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Erschienen in: Microsystem Technologies 10-11/2014

01.10.2014 | Technical Paper

Rapid and low cost replication of complex microfluidic structures with PDMS double casting technology

verfasst von: Luxia Yang, Xiaojian Hao, Chunshui Wang, Binzhen Zhang, Wanjun Wang

Erschienen in: Microsystem Technologies | Ausgabe 10-11/2014

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Abstract

In this paper, a new method for fast and precise replication of high-aspect-ratio microfluidic structures is reported. First, SU-8 microfluidic structures on the master mold were replicated into Polydimethylsiloxane (PDMS), which served as an intermediate, negative mold, by a conventional soft lithography process. The PDMS negative mold was then treated by wetting its surface with a diluted aqueous solution of a hydrophilic polymer, hydroxypropylmethylcellulose and rinsed with deionized water. Last, the negative mold was used in yet another PDMS molding process to produce a PDMS replica of the microfluidic structures (the hydrofocusing unit for a micro-cytometer) with the same structures as the master mold. Experimental results showed that microstructures with high-aspect-ratio could be consistently replicated with high fidelity. This technique can not only greatly simplify the design and fabrication of master molds, but also protect the expensive and fragile original master mold. The process does not require sophisticated equipment and is well suited for the replication of precision master structures in bulk quantities at low cost.

