnik, F., Vazquez, L., Redondo-Cubero, J.A., Endrino, L.: X-ray absorption near-edge structure of hexagonal ternary phases in sputter-deposited TiAlN films. J. Alloy. Comp. 561, 87–94 (2013)
2.
Zurück zum Zitat Major, B., Major, R., Bruckert, F., Lackner, J.M., Ebner, R., Kustosz, R., Lacki, P.: New gradient coatings on TiN and TiCN basis for biomedical application to blood contact. Adv. Mater. Sci. 7, 63–70 (2007) Major, B., Major, R., Bruckert, F., Lackner, J.M., Ebner, R., Kustosz, R., Lacki, P.: New gradient coatings on TiN and TiCN basis for biomedical application to blood contact. Adv. Mater. Sci. 7, 63–70 (2007)
3.
Zurück zum Zitat Gnoth, C., Kunze, C., Hans, M., Baben, M., Emmerlich, J., Schneider, J.M., Grundmeier, G.: Surface chemistry of TiAlN and TiAlNO coatings deposited by means of high power pulsed magnetron sputtering. J. Phys. D Appl. Phys. 46, 8 (2013) Gnoth, C., Kunze, C., Hans, M., Baben, M., Emmerlich, J., Schneider, J.M., Grundmeier, G.: Surface chemistry of TiAlN and TiAlNO coatings deposited by means of high power pulsed magnetron sputtering. J. Phys. D Appl. Phys. 46, 8 (2013)
4.
Zurück zum Zitat Subramanian, B., Ananthakumar, R., Jayachandran, M.: Microstructural, mechanical and electrochemical corrosion properties of sputtered titanium–aluminum–nitride films for bio-implants. Vacuum 85, 601–609 (2010) Subramanian, B., Ananthakumar, R., Jayachandran, M.: Microstructural, mechanical and electrochemical corrosion properties of sputtered titanium–aluminum–nitride films for bio-implants. Vacuum 85, 601–609 (2010)
5.
Zurück zum Zitat Khlifi, K., Ben, A., Larbi, C.: Mechanical properties and adhesion of TiN monolayer and TiN/TiAlN nanolayer coatings. J. Adhes. Sci. Technol. 28, 85–96 (2014) Khlifi, K., Ben, A., Larbi, C.: Mechanical properties and adhesion of TiN monolayer and TiN/TiAlN nanolayer coatings. J. Adhes. Sci. Technol. 28, 85–96 (2014)
6.
Zurück zum Zitat Dani, S., Sava, S.S.: Relation between coating parameters and structural and mechanical properties of magnetron sputtered TiAlN coatings. Arab. J. Sci. Eng. 39, 5025–5034 (2014) Dani, S., Sava, S.S.: Relation between coating parameters and structural and mechanical properties of magnetron sputtered TiAlN coatings. Arab. J. Sci. Eng. 39, 5025–5034 (2014)
7.
Zurück zum Zitat Park, M.-H., Kim, S.-H.: Temperature coefficient of resistivity of TiAlN films deposited by radio frequency magnetron sputtering. Trans. Nonferrous Mat. Soc. 23, 433–438 (2013) Park, M.-H., Kim, S.-H.: Temperature coefficient of resistivity of TiAlN films deposited by radio frequency magnetron sputtering. Trans. Nonferrous Mat. Soc. 23, 433–438 (2013)
8.
Zurück zum Zitat Buranawong, A., Witit-anun, N., Chaiyakun, S., Pokaipisit, A., Limsuwan, P.: The effect of titanium current on structure and hardness of aluminium titanium nitride deposited by reactive unbalanced magnetron co-sputtering. Thin Solid Films 519, 4963–4968 (2011) Buranawong, A., Witit-anun, N., Chaiyakun, S., Pokaipisit, A., Limsuwan, P.: The effect of titanium current on structure and hardness of aluminium titanium nitride deposited by reactive unbalanced magnetron co-sputtering. Thin Solid Films 519, 4963–4968 (2011)
9.
