Skip to main content
Erschienen in: Microsystem Technologies 9/2018

09.03.2018 | Technical Paper

Measurement of temperature and pressure distribution during ultrasonic processes by sensor foils from polyvinylidene fluoride

verfasst von: Julia Kosloh, Johannes Sackmann, Sebastian Krabbe, Werner Karl Schomburg

Erschienen in: Microsystem Technologies | Ausgabe 9/2018

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

Micro and nano structures and systems are generated in polymer surfaces with cycle times of a few seconds by ultrasonic processes such as ultrasonic hot embossing, welding and thermoforming paving the way for a variety of new products. However, measuring temperature and pressure during these processes is very difficult because the polymer is enclosed between an anvil and a sonotrode. Temperature and pressure distribution during ultrasonic processing now have been measured inside of a stack of thermoplastic polymer layers by sensor foils from polyvinylidene fluoride, 55 µm in thickness. The measurements are based on the piezoelectric and pyroelectric effect of polyvinylidene fluoride allowing to achieve resolutions in temperature and pressure of up to ± 1 °C and ± 0.5 kPa, respectively. The achieved resolutions in time and in normal and lateral direction are approximately 1 µs, 60 µm and 1 cm, respectively. The maximum temperature inside a foils stack that could be measured was 73 °C because the sensor foils lost sensitivity when heated up more. Every single oscillation of the polymer was measured as a pressure change. The difference in temperature change and ultrasonic pressure amplitude measured in lateral direction below a sonotrode with outer dimensions of 8 × 12 cm are approximately 12 °C and 4 kPa, 25 and 60%, respectively, indicating the width required for process windows of ultrasonic processing. Moreover, phase shifts are measurable and thus analysis of oscillation characteristics of sonotrodes were investigated.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
Zurück zum Zitat Altmann B, Ahrens R, Welle A, Dinglreiter H, Schneider M, Schober A (2012) Microstructuring of multiwell plates for three-dimensional cell culture applications by ultrasonic embossing. Biomed Microdevices 14:291–301CrossRef Altmann B, Ahrens R, Welle A, Dinglreiter H, Schneider M, Schober A (2012) Microstructuring of multiwell plates for three-dimensional cell culture applications by ultrasonic embossing. Biomed Microdevices 14:291–301CrossRef
Zurück zum Zitat Antoniou A (2009) Section I passive filters general characteristics of filters. In: Chen W-K (ed) Passive, active, and digital filters—the circuits and filters handbook, 3rd edn. CRC Press, Boca Raton Antoniou A (2009) Section I passive filters general characteristics of filters. In: Chen W-K (ed) Passive, active, and digital filters—the circuits and filters handbook, 3rd edn. CRC Press, Boca Raton
Zurück zum Zitat Bae H-J, Lee H-J, Park K (2017) Ultrasonic assisted thermoforming for rapid fabrication of a microspeaker diaphragm. Microsyst Technol 23:1677–1686CrossRef Bae H-J, Lee H-J, Park K (2017) Ultrasonic assisted thermoforming for rapid fabrication of a microspeaker diaphragm. Microsyst Technol 23:1677–1686CrossRef
Zurück zum Zitat Habenicht G, Ritter J (1989) Ultraschallschweißen von thermoplasten. Kunststoffe 79:857–860 Habenicht G, Ritter J (1989) Ultraschallschweißen von thermoplasten. Kunststoffe 79:857–860
Zurück zum Zitat Khuntontong P, Blaser T, Schomburg WK (2008) Ultrasonic micro hot embossing of thermoplastic polymers. In: Proceedings of the 24th annual meeting of the Polymer Processing Society, PPS24, Salerno, 15–19 June 2008, p II.364 Khuntontong P, Blaser T, Schomburg WK (2008) Ultrasonic micro hot embossing of thermoplastic polymers. In: Proceedings of the 24th annual meeting of the Polymer Processing Society, PPS24, Salerno, 15–19 June 2008, p II.364
