nach oben

Journal of Electroceramics

Erschienen in:

01.05.2010 | Feature Article

Novel deposition techniques for metal oxide: Prospects for gas sensing

verfasst von: K. Sahner, H. L. Tuller

Erschienen in: Journal of Electroceramics | Ausgabe 3/2010

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

With the growing need for high performance gas sensors, a variety of preparation methods have been introduced and investigated. In the present contribution, the focus is on novel means for preparing metal oxide gas sensor devices. First, the key gas sensor concepts are reviewed as well as the conventional deposition techniques widely used for thick and thin film deposition of metal oxides such as screen-printing and chemical and physical vapour deposition. This is followed by a review and examination of innovative deposition techniques developed within the past several years, focusing on methods with direct-write features as well as techniques offering precise control of micro- and nano-structural features of the deposited materials.

Vorheriger Artikel Dielectric and piezoelectric properties of PZT ceramics with anisotropic porosity

Nächster Artikel Size-dependent photovoltaic property in hollow hemisphere array based dye-sensitized solar cells

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Assuming an n-type semiconductor

More precisely, n _bulk needs to be replaced by the effective bulk concentration of ionized donors [D ^•]_eff.

A.M. Azad, S.A. Akbar, S.G. Mhaisalkar, L.D. Birkefeld, K.S. Goto, Solid-state gas sensors: a review J. Electrochem. Soc 139, 3690–3704 (1992). doi:10.1149/1.2069145

F. Rettig, R. Moos, Direct thermoelectric hydrocarbon gas sensors based on SnO₂ IEEE Sens. J 7, 1490–1496 (2007). doi:10.1109/JSEN.2007.906887

F. Rettig, R. Moos, Direct thermoelectric gas sensors: design aspects and first gas sensors Sens. Actuators B Chem 123, 413–419 (2007). doi:10.1016/j.snb.2006.09.002

M. Nishibori, W. Shin, K. Tajima, L.F. Houlet, N. Izu, T. Itoh, S. Tsubota, I. Matsubara, Thermoelectric gas sensor using Au loaded titania CO oxidation catalyst J. Ceram. Soc. Jpn 115, 37–41 (2007). doi:10.2109/jcersj.115.37

M. Law, D.J. Sirbuly, P.D. Yang, Chemical sensing with nanowires using electrical and optical detection Int. J. Nanotechnology 4, 252–262 (2007). doi:10.1504/IJNT.2007.013472 ADS

S. Okazaki, H. Nakagawa, S. Asakura, Y. Tomiuchi, N. Tsuji, H. Murayama, M. Washiya, Sensing characteristics of an optical fiber sensor for hydrogen leak Sens. Actuators B Chem 93, 142–147 (2003). doi:10.1016/S0925-4005(03)00211-9

H.L. Tuller, Review of electrical properties of metal oxides as applied to temperature and chemical sensing Sens. Actuators 4, 679–688 (1984). doi:10.1016/0250-6874(83)85082-3

J. Daniels, K.H. Härdtl, D. Hennings, Defect chemistry and electrical conductivity of doped barium titanate ceramics: I–III Philips Res. Rep 31, 489–525 (1976)

J.W. Fergus, Doping and defect association in oxides for use in oxygen sensors J. Mater. Sci 38, 4259–4270 (2003). doi:10.1023/A:1026318712367

10.

J.W. Fergus, Perovskite oxides for semiconductor-based gas sensors Sens. Actuators B Chem 123, 1169–1179 (2007). doi:10.1016/j.snb.2006.10.051

11.

J. Gerblinger, M. Meixner, Influence of dopants on the response time and the signals of lambda sensors based on thin films of strontium titanate Sens. Actuators B Chem 6, 231–235 (1992). doi:10.1016/0925-4005(92)80061-2

12.

R. Moos, W. Menesklou, H. Schreiner, K.H. Härdtl, Materials for temperature independent resistive oxygen sensors for combustion exhaust gas control Sens. Actuators B Chem 67, 178–183 (2000). doi:10.1016/S0925-4005(00)00421-4

13.

K. Sahner, R. Moos, Modeling of hydrocarbon sensors based on p-type semiconducting perovskites Phys. Chem. Chem. Phys 9, 635–642 (2007). doi:10.1039/b612965j PubMed

14.