Zurück zum Zitat Huang, R.-X., Qi, Z.-B., Sun, P., Wang, Z.-C., Wu, C.-H.: Influence of substrate roughness on structure and mechanical property of TiAlN coating fabricated by cathodic arc evaporation. Phys. Procedia 18, 160–167 (2011) Huang, R.-X., Qi, Z.-B., Sun, P., Wang, Z.-C., Wu, C.-H.: Influence of substrate roughness on structure and mechanical property of TiAlN coating fabricated by cathodic arc evaporation. Phys. Procedia 18, 160–167 (2011)
10.
Zurück zum Zitat Chawla, V., Puri, D., Prakash, S., Chawla, A., Sidhu, B.S.: Characterization and comparison of corrosion behavior of nanostructured TiAlN and AlCrN coatings on superfer 800H (INCOLOY 800 H) substrate. J. Miner. Mater. Charact. Eng. 8, 715–727 (2009) Chawla, V., Puri, D., Prakash, S., Chawla, A., Sidhu, B.S.: Characterization and comparison of corrosion behavior of nanostructured TiAlN and AlCrN coatings on superfer 800H (INCOLOY 800 H) substrate. J. Miner. Mater. Charact. Eng. 8, 715–727 (2009)
11.
Zurück zum Zitat Sui, X., Li, G., Qin, X., Yu, H., Zhou, X., Wang, K., Wang, Q.: Relationship of microstructure, mechanical properties and titanium cutting performance of TiAlN/TiAlSiN composite coated tool. Ceram. Int. 42, 7524–7532 (2016) Sui, X., Li, G., Qin, X., Yu, H., Zhou, X., Wang, K., Wang, Q.: Relationship of microstructure, mechanical properties and titanium cutting performance of TiAlN/TiAlSiN composite coated tool. Ceram. Int. 42, 7524–7532 (2016)
12.
Zurück zum Zitat Sun, G.D., Yi, D.L., Liu, C.H.: Comparison of surface properties of TiN and TiAlN coating prepared by Arc Ion plating for the improvement of life-time extension of tool steel. Adv. Mater. Res. 887–888, 1096–1100 (2014) Sun, G.D., Yi, D.L., Liu, C.H.: Comparison of surface properties of TiN and TiAlN coating prepared by Arc Ion plating for the improvement of life-time extension of tool steel. Adv. Mater. Res. 887–888, 1096–1100 (2014)
13.
Zurück zum Zitat Zouina, A., Djafera, A., Saoula, N., Aknouche, H., Guedoua, B., Madaoui, N.: Deposition and characterization of titanium aluminum nitride coatings prepared by RF magnetron sputtering. Appl. Surf. Sci. 350, 6–9 (2015) Zouina, A., Djafera, A., Saoula, N., Aknouche, H., Guedoua, B., Madaoui, N.: Deposition and characterization of titanium aluminum nitride coatings prepared by RF magnetron sputtering. Appl. Surf. Sci. 350, 6–9 (2015)
14.
Zurück zum Zitat Pei, A.N., Zhilei, H.E., Jiaqian, Q., Ziyang, L., Yongjun, L., Zili, K., Duanwei, H.E.: Stability of titanium-aluminium Nitride (Ti2AlN) at high pressure and high temperatures. J. Wuhan Univ. Technol. Mater. Sci. Ed. 26, 914–919 (2011) Pei, A.N., Zhilei, H.E., Jiaqian, Q., Ziyang, L., Yongjun, L., Zili, K., Duanwei, H.E.: Stability of titanium-aluminium Nitride (Ti2AlN) at high pressure and high temperatures. J. Wuhan Univ. Technol. Mater. Sci. Ed. 26, 914–919 (2011)
15.
Zurück zum Zitat Girleanu, M., Pac, M.J., Louis, P., Ersen, O., Werckmann, J., Rousselot, C., Tuilier, M.H.: Characterization of nano-structured titanium and aluminium nitride coatings by indentation, transmission electron microscopy and electron energy loss spectroscopy. Thin Solid Films 519, 6190–6195 (2011) Girleanu, M., Pac, M.J., Louis, P., Ersen, O., Werckmann, J., Rousselot, C., Tuilier, M.H.: Characterization of nano-structured titanium and aluminium nitride coatings by indentation, transmission electron microscopy and electron energy loss spectroscopy. Thin Solid Films 519, 6190–6195 (2011)
16.
