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Microsystem Technologies
Erschienen in: Microsystem Technologies 9/2017

30.12.2015 | Technical Paper

Cycling reliability of RF-MEMS switches with Gold–Platinum multilayers as contact material

verfasst von: Viviana Mulloni, Benno Margesin, Paola Farinelli, Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis

Erschienen in: Microsystem Technologies | Ausgabe 9/2017

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Abstract

Contact resistance is the main parameter used for assessing the high cycling reliability of RF microelectromechanical (RF-MEMS) switches. In this paper the use of a modified contact material is tested and compared to pure gold in cycling experiments performed on a RF-MEMS switch in shunt capacitive configuration. The modified contact material is a gold-based multilayer with a thin layer of platinum sandwiched between two layers of gold. The experiment consists in comparing devices with the same layout but with different contact material. While the two types of switch start with similar RF performances, the device with the modified material shows a marked improvement in cycling reliability and a lower series resistance up to 106 cycles when compared to gold contact devices.
Vorheriger Artikel A design method of comb-drive actuators for linear tuning characteristics in mechanically tunable optical filters
Nächster Artikel A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application

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Literatur
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Metadaten
Titel
Cycling reliability of RF-MEMS switches with Gold–Platinum multilayers as contact material
verfasst von
Viviana Mulloni
Benno Margesin
Paola Farinelli
Romolo Marcelli
Andrea Lucibello
Giorgio De Angelis
Publikationsdatum
30.12.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 9/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2782-2

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