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Journal of Materials Science

Erschienen in:

21.12.2016 | Original Paper

LiCl-enhanced capacitive humidity-sensing properties of cadmium sulfide grown on silicon nanoporous pillar array

verfasst von: Ming Hai Feng, Wen Chuang Wang, Xin Jian Li

Erschienen in: Journal of Materials Science | Ausgabe 7/2017

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Abstract

The extensive application of humidity sensors has greatly stimulated the study on high-performance humidity-sensing materials. In the paper, we report that a prototype humidity sensor was prepared by growing cadmium sulfide (CdS) on silicon nanoporous pillar array (Si-NPA) through a successive ionic layer adsorption and reaction method followed by immersing the samples in the solution of lithium chloride (LiCl). It was demonstrated that through the immersion treatment, the humidity-sensing properties including the response and its linearity, response and recovery time, hysteresis, and measuring reproducibility and stability were improved significantly. These results indicated that LiCl-immersed CdS/Si-NPA might be a promising material for fabricating humidity sensors applied to medium and low humidity range.

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Titel: LiCl-enhanced capacitive humidity-sensing properties of cadmium sulfide grown on silicon nanoporous pillar array
verfasst von: Ming Hai Feng
Wen Chuang Wang
Xin Jian Li
Publikationsdatum: 21.12.2016
Verlag: Springer US
Erschienen in: Journal of Materials Science / Ausgabe 7/2017
Print ISSN: 0022-2461
Elektronische ISSN: 1573-4803
DOI: https://doi.org/10.1007/s10853-016-0641-x

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