Zurück zum Zitat Chawla, V., Chandra, R., Jayaganthan, R.: Effect of phase transformation on structural, electrical and hydrophobic properties of nano-composite Ti1−xAlxN films. J. Alloy. Compd. 507, L47–L53 (2010) Chawla, V., Chandra, R., Jayaganthan, R.: Effect of phase transformation on structural, electrical and hydrophobic properties of nano-composite Ti1−xAlxN films. J. Alloy. Compd. 507, L47–L53 (2010)
17.
Zurück zum Zitat Lei, X., Wang, L., Shen, B., Sun, F., Zhang, Z.: Comparison of chemical vapor deposition diamond-, diamond-like carbon- and TiAlN-coated micro-drills in graphite machining. J. Eng. Manuf. 227, 1299–1309 (2013) Lei, X., Wang, L., Shen, B., Sun, F., Zhang, Z.: Comparison of chemical vapor deposition diamond-, diamond-like carbon- and TiAlN-coated micro-drills in graphite machining. J. Eng. Manuf. 227, 1299–1309 (2013)
18.
Zurück zum Zitat Zhang, H., Wang, S., Guo, P., Wang, M.: Microstructure and wear properties analysis of TiAlN film deposited on Cam profile using ion sputtering. Tribol. Trans. 56, 968–976 (2013) Zhang, H., Wang, S., Guo, P., Wang, M.: Microstructure and wear properties analysis of TiAlN film deposited on Cam profile using ion sputtering. Tribol. Trans. 56, 968–976 (2013)
19.
Zurück zum Zitat Yan, J.Y., Sun, Y.D., Li, D.J., Liu, M.Y., Dong, L., Cao, M., Gao, C.K., Wang, N., Deng, X.Y., Gu, H.Q., Wan, R.X., Sun, X.: High-temperature stability of TiAlN/TiB2 multilayers grown on Al2O3 substrates using IBAD. Surf. Coat. Technol. 229, 105–108 (2013) Yan, J.Y., Sun, Y.D., Li, D.J., Liu, M.Y., Dong, L., Cao, M., Gao, C.K., Wang, N., Deng, X.Y., Gu, H.Q., Wan, R.X., Sun, X.: High-temperature stability of TiAlN/TiB2 multilayers grown on Al2O3 substrates using IBAD. Surf. Coat. Technol. 229, 105–108 (2013)
20.
Zurück zum Zitat Li, P., Chen, L., Wang, S.Q., Yang, B., Du, Y., Li, J., Wu, M.J.: Microstructure, mechanical and thermal properties of TiAlN/CrAlN multilayer coatings. Int. J. Refract. Met. Hard Mater. 40, 51–57 (2013) Li, P., Chen, L., Wang, S.Q., Yang, B., Du, Y., Li, J., Wu, M.J.: Microstructure, mechanical and thermal properties of TiAlN/CrAlN multilayer coatings. Int. J. Refract. Met. Hard Mater. 40, 51–57 (2013)
21.
Zurück zum Zitat Feng, J., Zhang, S., Lu, Y., Yu, H., Kang, L., Wang, X., Liu, Z., Ding, H., Tian, Y., Ouyang, J.: The spectral selective absorbing characteristics and thermal stability of SS/TiAlN/TiAlSiN/Si3N4 tandem absorber prepared by magnetron sputtering. Solar Energy 111, 350–356 (2015) Feng, J., Zhang, S., Lu, Y., Yu, H., Kang, L., Wang, X., Liu, Z., Ding, H., Tian, Y., Ouyang, J.: The spectral selective absorbing characteristics and thermal stability of SS/TiAlN/TiAlSiN/Si3N4 tandem absorber prepared by magnetron sputtering. Solar Energy 111, 350–356 (2015)
22.
Zurück zum Zitat Xian, G., Zhao, H.B., Fan, H.Y., Du, H.: Structure and mechanical properties of Zr/TiAlN films prepared by plasma-enhanced magnetron sputtering. Rare Met. 300, 717–724 (2014) Xian, G., Zhao, H.B., Fan, H.Y., Du, H.: Structure and mechanical properties of Zr/TiAlN films prepared by plasma-enhanced magnetron sputtering. Rare Met. 300, 717–724 (2014)
23.
