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Microsystem Technologies
Erschienen in: Microsystem Technologies 3/2010

01.03.2010 | Technical Paper

Dielectric materials for electrowetting-on-dielectric actuation

verfasst von: Hong Liu, Saman Dharmatilleke, Devendra K. Maurya, Andrew A. O. Tay

Erschienen in: Microsystem Technologies | Ausgabe 3/2010

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Abstract

The fundamental building blocks of typical electrowetting-on-dielectric (EWOD) actuation and their importance in the EWOD mechanism are introduced and reviewed, respectively. The emphasis in this experimental study of EWOD is on dielectric materials, upon which the performance of EWOD devices is heavily dependent. Dielectric breakdown of several typical polymeric and inorganic insulators employed as dielectrics for EWOD has been analytically investigated, which is forced to occur between the electrodes and conductive liquids under certain threshold potential. The electric breakdown occurring in both dielectric layer and surrounding medium (air or silicon oil) has been studied to build up a mathematical model of breakdown voltage as a function of dielectric thickness. Contact angle measurement of some polymeric materials and self-assembled monolayer using pure water has been carried out to demonstrate the contact angle tunability and reversibility, respectively, upon EWOD actuation.
Vorheriger Artikel Novel interconnection technology for heterogeneous integration of MEMS–LSI multi-chip module
Nächster Artikel Performance optimization and mechanical modeling of uniaxial piezoresistive microaccelerometers

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Metadaten
Titel
Dielectric materials for electrowetting-on-dielectric actuation
verfasst von
Hong Liu
Saman Dharmatilleke
Devendra K. Maurya
Andrew A. O. Tay
Publikationsdatum
01.03.2010
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 3/2010
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-009-0933-z

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