G. Heiland, Zum Einfluss von Wasserstoff auf die elektrische Leitfahigkeit an der Oberflache von Zinkoxydkristallen (On the effect of hydrogen on the electrical conductivity at the surface of tin oxide crystals) Z. Phys 148(1), 15–27 (1957). doi:10.1007/BF01327362 MathSciNetADS

15.

T. Seiyama, A. Kato, K. Fujiishi, M. Nagatani, A new detector for gaseous components using semiconductive thin films Anal. Chem 34, 1502 (1962). doi:10.1021/ac60191a001

16.

N. Taguchi, U.S. Patent 3,631,436 (1971)

17.

G. Eranna, B. Joshi, D. Runthala, R. Gupta, Oxide materials for development of integrated gas sensors—a comprehensive review Crit. Rev. Solid State Mater. Sci 29, 111–188 (2004). doi:10.1080/10408430490888977 ADS

18.

G. Korotcenkov, Metal oxides for solid-state gas sensors: what determines our choice Mater. Sci. Eng. B—Solid State Mater. Adv. Technol 139, 1–23 (2007)

19.

D. Williams, in Conduction and gas response of semiconductor gas sensors, ed. by Moseley, P., Tofield, B. Solid State Gas Sensors, The Adam Hilger Series on Sensors (IOP, Bristol, 1987), pp. 71–123

20.

W. Göpel, J. Hesse, J.N. Zemel, Sensors (Wiley-VCH, Weinheim, 1995)

21.

N. Barsan, M. Schweizer-Berberich, W. Göpel, Fundamental and practical aspects in the design of nanoscaled SnO₂ gas sensors: a status report Fresenius J. Anal. Chem 365, 287–304 (1999). doi:10.1007/s002160051490

22.

M. Batzill, Surface science studies of gas sensing materials: SnO₂ Sensors 6, 1345–1376 (2006)

23.

A. Gurlo, Interplay between O₂ and Sn O₂: oxygen ionosorption and spectroscopic evidence for adsorbed oxygen ChemPhysChem 7, 2041–2052 (2006). doi:10.1002/cphc.200600292 PubMed

24.

T. Wolkenstein, Electronic Processes on Semiconductor Surfaces During Chemisorption (Consultants Bureau, New York, 1991)

25.

A. Rothschild, Y. Komem, Numerical computation of chemisorption isotherms for device modeling of semiconductor gas sensors Sens. Actuators B Chem 93, 362–369 (2003). doi:10.1016/S0925-4005(03)00212-0

26.

A. Rothschild, Y. Komem, N. Ashkenasy, Quantitative evaluation of chemisorption processes on semiconductors J. Appl. Phys 92, 7090–7097 (2002). doi:10.1063/1.1519946 ADS

27.

R. Hagenbeck, R. Waser, Influence of temperature and interface charge on the grain boundary conductivity in acceptor-doped SrTiO₃ ceramics J. Appl. Phys 83, 2083–2092 (1998). doi:10.1063/1.366941 ADS

28.

T. Baiatu, R. Waser, K. Härdtl, dc electrical degradation of perovskite-type titanates: III, a model of the mechanism J. Am. Ceram. Soc. 73, 1663–1673 (1990). doi:10.1111/j.1151-2916.1990.tb09811.x

29.

N. Barsan, U. Weimar, Conduction model of metal oxide gas sensors J. Electroceram 7, 143–167 (2001). doi:10.1023/A:1014405811371

30.

N. Barsan, U. Weimar, Understanding the fundamental principles of metal oxide based gas sensors; the example of CO sensing with SnO₂ sensing in the presence of humidity J. Phys. Condens. Matter 15, R813–R839 (2003). doi:10.1088/0953-8984/15/20/201 ADS

31.

C.O. Park, S.A. Akbar, Ceramics for chemical sensing J. Mater. Sci 38, 4611–4637 (2003). doi:10.1023/A:1027402430153

32.

M.E. Franke, T.J. Koplin, U. Simon, Metal and metal oxide nanoparticles in chemiresistors: does the nanoscale matter Small 2, 36–50 (2006). doi:10.1002/smll.200500261 PubMed

33.