Zurück zum Zitat Kosloh J, Sackmann J, Šakalys R, Liao S, Gerhardy C, Schomburg WK (2017) Heat generation and distribution in the ultrasonic hot embossing process. Microsyst Technol 23:1411–1421CrossRef Kosloh J, Sackmann J, Šakalys R, Liao S, Gerhardy C, Schomburg WK (2017) Heat generation and distribution in the ultrasonic hot embossing process. Microsyst Technol 23:1411–1421CrossRef
Zurück zum Zitat Lee CH, Jung PG, Lee SM, Park SH, Shin BS, Kim J-H, Hwang K-Y, Kim KM, Ko JS (2010) Replication of polyethylene nano-micro hierarchical structures using ultrasonic forming. J Micromech Microeng 20(3):035018CrossRef Lee CH, Jung PG, Lee SM, Park SH, Shin BS, Kim J-H, Hwang K-Y, Kim KM, Ko JS (2010) Replication of polyethylene nano-micro hierarchical structures using ultrasonic forming. J Micromech Microeng 20(3):035018CrossRef
Zurück zum Zitat Liao S, Gerhardy C, Sackmann J, Schomburg WK (2015) Tools for ultrasonic hot embossing. Microsyst Technol 21:1533–1541CrossRef Liao S, Gerhardy C, Sackmann J, Schomburg WK (2015) Tools for ultrasonic hot embossing. Microsyst Technol 21:1533–1541CrossRef
Zurück zum Zitat Lin C-H, Chen R (2006) Ultrasonic nanoimprint lithography: a new approach to nanopatterning. J Micro/Nanolithogr MEMS MOEMS 5(1):011003CrossRef Lin C-H, Chen R (2006) Ultrasonic nanoimprint lithography: a new approach to nanopatterning. J Micro/Nanolithogr MEMS MOEMS 5(1):011003CrossRef
Zurück zum Zitat Liu S-J, Dung Y-T (2005) Hot embossing precise structure onto plastic plates by ultrasonic vibration. Polym Eng Sci 45:915–925CrossRef Liu S-J, Dung Y-T (2005) Hot embossing precise structure onto plastic plates by ultrasonic vibration. Polym Eng Sci 45:915–925CrossRef
Zurück zum Zitat Mayer A, Dhima K, Möllenbeck S, Wang S, Scheer H-C (2012) A novel tool for frequency assisted thermal nanoimprint (T-NIL). Proc. SPIE 8352, 28th European Mask and Lithography Conference, 83520N (17 April 2012). https://doi.org/10.1117/12.918037 Mayer A, Dhima K, Möllenbeck S, Wang S, Scheer H-C (2012) A novel tool for frequency assisted thermal nanoimprint (T-NIL). Proc. SPIE 8352, 28th European Mask and Lithography Conference, 83520N (17 April 2012). https://​doi.​org/​10.​1117/​12.​918037
Zurück zum Zitat Mekaru H, Yano T (2017) Comparative evaluation of detachable mold fixing methods aimed at low energy loss for ultrasonic nanoimprint lithography. Microsyst Technol 23:2707–2717CrossRef Mekaru H, Yano T (2017) Comparative evaluation of detachable mold fixing methods aimed at low energy loss for ultrasonic nanoimprint lithography. Microsyst Technol 23:2707–2717CrossRef
Zurück zum Zitat Mekaru H, Goto H, Takahashi M (2007) Development of ultrasonic micro hot embossing technology. Microelectron Eng 84:1282–1287CrossRef Mekaru H, Goto H, Takahashi M (2007) Development of ultrasonic micro hot embossing technology. Microelectron Eng 84:1282–1287CrossRef
Zurück zum Zitat Planellas M, Sacristán M, Rey L, Olmo C, Aymamí J, Casas MT, del Valle LJ, Franco L, Puiggalí J (2014) Micro-molding with ultrasonic vibration energy: new method to disperse nanoclays in polymer matrices. Ultrason Sonochem 21(4):1557–1569CrossRef Planellas M, Sacristán M, Rey L, Olmo C, Aymamí J, Casas MT, del Valle LJ, Franco L, Puiggalí J (2014) Micro-molding with ultrasonic vibration energy: new method to disperse nanoclays in polymer matrices. Ultrason Sonochem 21(4):1557–1569CrossRef
Zurück zum Zitat Potente H (2004) Fügen von Kunststoffen—Grundlagen, Verfahren, Anwendung. Carl Hanser, München Potente H (2004) Fügen von Kunststoffen—Grundlagen, Verfahren, Anwendung. Carl Hanser, München