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Literatur
Zurück zum Zitat Ahn CH, Choi J-W, Beaucage G, Nevin JH, Lee J-B, Puntambekar A et al (2004) Disposable smart lab on a chip for point-of-care clinical diagnostics. Proc IEEE 92:154–173CrossRef Ahn CH, Choi J-W, Beaucage G, Nevin JH, Lee J-B, Puntambekar A et al (2004) Disposable smart lab on a chip for point-of-care clinical diagnostics. Proc IEEE 92:154–173CrossRef
Zurück zum Zitat Amirfazli A, Kwok D, Gaydos J, Neumann A (1998) Line tension measurements through drop size dependence of contact angle. J Colloid Interface Sci 205:1–11CrossRef Amirfazli A, Kwok D, Gaydos J, Neumann A (1998) Line tension measurements through drop size dependence of contact angle. J Colloid Interface Sci 205:1–11CrossRef
Zurück zum Zitat Anderson JR, Chiu DT, Wu H, Schueller OJ, Whitesides GM (2000) Fabrication of microfluidic systems in poly (dimethylsiloxane). Electrophoresis 21:27–40CrossRef Anderson JR, Chiu DT, Wu H, Schueller OJ, Whitesides GM (2000) Fabrication of microfluidic systems in poly (dimethylsiloxane). Electrophoresis 21:27–40CrossRef
Zurück zum Zitat Bashir R (2004) BioMEMS: state-of-the-art in detection, opportunities and prospects. Adv Drug Deliv Rev 56:1565–1586CrossRef Bashir R (2004) BioMEMS: state-of-the-art in detection, opportunities and prospects. Adv Drug Deliv Rev 56:1565–1586CrossRef
Zurück zum Zitat Bhattacharya S, Datta A, Berg JM, Gangopadhyay S (2005) Studies on surface wettability of poly (dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength. Microelectromech Syst J 14:590–597CrossRef Bhattacharya S, Datta A, Berg JM, Gangopadhyay S (2005) Studies on surface wettability of poly (dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength. Microelectromech Syst J 14:590–597CrossRef
Zurück zum Zitat Bodas D, Khan-Malek C (2007) Hydrophilization and hydrophobic recovery of PDMS by oxygen plasma and chemical treatment—An SEM investigation. Sensors Actuators B Chem 123:368–373CrossRef Bodas D, Khan-Malek C (2007) Hydrophilization and hydrophobic recovery of PDMS by oxygen plasma and chemical treatment—An SEM investigation. Sensors Actuators B Chem 123:368–373CrossRef
Zurück zum Zitat Cayre O, Paunov VN, Velev OD (2003) Fabrication of asymmetrically coated colloid particles by microcontact printing techniques. J Mater Chem 13:2445–2450CrossRef Cayre O, Paunov VN, Velev OD (2003) Fabrication of asymmetrically coated colloid particles by microcontact printing techniques. J Mater Chem 13:2445–2450CrossRef
Zurück zum Zitat Chen I-J, Lindner E (2007) The stability of radio-frequency plasma-treated polydimethylsiloxane surfaces. Langmuir 23:3118–3122CrossRef Chen I-J, Lindner E (2007) The stability of radio-frequency plasma-treated polydimethylsiloxane surfaces. Langmuir 23:3118–3122CrossRef
Zurück zum Zitat Efimenko K, Wallace WE, Genzer J (2002) Surface modification of Sylgard-184 poly (dimethyl siloxane) networks by ultraviolet and ultraviolet/ozone treatment. J Colloid Interface Sci 254:306–315CrossRef Efimenko K, Wallace WE, Genzer J (2002) Surface modification of Sylgard-184 poly (dimethyl siloxane) networks by ultraviolet and ultraviolet/ozone treatment. J Colloid Interface Sci 254:306–315CrossRef
Zurück zum Zitat Friese C, Werber A, Krogmann F, Mönch W, Zappe H (2007) Materials, effects and components for tunable micro-optics. IEEJ Trans Electr Electron Eng 2:232–248CrossRef Friese C, Werber A, Krogmann F, Mönch W, Zappe H (2007) Materials, effects and components for tunable micro-optics. IEEJ Trans Electr Electron Eng 2:232–248CrossRef
Zurück zum Zitat Gitlin L, Schulze P, Belder D (2009) Rapid replication of master structures by double casting with PDMS. Lab Chip 9:3000–3002CrossRef Gitlin L, Schulze P, Belder D (2009) Rapid replication of master structures by double casting with PDMS. Lab Chip 9:3000–3002CrossRef
Zurück zum Zitat Hassanin H, Jiang K (2011) Multiple replication of thick PDMS micropatterns using surfactants as release agents. Microelectron Eng 88:3275–3277CrossRef Hassanin H, Jiang K (2011) Multiple replication of thick PDMS micropatterns using surfactants as release agents. Microelectron Eng 88:3275–3277CrossRef