G. Korotchenkov, Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches Sens. Actuators B Chem 107, 202–232 (2005). doi:10.1016/j.snb.2004.11.097

34.

N. Yamazoe, G. Sakai, K. Shimanoe, Oxide semiconductor gas sensors Catal. Surv. Asia 7, 63–75 (2003). doi:10.1023/A:1023436725457

35.

S. Ahlers, G. Müller, T. Doll, in Factors influencing the gas sensitivity of metal oxide materials, ed. by C. Grimes, E. Dickey, M. Pishko. Encyclopedia of Sensors, vol. X (American Scientific, Stevenson Ranch, CA, 2006), pp. 1–35

36.

G. Sakai, N. Matsunaga, K. Shimanoe, N. Yamazoe, Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor Sens. Actuators B Chem 80, 125–131 (2001). doi:10.1016/S0925-4005(01)00890-5

37.

C.O. Park, S.A. Akbar, W. Weppner, Ceramic electrolytes and electrochemical sensors J. Mater. Sci 38, 4639–4660 (2003). doi:10.1023/A:1027454414224 ADS

38.

J.W. Fergus, Solid electrolyte based sensors for the measurement of CO and hydrocarbon gases Sens. Actuators B Chem 122, 683–693 (2007). doi:10.1016/j.snb.2006.06.024

39.

M. Holzinger, J. Maier, W. Sitte, Fast CO₂-selective potentiometric sensor with open reference electrode Solid State Ion 86–88, 1055–1062 (1996). doi:10.1016/0167-2738(96)00250-0

40.

T. Kida, Y. Miyachi, K. Shimanoe, N. Yamazoe, NASICON thick film-based CO2 sensor prepared by a sol–gel method Sens. Actuators B Chem 80, 28–32 (2001). doi:10.1016/S0925-4005(01)00878-4

41.

C.M. Mari, G. Terzaghi, M. Bertolini, G.B. Barbi, A chlorine gas potentiometric sensor Sens. Actuators B Chem 8, 41–45 (1992). doi:10.1016/0925-4005(92)85006-I

42.

D. Lutic, M. Strand, A. Lloyd-Spetz, K. Buchholt, E. Eliana Ieva, P. Käll, M. Sanati, Catalytic properties of oxide nanoparticles applied in gas sensors Top. Catal 45, 105–109 (2007). doi:10.1007/s11244-007-0248-1

43.

A. Sammn, S. Gebremariam, L. Rimai, X. Zhang, J. Hangas, G.W . Auner, J. Appl. Phys 87, 3101 (2000). doi:10.1063/1.372305 ADS

44.

A. Lloyd Spetz, L. Uneus, H. Svenningstorp, P. Tobias, L.G. Ekedahl, O. Larsson, A. Göras, S. Savage, C. Harris, P. Martensson, R. Wigren, P. Salomonsson, B. Häggendahl, P. Ljung, M. Mattsson, I. Lundström, SiC based field effect gas sensors for industrial applications Phys. Stat. Sol. (A) 185, 15–25 (2001)ADS

45.

C.K. Kim, J.H. Lee, Y.H. Lee, N.I. Cho, D.J. Kim, W.P. Kang, Hydrogen sensing characteristics of Pd-SiC Schottky diode operating at high temperature J. Electron. Mater 28, 202–205 (1999). doi:10.1007/s11664-999-0014-1 ADS

46.

A. Vasiliev, W. Moritz, V. Fillipov, L. Bartholomäus, A. Terentjev, T. Gabusjan, Sens. Actuators B Chem 49, 133 (1998). doi:10.1016/S0925-4005(98)00041-0

47.

L.-G. Ekedahl, M. Eriksson, I. Lundström, Acc. Chem. Res 31, 249 (1998). doi:10.1021/ar970068s

48.

V. Mecea, Is quartz crystal microbalance really a mass sensor Sens. Actuators A Phys 128, 270–277 (2006). doi:10.1016/j.sna.2006.01.023

49.

I. Simon, N. Barsan, M. Bauer, U. Weimar, Micromachined metal oxide gas sensors: opportunities to improve sensor performance Sens. Actuators B Chem 73, 1–26 (2001). doi:10.1016/S0925-4005(00)00639-0

50.