Zurück zum Zitat Qi N, Luo Y, Yan X, Wang X, Wang L (2013) Using silicon molds for ultrasonic embossing on polymethyl methacrylate (PMMA) substrates. Microsyst Technol 19:609–616CrossRef Qi N, Luo Y, Yan X, Wang X, Wang L (2013) Using silicon molds for ultrasonic embossing on polymethyl methacrylate (PMMA) substrates. Microsyst Technol 19:609–616CrossRef
Zurück zum Zitat Sackmann J, Burlage K, Gerhardy C, Memering B, Liao S, Schomburg WK (2015) Review on ultrasonic fabrication of polymer micro devices. Ultrasonics 56:189–200CrossRef Sackmann J, Burlage K, Gerhardy C, Memering B, Liao S, Schomburg WK (2015) Review on ultrasonic fabrication of polymer micro devices. Ultrasonics 56:189–200CrossRef
Zurück zum Zitat Šakalys R, Janušas G, Palevičius A, Čekas E, Jūrėnas V, Sodah A (2016) Microstructures replication using high frequency excitation. Microsyst Technol 22:1831–1843CrossRef Šakalys R, Janušas G, Palevičius A, Čekas E, Jūrėnas V, Sodah A (2016) Microstructures replication using high frequency excitation. Microsyst Technol 22:1831–1843CrossRef
Zurück zum Zitat Schomburg WK (2015) Introduction to microsystem design, 2nd edn. Springer, HeidelbergCrossRef Schomburg WK (2015) Introduction to microsystem design, 2nd edn. Springer, HeidelbergCrossRef
Zurück zum Zitat Seo Y, Park K (2012) Direct patterning of micro-features on a polymer substrate using ultrasonic vibration. Microsyst Technol 18:2053–2061CrossRef Seo Y, Park K (2012) Direct patterning of micro-features on a polymer substrate using ultrasonic vibration. Microsyst Technol 18:2053–2061CrossRef
Zurück zum Zitat Shirinov AV, Schomburg WK (2008) Pressure sensor from a PVDF film. Sens Actuators A 142:48–55CrossRef Shirinov AV, Schomburg WK (2008) Pressure sensor from a PVDF film. Sens Actuators A 142:48–55CrossRef
Zurück zum Zitat Shoh A (1976) Welding of thermoplastics by ultrasound. Ultrasonics 14:209–217CrossRef Shoh A (1976) Welding of thermoplastics by ultrasound. Ultrasonics 14:209–217CrossRef
Zurück zum Zitat Sun Y, Luo Y, Wang X, Zhang M, Feng Y (2011) A new ultrasonic precise bonding method with ultrasound propagation feedback for polymer MEMS. Microelectron Eng 88:3049–3053CrossRef Sun Y, Luo Y, Wang X, Zhang M, Feng Y (2011) A new ultrasonic precise bonding method with ultrasound propagation feedback for polymer MEMS. Microelectron Eng 88:3049–3053CrossRef
Zurück zum Zitat Tseng P, Lin C (2012) Impacts of mold material and pattern size for ultrasonic nanoimprint lithography. Microelectron Eng 98:112–116CrossRef Tseng P, Lin C (2012) Impacts of mold material and pattern size for ultrasonic nanoimprint lithography. Microelectron Eng 98:112–116CrossRef
Zurück zum Zitat Yu HW, Lee CH, Jung PG, Shin BS, Kim J-H, Hwang K-Y, Ko JS (2009) Polymer microreplication using ultrasonic vibration energy. J Micro/Nanolithogr MEMS MOEMS 8(2):021113CrossRef Yu HW, Lee CH, Jung PG, Shin BS, Kim J-H, Hwang K-Y, Ko JS (2009) Polymer microreplication using ultrasonic vibration energy. J Micro/Nanolithogr MEMS MOEMS 8(2):021113CrossRef
Zurück zum Zitat Zhang Z, Wang X, Luo Y, Zhang Z, Wang L (2010) Study on heating process of ultrasonic welding for thermoplastics. J Thermoplast Compos Mater 23:647–664CrossRef Zhang Z, Wang X, Luo Y, Zhang Z, Wang L (2010) Study on heating process of ultrasonic welding for thermoplastics. J Thermoplast Compos Mater 23:647–664CrossRef
Metadaten
Titel
Measurement of temperature and pressure distribution during ultrasonic processes by sensor foils from polyvinylidene fluoride
verfasst von
Julia Kosloh
Johannes Sackmann
Sebastian Krabbe
Werner Karl Schomburg
Publikationsdatum
09.03.2018
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 9/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-3832-3

Weitere Artikel der Ausgabe 9/2018

Microsystem Technologies 9/2018 Zur Ausgabe

Neuer Inhalt