Zurück zum Zitat Dejun, K., GuiZhong, F.U.: Nanoindentation analysis of TiN, TiAlN, and TiAlSiN coatings prepared by cathode ion plating. Technol. Sci. 58, 1–9 (2015) Dejun, K., GuiZhong, F.U.: Nanoindentation analysis of TiN, TiAlN, and TiAlSiN coatings prepared by cathode ion plating. Technol. Sci. 58, 1–9 (2015)
24.
Zurück zum Zitat Yi, P., Peng, L., Huang, J.: Multilayered TiAlN films on Ti6Al4V alloy for biomedical applications by closed field unbalanced magnetron sputter ion plating process. Mater. Sci. Eng. 59, 669–676 (2016) Yi, P., Peng, L., Huang, J.: Multilayered TiAlN films on Ti6Al4V alloy for biomedical applications by closed field unbalanced magnetron sputter ion plating process. Mater. Sci. Eng. 59, 669–676 (2016)
25.
Zurück zum Zitat Rousseau, A.F., Partridge, J.G., Mayes, E.L.H., Totona, J.T., Kracica, M., McCulloch, D.G., Doyle, E.D.: Microstructural and tribological characterisation of a nitriding/TiAlN PVD coating duplex treatment applied to M2 high speed steel tools. Surf. Coat. Technol. 272, 403–408 (2015) Rousseau, A.F., Partridge, J.G., Mayes, E.L.H., Totona, J.T., Kracica, M., McCulloch, D.G., Doyle, E.D.: Microstructural and tribological characterisation of a nitriding/TiAlN PVD coating duplex treatment applied to M2 high speed steel tools. Surf. Coat. Technol. 272, 403–408 (2015)
26.
Zurück zum Zitat Huang, H., Li, Z., Wang, M., Xie, C.: Microstructural and mechanical properties of TiAlN and Ti3AlN films deposited by reactive magnetron sputtering. Mater. Sci. Forum 816, 283–288 (2015) Huang, H., Li, Z., Wang, M., Xie, C.: Microstructural and mechanical properties of TiAlN and Ti3AlN films deposited by reactive magnetron sputtering. Mater. Sci. Forum 816, 283–288 (2015)
27.
Zurück zum Zitat Wang, R., Li, J., Wang, Y., Hu, J., Wu, H.: High temperature oxidation behavior and mechanical properties of TiAlN/SiN decorative films on borosilicate glass by magnetron sputtering. Thin Solid Films 584, 72–77 (2015) Wang, R., Li, J., Wang, Y., Hu, J., Wu, H.: High temperature oxidation behavior and mechanical properties of TiAlN/SiN decorative films on borosilicate glass by magnetron sputtering. Thin Solid Films 584, 72–77 (2015)
28.
Zurück zum Zitat Pinot, Y., Pac, M.J., Henry, P., Rousselot, C., Odarchenko, Y.I., Ivanov, D.A., Bouillet, C.U., Ersen, O., Tuilier, M.H.: Friction behavior of TiAlN films around cubic/hexagonal transition: A 2D grazing incidence X-ray diffraction and electron energy loss spectroscopy study. Thin Solid Films 577, 74–81 (2015) Pinot, Y., Pac, M.J., Henry, P., Rousselot, C., Odarchenko, Y.I., Ivanov, D.A., Bouillet, C.U., Ersen, O., Tuilier, M.H.: Friction behavior of TiAlN films around cubic/hexagonal transition: A 2D grazing incidence X-ray diffraction and electron energy loss spectroscopy study. Thin Solid Films 577, 74–81 (2015)
29.
Zurück zum Zitat Twu, M.J., Hu, C.C., Liu, D.W., Hsu, C.Y., Kuo, C.G.: Effect of TiN, CrN and TiAlN coatings using reactive sputtering on the fatigue behaviour of AA2024 and medium carbon steel specimens. J. Exp. Nanosci. 11, 581–592 (2015) Twu, M.J., Hu, C.C., Liu, D.W., Hsu, C.Y., Kuo, C.G.: Effect of TiN, CrN and TiAlN coatings using reactive sputtering on the fatigue behaviour of AA2024 and medium carbon steel specimens. J. Exp. Nanosci. 11, 581–592 (2015)
30.