M. Graf, A. Gurlo, N. Barsan, U. Weimar, A. Hierlemann, Microfabricated gas sensor systems with sensitive nanocrystalline metal-oxide films J. Nanopart. Res 8, 823–839 (2006). doi:10.1007/s11051-005-9036-7

51.

K.D. Benkstein, C.J. Martinez, G. Li, D.C. Meier, C.B. Montgomery, S. Semancik, Integration of nanostructured materials with MEMS microhotplate platforms to enhance chemical sensor performance J. Nanopart. Res 8, 809–822 (2006). doi:10.1007/s11051-005-9019-8

52.

A. Kumar, G.M. Whitesides, Features of gold having micrometer to centimetre dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ink followed by chemical etching Appl. Phys. Lett 63, 2002–2004 (1993). doi:10.1063/1.110628 ADS

53.

M. Heule, Shaping ceramics in small scale—from microcomponents to gas sensors, Ph.D. thesis, ETH Zürich (2003)

54.

M. Heule, U.P. Schonholzer, L.J. Gauckler, Patterning colloidal suspensions by selective wetting of microcontact-printed surfaces J. Am. Ceram. Soc 24, 2733–2739 (2004). doi:10.1016/j.jeurceramsoc.2003.09.011

55.

H.J. Lim, D.Y. Lee, Y.J. Oh, Gas sensing properties of ZnO thin films prepared by microcontact printing Sens. Actuators A Phys 125, 405–410 (2006). doi:10.1016/j.sna.2005.08.031

56.

M. Heule, L.J. Gauckler, Miniaturised arrays of tin oxide gas sensors on single microhotplate substrates fabricated by micromolding in capillaries Sens. Actuators B Chem 93, 100–106 (2003). doi:10.1016/S0925-4005(03)00243-0

57.

S.J. Ahn, J. Moon, Vacuum-assisted microfluidic lithography of ceramic microstructures J. Am. Ceram. Soc 88, 1171–1174 (2005). doi:10.1111/j.1551-2916.2005.00329.x

58.

D.B. Chrisey, Materials Processing: The power of direct writing Science 289, 879–881 (2000). doi:10.1126/science.289.5481.879 PubMed

59.

R. Rella, J. Spadavecchia, M.G. Manera, S. Capone, A. Taurino, M. Martino, A.P. Caricato, T. Tunno, Acetone and ethanol solid-state gas sensors based on TiO₂ nanoparticles thin film deposited by matrix assisted pulsed laser evaporation Sens. Actuators B Chem 127, 426–431 (2007). doi:10.1016/j.snb.2007.04.048

60.

C.B. Arnold, P. Serra, A. Piqué, Laser direct-write techniques for printing of complex materials MRS Bull 32, 23–31 (2007)

61.

R. Fryček, M. Jel, nek, T. Kocourek, P. Ftil, M. Vrňata, V. Myslík, M. Vrbová, Thin organic Layers prepared by MAPLE for gas sensor application Thin Solid Films 495, 308–311 (2006). doi:10.1016/j.tsf.2005.08.178 ADS

62.

J. Evans, M. Edirisinghe, P.V. Coveney, J. Eames, Combinatorial searches of inorganic materials using the ink jet printer: science, philosophy and technology J. Eur. Ceram. Soc 21, 2291–2299 (2001). doi:10.1016/S0955-2219(01)00289-8

63.

J. Evans, Direct ink jet printing of ceramics: experiment in teleology Br. Ceram. Trans. 100 (2001). doi:10.1179/096797801681332

64.

M. Bale, J.C. Carter, C.J. Creighton, H.J. Gregory, P.H. Lyon, P. Ng, L. Webb, A. Wehrum, Ink-jet printing: The route to production of full-color P-OLED displays J. Soc. Inf. Disp 14, 453–459 (2006). doi:10.1889/1.2206109

65.

D. Kim, S. Jeong, S. Lee, B.K. Parka, J. Moon, Organic thin film transistor using silver electrodes by the ink-jet printing technology Thin Solid Films 515, 7692–7696 (2007). doi:10.1016/j.tsf.2006.11.141 ADS

66.