Zurück zum Zitat Hu S, Ren X, Bachman M, Sims CE, Li G, Allbritton N (2002) Surface modification of poly (dimethylsiloxane) microfluidic devices by ultraviolet polymer grafting. Anal Chem 74:4117–4123CrossRef Hu S, Ren X, Bachman M, Sims CE, Li G, Allbritton N (2002) Surface modification of poly (dimethylsiloxane) microfluidic devices by ultraviolet polymer grafting. Anal Chem 74:4117–4123CrossRef
Zurück zum Zitat Jo B-H, Van Lerberghe LM, Motsegood KM, Beebe DJ (2000) Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer. Microelectromech Syst J 9:76–81CrossRef Jo B-H, Van Lerberghe LM, Motsegood KM, Beebe DJ (2000) Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer. Microelectromech Syst J 9:76–81CrossRef
Zurück zum Zitat Kim H, Urban MW (1996) Reaction sites on poly (dimethylsiloxane) elastomer surfaces in microwave plasma reactions with gaseous imidazole: a spectroscopic study. Langmuir 12:1047–1050CrossRef Kim H, Urban MW (1996) Reaction sites on poly (dimethylsiloxane) elastomer surfaces in microwave plasma reactions with gaseous imidazole: a spectroscopic study. Langmuir 12:1047–1050CrossRef
Zurück zum Zitat Kim Y, Suh K, Lee HH (2001) Fabrication of three-dimensional microstructures by soft molding. Appl Phys Lett 79:2285–2287CrossRef Kim Y, Suh K, Lee HH (2001) Fabrication of three-dimensional microstructures by soft molding. Appl Phys Lett 79:2285–2287CrossRef
Zurück zum Zitat Maji D, Lahiri SK, Das S (2012) Study of hydrophilicity and stability of chemically modified PDMS surface using piranha and KOH solution. Surf Interface Anal 44:62–69CrossRef Maji D, Lahiri SK, Das S (2012) Study of hydrophilicity and stability of chemically modified PDMS surface using piranha and KOH solution. Surf Interface Anal 44:62–69CrossRef
Zurück zum Zitat Manz A, Graber N, Widmer H (1990) Miniaturized total chemical analysis systems: a novel concept for chemical sensing. Sensors Actuators B Chem 1:244–248CrossRef Manz A, Graber N, Widmer H (1990) Miniaturized total chemical analysis systems: a novel concept for chemical sensing. Sensors Actuators B Chem 1:244–248CrossRef
Zurück zum Zitat McDonald JC, Whitesides GM (2002) Poly (dimethylsiloxane) as a material for fabricating microfluidic devices. Acc Chem Res 35:491–499CrossRef McDonald JC, Whitesides GM (2002) Poly (dimethylsiloxane) as a material for fabricating microfluidic devices. Acc Chem Res 35:491–499CrossRef
Zurück zum Zitat Möllenbeck S, Bogdanski N, Mayer A, Scheer HC, Zajadacz J, Zimmer K (2010) 172 nm pre-treatment for PDMS/PDMS replication. Microelectron Eng 87:1519–1521CrossRef Möllenbeck S, Bogdanski N, Mayer A, Scheer HC, Zajadacz J, Zimmer K (2010) 172 nm pre-treatment for PDMS/PDMS replication. Microelectron Eng 87:1519–1521CrossRef
Zurück zum Zitat Nguyen N-T (2010) Micro-optofluidic Lenses: a review. Biomicrofluidics 4:031501CrossRef Nguyen N-T (2010) Micro-optofluidic Lenses: a review. Biomicrofluidics 4:031501CrossRef
Zurück zum Zitat Rust M, Subramaniam S, Ahn C (2005) Fabrication of nanochannels with microfluidic interface using PDMS casting on Si/Ti nanomold. In: Technical Proceeding of the 8th NSTI Nanotechnology Conference and Trade Show (Nanotech 2005) (Anaheim, CA, 8–12 May 2005) vol. 2, pp 464–466 Rust M, Subramaniam S, Ahn C (2005) Fabrication of nanochannels with microfluidic interface using PDMS casting on Si/Ti nanomold. In: Technical Proceeding of the 8th NSTI Nanotechnology Conference and Trade Show (Nanotech 2005) (Anaheim, CA, 8–12 May 2005) vol. 2, pp 464–466
Zurück zum Zitat Schnyder B, Lippert T, Kötz R, Wokaun A, Graubner V-M, Nuyken O (2003) UV-irradiation induced modification of PDMS films investigated by XPS and spectroscopic ellipsometry. Surf Sci 532–535:1067–1071CrossRef Schnyder B, Lippert T, Kötz R, Wokaun A, Graubner V-M, Nuyken O (2003) UV-irradiation induced modification of PDMS films investigated by XPS and spectroscopic ellipsometry. Surf Sci 532–535:1067–1071CrossRef
