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Microsystem Technologies
Erschienen in: Microsystem Technologies 6/2015

01.06.2015 | Technical Paper

Analytical study on cantilever resonance type magnet-integrated sensor device for micro-magnetic field detection

verfasst von: Dong F. Wang, Ryutaro Maeda

Erschienen in: Microsystem Technologies | Ausgabe 6/2015

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Abstract

A beam-shaped cantilever resonance type magnetic sensor device has been proposed with a micro magnet. Two structural designs, named as design 1 and design 2, have been comparatively analyzed using ANSYS in order to obtain larger frequency shifts (higher magnetism sensitivity) due to the applied exterior magnetic field. The analytical results show that, in the range of 0–10 mT, the frequency shifts are small, while under 100 mT, a relatively larger frequency shift of about 30 Hz can be theoretically obtained. The power consumption of the proposed devices has been further theoretically studied for preliminary understanding. Using the well-known displacement equations, the estimated power consumption is around 0.21 μW, which is very lower than that of the reported magnetic field sensors. This implies that it is possible to fabricate higher sensitive magnetic field sensor with lower power consumption.
Vorheriger Artikel An orthogonal analysis method for decoupling the nozzle geometrical parameters of microthrusters
Nächster Artikel Design and investigation of a low insertion loss, broadband, enhanced self and hold down power RF-MEMS switch

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Metadaten
Titel
Analytical study on cantilever resonance type magnet-integrated sensor device for micro-magnetic field detection
verfasst von
Dong F. Wang
Ryutaro Maeda
Publikationsdatum
01.06.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 6/2015
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2167-y

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