M.M. Mohebi, J.R.G. Evans, Combinatorial ink-jet printer for ceramics: Calibration J. Am. Ceram. Soc. 86, 1654–1661 (2003)

67.

J. Wang, M. Mohebi, J. Evans, Two methods to generate multiple compositions in combinatorial ink-jet printing of ceramics Macromol. Rapid Commun 26, 304–309 (2005). doi:10.1002/marc.200400460

68.

J. Wang, J.R. Evans, Library preparation using an aspirating-dispensing ink-jet printer for combinatorial studies in ceramics J. Mater. Res 20, 2733–2740 (2005). doi:10.1557/JMR.2005.0348 ADS

69.

S. Okamura, R. Takeuchi, T. Shiosaki, Fabrication of ferroelectric Pb(ZrTi)O3 thin films with various Zr/Ti ratios by ink-jet printing Jpn. J. Appl. Phys 41, 6714–6717 (2002). doi:10.1143/JJAP.41.6714 ADS

70.

J. Rossiny, S. Fearn, J. Kilner, Y. Zhang, L. Chen, Combinatorial searching for novel mixed conductors Solid State Ion 177, 1789–1794 (2006). doi:10.1016/j.ssi.2006.02.050

71.

W. Shen, Y. Zhao, C. Zhang, The preparation of ZnO based gas-sensing thin films by ink-jet printing method Thin Solid Films 483, 382–387 (2005). doi:10.1016/j.tsf.2005.01.015 ADS

72.

D.H. Lee, Y.J. Chang, W. Stickle, C.H. Chang, Functional Porous Tin Oxide Thin Films Fabricated by Inkjet Printing Process Electrochem. Solid State Lett 10, K51–K54 (2007). doi:10.1149/1.2773531

73.

H. Seh, T. Hyodo, H.L. Tuller, Bulk acoustic wave resonator as a sensing platform for NOx at high temperatures Sens. Actuators B Chem 108, 547–552 (2005). doi:10.1016/j.snb.2004.11.083

74.

T. Hyodo, K. Sasahara, Y. Shimizu, M. Egashira, Preparation of macroporous SnO₂ films using PMMA microspheres and their sensing properties to NO_x and H₂ Sens. Actuators B Chem 106, 580–590 (2005). doi:10.1016/j.snb.2004.07.024

75.

J.E. Smay, J. Cersarano III, J.A. Lewis, Colloidal Inks for directed assembly of 3-D periodic structures Langmuir 18, 5429–5437 (2002). doi:10.1021/la0257135

76.

J.A. Lewis, Colloidal processing of ceramics J. Am. Ceram. Soc 83, 2341–1359 (2000)

77.

M. Heule, S.G.L.J. Vuillemin, Powder-based ceramic meso- and microscale fabrication processes Adv. Mater 15, 1237–1245 (2003). doi:10.1002/adma.200300375

78.

B.Y. Tay, J.R.G. Evans, M.J. Edirisinghe, Solid free form fabrication of ceramics Int. Mater. Rev 48, 341 (2003). doi:10.1179/095066003225010263

79.

Q. Li, J.A. Lewis, Nanoparticle inks for directed assembly of three-dimensional periodic structures Adv. Mater 15, 1639–1643 (2003). doi:10.1002/adma.200305413

80.

G.M. Gratson, J.A. Lewis, Phase behavior and rheological properties of polyelectrolyte inks for direct-write assembly Langmuir 21, 457–464 (2005). doi:10.1021/la048228d PubMed

81.

J.E. Smay, J. Cesarano III, B.A. Tuttle, J.A. Lewis, Directed Colloidal Assembly of Linear and Annular Lead Zirconate Titanate Arrays J. Am. Ceram. Soc 87, 293–295 (2004). doi:10.1111/j.1551-2916.2004.00293.x

82.

G.M. Gratson, F. García-Santramaría, V. Lousse, M. Xu, S. Fan, J.A. Lewis, P.V. Braun, Direct-write assembly of three-dimensional photonic ctystals: conversion of polymer scaffolds to silicon hollow-woodpile structures Adv. Mater 18, 461–465 (2006). doi:10.1002/adma.200501447

83.

