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Microsystem Technologies

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01.05.2015 | Technical Paper

Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch

verfasst von: Deepak Bansal, Amit Kumar, Akshdeep Sharma, K. J. Rangra

Erschienen in: Microsystem Technologies | Ausgabe 5/2015

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Abstract

This paper presents a new single pole double throw (SPDT) RF MEMS switch design based on a torsional series capacitive switch. The torsional configuration and use of floating metal reduce the stiction probabilities. Use of a single series capacitive switch compared to the conventional approach of a capacitive and series combination, offers compact size, higher bandwidth and superior reliability. The optimized SPDT topology offers a wider bandwidth of 17 GHz (3–20 GHz) with insertion loss of −0.3 to −0.4 dB and isolation −20 to −44 dB. The proposed structure actuates at 9 V and the contact force varies in the elastic contact regime from 20 to 68 µN for the bias voltage of 10–15 V.

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Titel: Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
verfasst von: Deepak Bansal
Amit Kumar
Akshdeep Sharma
K. J. Rangra
Publikationsdatum: 01.05.2015
Verlag: Springer Berlin Heidelberg
Erschienen in: Microsystem Technologies / Ausgabe 5/2015
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-014-2238-0

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