Zurück zum Zitat Shanga, H., Li, J., Shaoa, T.: Mechanical properties and thermal stability of TiAlN/Ta multilayer film deposited by ion beam assisted deposition. Appl. Surf. Sci. 310, 317–320 (2014) Shanga, H., Li, J., Shaoa, T.: Mechanical properties and thermal stability of TiAlN/Ta multilayer film deposited by ion beam assisted deposition. Appl. Surf. Sci. 310, 317–320 (2014)
31.
Zurück zum Zitat Kumar, T.S., Prabu, S.B., Manivasagam, G.: Metallurgical characteristics of TiAlN/AlCrN coating synthesized by the PVD PROCESS on a cutting insert. J. Mater. Eng. Perform. 23, 2877–2884 (2014) Kumar, T.S., Prabu, S.B., Manivasagam, G.: Metallurgical characteristics of TiAlN/AlCrN coating synthesized by the PVD PROCESS on a cutting insert. J. Mater. Eng. Perform. 23, 2877–2884 (2014)
32.
Zurück zum Zitat Zhan, J., Cai, J., Zhao, W., Zhang, Z.: Microstructure and mechanical properties of TiAlON/TiAlN/TiAl films. Appl. Mech. Mater. 628, 93–97 (2014) Zhan, J., Cai, J., Zhao, W., Zhang, Z.: Microstructure and mechanical properties of TiAlON/TiAlN/TiAl films. Appl. Mech. Mater. 628, 93–97 (2014)
33.
Zurück zum Zitat Sprute, T., Tillmann, W., Grisales, D., Selvadurai, U., Fischer, G.: Influence of substrate pre-treatments on residual stresses and tribo-mechanical properties of TiAlN-based PVD coatings. Surf. Coat. Technol. 260, 369–379 (2014) Sprute, T., Tillmann, W., Grisales, D., Selvadurai, U., Fischer, G.: Influence of substrate pre-treatments on residual stresses and tribo-mechanical properties of TiAlN-based PVD coatings. Surf. Coat. Technol. 260, 369–379 (2014)
34.
Zurück zum Zitat Longn, Y., Zeng, J., Yu, D., Wu, S.: Microstructure of TiAlN and CrAlN coatings and cutting performance of coated silicon nitride inserts in cast iron turning. Ceram. Int. 40, 9889–9894 (2014) Longn, Y., Zeng, J., Yu, D., Wu, S.: Microstructure of TiAlN and CrAlN coatings and cutting performance of coated silicon nitride inserts in cast iron turning. Ceram. Int. 40, 9889–9894 (2014)
35.
Zurück zum Zitat Deng, B., Pei, J., Tao, Y.E.: Microstructure, mechanical and tribological properties of the TiAlN coatings after Nb and C dual ion implantation. Mater. Sci. Forum 789, 455–460 (2014) Deng, B., Pei, J., Tao, Y.E.: Microstructure, mechanical and tribological properties of the TiAlN coatings after Nb and C dual ion implantation. Mater. Sci. Forum 789, 455–460 (2014)
36.
Zurück zum Zitat Wang, C.F., Ou, S.F., Chiou, S.Y.: Microstructures of TiN, TiAlN and TiAlVN coatings on AISI M2 steel deposited by magnetron reactive sputtering. Trans. Nonferrous Met. Soc. China 24, 2559–2565 (2014) Wang, C.F., Ou, S.F., Chiou, S.Y.: Microstructures of TiN, TiAlN and TiAlVN coatings on AISI M2 steel deposited by magnetron reactive sputtering. Trans. Nonferrous Met. Soc. China 24, 2559–2565 (2014)
37.
Zurück zum Zitat Ananthakumar, R., Subramanian, B., Kobayashi, A., Jayachandran, M.: Electrochemical corrosion and materials properties of reactively sputtered TiN/TiAlN multilayer coatings. Ceram. Int. 38, 477–485 (2012) Ananthakumar, R., Subramanian, B., Kobayashi, A., Jayachandran, M.: Electrochemical corrosion and materials properties of reactively sputtered TiN/TiAlN multilayer coatings. Ceram. Int. 38, 477–485 (2012)
38.