E.B. Duoss, M. Twardowski, J.A. Lewis, Sol–Gel Inks for Direct-Write Assembly of Functional Oxides Adv. Mater 19, 3485–3489 (2007)

84.

R. Strobel, S. Pratsinis, Flame aerosol synthesis of smart nanostructured materials J. Mater. Chem 17, 4743–4756 (2007). doi:10.1039/b711652g

85.

Y. Liu, E. Koep, M.L. Liu, Highly sensitive and fast-responding SnO₂ sensor fabricated by combustion chemical vapor deposition Chem. Mater 17, 3997–4000 (2005). doi:10.1021/cm050451o

86.

L. Madler, T. Sahm, A. Gurlo, N. Barsan, J.D. Grunwald, U. Weimar, S.E. Pratsinis, Sensing low concentrations of CO using flame-spray-made Pt/SnO₂ nanoparticles J. Nanopart. Res 8, 783–796 (2006). doi:10.1007/s11051-005-9029-6

87.

T. Sahm, W. Rong, N. Barsan, L. Mädler, U. Weimar, Sensing of CH₄, CO and ethanol with in situ nanoparticle aerosol-fabricated multilayer sensors Sens. Actuators B Chem. 127, 63–68 (2007). doi:10.1016/j.snb.2007.07.001

88.

R. Strobel, F. Krumeich, W. Stark, S. Pratsinis, A. Baiker, Flame spray synthesis of Pd/Al₂O₃ catalysts and their behavior in enantioselective hydrogenation J. Catal. 222, 307–314 (2004)

89.

T. Sahm, L. Mädler, A. Gurlo, N. Barsan, S. Pratsinis, U. Weimar, Flame spray synthesis of tin dioxide nanoparticles for gas sensing Sens. Actuators B Chem 98, 148–153 (2004). doi:10.1016/j.snb.2003.10.003

90.

H. Herman, Thermal spray: Current status and future trends MRS Bull 25, 17–25 (2000)

91.

S. Sampath, Thermal-spray processing of materials MRS Bull 25, 12–14 (2000)

92.

K. Ahn, B.W. Wessels, S. Sampath, Spinel humidity sensors prepared by thermal spray direct writing Sens. Actuators B Chem 107, 342–346 (2005). doi:10.1016/j.snb.2004.10.020

93.

M. Tiemann, Porous metal oxides as gas sensors Chem. Eur. J 13, 8376–8388 (2007). doi:10.1002/chem.200700927 ADS

94.

G. Li, S. Kawi, High-surface-area SnO₂: a novel semiconductor-oxide gas sensor Mater. Lett 34, 98–102 (1998)

95.

Y. Shimizu, A. Ayami Jono, T. Takeo Hyodo, M. Egashira, Preparation of large mesoporous SnO ₂ powder for gas sensor application Sensors Actuators B 108, 56–61 (2005). doi:10.1016/j.snb.2004.10.047

96.

A. Prim, E. Pellicer, E. Rossinyol, F. Peirp, A. Cornet, J.R. Morante, A novel mesoporous CaO-loaded In₂O₃ material for CO₂ sensing Adv. Funct. Mater 17, 2957–2963 (2007). doi:10.1002/adfm.200601072

97.

E. Rossinyol, A. Prim, E. Pellicer, J. Rodriguez, F. Peiro, A. Cornet, J.R. Morante, B.Z. Tian, T. Bo, D.Y. Zhao, Mesostructured pure and copper-catalyzed tungsten oxide for NO₂ detection Sens. Actuators B, Chemical 126, 18–23 (2007)

98.

E. Rossinyol, A. Prim, E. Pellicer, J. Arbiol, F. Hernandez–Ramirez, F. Peiro, A. Cornet, J.R. Morante, L.A. Solovyov, B.Z. Tian, T. Bo, D.Y. Zhao, Synthesis and characterization of chromium-doped mesoporous tungsten oxide for gas-sensing applications Adv. Funct. Mater. 17, 1801–1806 (2007). doi:10.1002/adfm.200600722

99.

F. Li, L. Zhang, R.M. Metzger, On the Growth of Highly Ordered Pores in Anodized Aluminum Oxide Chem. Mater 10, 2470–2480 (1998). doi:10.1021/cm980163a

100.