Zurück zum Zitat Shao G, Qiu W, Wang W (2010) Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73). Microsyst Technol 16:1471–1477CrossRef Shao G, Qiu W, Wang W (2010) Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73). Microsyst Technol 16:1471–1477CrossRef
Zurück zum Zitat Shao G, Wu J, Cai Z, Wang W (2012) Fabrication of elastomeric high-aspect-ratio microstructures using polydimethylsiloxane (PDMS) double casting technique. Sens Actuators A 178:230–236CrossRef Shao G, Wu J, Cai Z, Wang W (2012) Fabrication of elastomeric high-aspect-ratio microstructures using polydimethylsiloxane (PDMS) double casting technique. Sens Actuators A 178:230–236CrossRef
Zurück zum Zitat Tavana H, Simon F, Grundke K, Kwok D, Hair M, Neumann A (2005) Interpretation of contact angle measurements on two different fluoropolymers for the determination of solid surface tension. J Colloid Interface Sci 291:497–506CrossRef Tavana H, Simon F, Grundke K, Kwok D, Hair M, Neumann A (2005) Interpretation of contact angle measurements on two different fluoropolymers for the determination of solid surface tension. J Colloid Interface Sci 291:497–506CrossRef
Zurück zum Zitat Vancso GJ, Hillborg H, Schönherr H (2005) Chemical composition of polymer surfaces imaged by atomic force microscopyand complementary approaches. In: Polymer Analysis Polymer Theory, Springer, 2005, pp 55–129 Vancso GJ, Hillborg H, Schönherr H (2005) Chemical composition of polymer surfaces imaged by atomic force microscopyand complementary approaches. In: Polymer Analysis Polymer Theory, Springer, 2005, pp 55–129
Zurück zum Zitat Whitesides GM, Ostuni E, Takayama S, Jiang X, Ingber DE (2001) Soft lithography in biology and biochemistry. Annu Rev Biomed Eng 3:335–373CrossRef Whitesides GM, Ostuni E, Takayama S, Jiang X, Ingber DE (2001) Soft lithography in biology and biochemistry. Annu Rev Biomed Eng 3:335–373CrossRef
Zurück zum Zitat Wong I, Ho C-M (2009) Surface molecular property modifications for poly (dimethylsiloxane)(PDMS) based microfluidic devices. Microfluid Nanofluid 7:291–306CrossRef Wong I, Ho C-M (2009) Surface molecular property modifications for poly (dimethylsiloxane)(PDMS) based microfluidic devices. Microfluid Nanofluid 7:291–306CrossRef
Zurück zum Zitat Wu H, Odom TW, Chiu DT, Whitesides GM (2003) Fabrication of complex three-dimensional microchannel systems in PDMS. J Am Chem Soc 125:554–559CrossRef Wu H, Odom TW, Chiu DT, Whitesides GM (2003) Fabrication of complex three-dimensional microchannel systems in PDMS. J Am Chem Soc 125:554–559CrossRef
Zurück zum Zitat Yang R, Wang W (2004) Out-of-plane polymer refractive microlens fabricated based on direct lithography of SU-8. Sens Actuators A 113:71–77CrossRef Yang R, Wang W (2004) Out-of-plane polymer refractive microlens fabricated based on direct lithography of SU-8. Sens Actuators A 113:71–77CrossRef
Zurück zum Zitat Yang R, Wang W (2005) A numerical and experimental study on gap compensation and wavelength selection in UV-lithography of ultra-high aspect ratio SU-8 microstructures. Sens Actuators B Chem 110:279–288CrossRef Yang R, Wang W (2005) A numerical and experimental study on gap compensation and wavelength selection in UV-lithography of ultra-high aspect ratio SU-8 microstructures. Sens Actuators B Chem 110:279–288CrossRef
Zurück zum Zitat Yang L, Shirahata N, Saini G, Zhang F, Pei L, Asplund MC et al (2009) Effect of surface free energy on PDMS transfer in microcontact printing and its application to TOF-SIMS to probe surface energies. Langmuir 25:5674–5683CrossRef Yang L, Shirahata N, Saini G, Zhang F, Pei L, Asplund MC et al (2009) Effect of surface free energy on PDMS transfer in microcontact printing and its application to TOF-SIMS to probe surface energies. Langmuir 25:5674–5683CrossRef
Metadaten
Titel
Rapid and low cost replication of complex microfluidic structures with PDMS double casting technology
verfasst von
Luxia Yang
Xiaojian Hao
Chunshui Wang
Binzhen Zhang
Wanjun Wang
Publikationsdatum
01.10.2014
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 10-11/2014
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-013-2004-8

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