Zurück zum Zitat Barshilia, H.C., Yogesh, K., Rajam, K.S.: Deposition of TiAlN coatings using reactive bipolar-pulsed direct current unbalanced magnetron sputtering. Vacuum 83, 427–434 (2009) Barshilia, H.C., Yogesh, K., Rajam, K.S.: Deposition of TiAlN coatings using reactive bipolar-pulsed direct current unbalanced magnetron sputtering. Vacuum 83, 427–434 (2009)
39.
Zurück zum Zitat Wosińska, L.A.L., Mikuła, J., Gołombek, K., Gawarecki, T.: Investigation of hard gradient PVD (Ti, Al, Si)N coating. J. Achiev. Mater. Manuf. Eng. 24, 79–85 (2007) Wosińska, L.A.L., Mikuła, J., Gołombek, K., Gawarecki, T.: Investigation of hard gradient PVD (Ti, Al, Si)N coating. J. Achiev. Mater. Manuf. Eng. 24, 79–85 (2007)
40.
Zurück zum Zitat Rizzo, A., Mirenghi, L., Massaro, M., Galiett, U., Capodieci, L., Terz, R., Tapfer, L., Valerini, D.: Improved properties of TiAlN coatings through the multilayer structure. Surf. Coat. Technol. 235, 475–483 (2013) Rizzo, A., Mirenghi, L., Massaro, M., Galiett, U., Capodieci, L., Terz, R., Tapfer, L., Valerini, D.: Improved properties of TiAlN coatings through the multilayer structure. Surf. Coat. Technol. 235, 475–483 (2013)
41.
Zurück zum Zitat Gao, C.K., Yan, J.Y., Dong, L., Li, D.J.: Influence of Al2O3 layer thickness on high-temperature stability of TiAlN/Al2O3 multilayers. Appl. Surf. Sci. 285, 287–292 (2013) Gao, C.K., Yan, J.Y., Dong, L., Li, D.J.: Influence of Al2O3 layer thickness on high-temperature stability of TiAlN/Al2O3 multilayers. Appl. Surf. Sci. 285, 287–292 (2013)
42.
Zurück zum Zitat Subramanian, B., Muraleedharan, C.V., Ananthakumar, R., Jayachandran, M.: A comparative study of titanium nitride (TiN), titanium oxy nitride (TiON) and titanium aluminum nitride (TiAlN), as surface coatings for bio implants. Surf. Coat. Technol. 205, 5014–5020 (2011) Subramanian, B., Muraleedharan, C.V., Ananthakumar, R., Jayachandran, M.: A comparative study of titanium nitride (TiN), titanium oxy nitride (TiON) and titanium aluminum nitride (TiAlN), as surface coatings for bio implants. Surf. Coat. Technol. 205, 5014–5020 (2011)
43.
Zurück zum Zitat Feiler, M.P., Zechner, J., Penoy, M., Michotte, C., Kathrein, M.: Improved oxidation resistance of TiAlN coatings by doping with Si or B. Surf. Coat. Technol. 203, 3104–3110 (2009) Feiler, M.P., Zechner, J., Penoy, M., Michotte, C., Kathrein, M.: Improved oxidation resistance of TiAlN coatings by doping with Si or B. Surf. Coat. Technol. 203, 3104–3110 (2009)
44.
Zurück zum Zitat Subramanian, B., Ashok, K., Kuppusami, P., Sanjeeviraja, C., Jayachandran, M.: Characterization of reactive DC magnetron sputtered TiAlN thin films. Cryst. Res. Technol. 43, 1078–1082 (2008) Subramanian, B., Ashok, K., Kuppusami, P., Sanjeeviraja, C., Jayachandran, M.: Characterization of reactive DC magnetron sputtered TiAlN thin films. Cryst. Res. Technol. 43, 1078–1082 (2008)
Metadaten
Titel
Investigation of Titanium Aluminium Nitride (TiAlN): A Review
verfasst von
Soham Das
Bibhu Prasad Swain
Copyright-Jahr
2018
Verlag
Springer Singapore
DOI
https://doi.org/10.1007/978-981-10-4765-7_16

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