A. Kolmakov, M. Moskovits, Chemical sensing and catalysis by one-dimensional metal-oxide nanostructures Annu. Rev. Mater. Res. 34, 151–180 (2004). doi:10.1146/annurev.matsci.34.040203.112141 ADS

101.

J. Wang, S. Xie, W. Zhou, Growth of binary oxide nanowires MRS Bull 32, 123–126 (2007)

102.

C.M. Lieber, Z.L. Wang, Functional nanowires MRS Bull 32, 99–108 (2007)

103.

M. Law, J. Goldberger, P.D. Yang, Semiconductor nanowires and nanotubes Annu. Rev. Mater. Res 34, 83–122 (2004). doi:10.1146/annurev.matsci.34.040203.112300 ADS

104.

E. Comini, Metal oxide nano-crystals for gas sensing Anal. Chim. Acta 568, 28–40 (2006). doi:10.1016/j.aca.2005.10.069 PubMed

105.

F. Patolsky, B.P. Timko, G. Zheng, C.M. Lieber, Nanowire-based nanoelectronic devices in the life sciences MRS Bull 32, 142–149 (2007)

106.

M. Law, H. Kind, B. Messer, F. Kim, P. Yang, Photochemical sensing of NO₂ with SnO₂ nanoribbon nanosensors at room temperature Angew. Chem. Int. Ed 41, 2405–2408 (2002)doi:10.1002/1521-3773(20020703)41:13<2405::AID-ANIE2405>3.0.CO;2-3

107.

P.I. Gouma, Nanostructured polymorphic oxides for advanced chemosensors Rev. Adv. Mater. Sci 5, 147–154 (2003)

108.

F. Hernandez-Ramirez, A. Tarancon, O. Casals, J. Rodriguez, A. Romano-Rodriguez, J.R. Morante, S. Barth, S. Mathur, T.Y. Choi, D. Poulikakos, V. Callegari, P.M. Nellen, Fabrication and electrical characterization of circuits based on individual tin oxide nanowires Nanotechnology 17, 5577–5583 (2006). doi:10.1088/0957-4484/17/22/009

109.

W. Lu, C.M. Lieber, Semiconductor nanowires J. Phys. D Appl. Phys 39, R387–R406 (2006). doi:10.1088/0022-3727/39/21/R01 ADS

110.

R.S. Wagner, W.C. Ellis, Vapor–liquid–solid mechanism of single crystal growth Appl. Phys. Lett 4, 89–90 (1964). doi:10.1063/1.1753975 ADS

111.

J. Westwater, D.P. Gosain, S. Tomiya, S. Usui, H. Ruda, Growth of silicon nanowires via gold/silane vapor–liquid–solid reaction J. Vac. Sci. Technol. B 15, 554–557 (1997). doi:10.1116/1.589291

112.

Y. Wu, P. Yang, Direct observation of vapor–liquid–solid nanowire growth J. Am. Chem. Soc. 123, 3165–3166 (2001). doi:10.1021/ja0059084

113.

M.S. Gudiksen, C.M. Lieber, Diameter-selective synthesis of semiconductor nanowires J. Am. Chem. Soc. 122, 8801–8802 (2000). doi:10.1021/ja002008e

114.

Z.W. Pan, Z.R. Dai, Z.L. Wang, Nanobelts of semiconducting oxides Science 291, 1947–1949 (2001). doi:10.1126/science.1058120 PubMedADS

115.

R.-Q. Zhang, Y. Lifshitz, S.-T. Lee, Oxide-assisted growth of semiconducting nanowires Adv. Mater. 15, 635–640 (2003). doi:10.1002/adma.200301641

116.

Z.R. Dai, Z.W. Pan, Z.L. Wang, Novel nanostructures of functional oxides synthesized by thermal evaporation Adv. Funct. Mater 13, 9–24 (2003). doi:10.1002/adfm.200390013

117.

E. Comini, G. Faglia, G. Sberveglieri, Z.W. Pan, Z.L. Wang, Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts Appl. Phys. Lett 81, 1869–1871 (2002). doi:10.1063/1.1504867 ADS

118.

E. Comini, G. Faglia, G. Sberveglieri, D. Calestani, L. Zanotti, M. Zha, Tin oxide nanobelts electrical and sensing properties Sens. Actuators B Chem. 111–112, 2–6 (2005). doi:10.1016/j.snb.2005.06.031

119.

A. Maiti, J.A. Rodriguez, M. Law, P. Kung, U.R. McKinney, P. Yang, SnO₂ nanoribbons as NO₂ sensors: Insights from first principles calculations Nano Lett. 3, 1025–1028 (2003). doi:10.1021/nl034235v ADS

120.

C. Yu, Q. Qing Hao, S. Saha, L. Shi, X. Kong, Z. Wang, Integration of metal oxide nanobelts with microsystems for nerve agent detection Appl. Phys. Lett 86, 063101 (2005). doi:10.1063/1.1861133 ADS

121.

D. Meier, S. Semancik, B. Button, E. Strelcov, A. Kolmakov, Coupling nanowire chemiresistors with MEMS microhotplate gas sensing platforms Appl. Phys. Lett 91, 063118 (2007). doi:10.1063/1.2768861 ADS

122.

D. Zhang, Z. Liu, C. Li, T. Tang, X. Liu, S. Han, B. Lei, C. Zhou, Detection of NO₂ down to ppb levels using individual and multiple In₂O₃ nanowire devices Nano Lett 4, 1919–1924 (2004). doi:10.1021/nl0489283 ADS

123.

V.V. Sysoev, B.K. Button, K. Wepsiec, S. Dmitriev, A. Kolmakov, Toward the nanoscopic “electronic nose”: Hydrogen vs carbon monoxide discrimination with an array of individual metal oxide nano- and mesowire sensors Nano Lett 6, 1584–1588 (2006). doi:10.1021/nl060185t PubMedADS

124.

S. Yoo, S.A. Akbar, K.H. Sandhage, Nanocarving of titania (TiO₂): a novel approach for fabricating chemical sensing platform Ceram. Int 30, 1121–1126 (2004). doi:10.1016/j.ceramint.2003.12.085

125.

C. Carney, S. Yoo, S.A. Akbar, TiO₂–SnO₂ nanostructures and their H₂ sensing behavior Sens. Actuators B Chem 108, 29–33 (2006)

126.

A.M. Azad, S.A. Akbar, Novel Structural Modulation in Ceramic Sensors Via Redox Processing in Gas Buffers Int. J. Appl. Ceram. Technol 3, 177–192 (2006). doi:10.1111/j.1744-7402.2006.02076.x

127.

H. Miyazaki, T. Hyodo, Y. Shimizu, M. Egashira, Hydrogen-sensing properties of anodically oxidized TiO₂ film sensors—Effects of preparation and pretreatment conditions Sens. Actuators B Chem 108, 467–472 (2005). doi:10.1016/j.snb.2004.10.056

128.

H.E. Prakasam, K. Shankar, M. Paulose, O.K. Varghese, C.A. Grimes, New Benchmark for TiO2 Nanotube Array Growth by Anodization J. Phys. Chem. C 111, 7235–7241 (2007). doi:10.1021/jp070273h

129.

G.K. Mor, O.K. Varghese, M. Paulose, K.G. Ong, C.A. Grimes, Fabrication of hydrogen sensors with transparent titanium oxide nanotube array thin films as sensing elements Thin Solid Films 496, 42–48 (2006). doi:10.1016/j.tsf.2005.08.190 ADS

130.

O.K. Varghese, D. Gong, M. Paulose, K.G. Ong, C.A. Grimes, Hydrogen sensing using titania nanotubes Sens. Actuators B Chem 93, 338–344 (2003). doi:10.1016/S0925-4005(03)00222-3

131.

A. Jaworek, Electrospray droplet sources for thin film deposition J. Mater. Sci 42, 266–297 (2007). doi:10.1007/s10853-006-0842-9 ADS

132.

Y. Matsushima, Y. Nemoto, T. Yamazaki, K. Maeda, T. Suzuki, Fabrication of SnO₂ particle-layer on the glass substrate using electrospray pyrolysis method and the gas sensitivity for H₂ Sens. Actuators B Chem 96, 133–138 (2003). doi:10.1016/S0925-4005(03)00514-8 ADS

133.

C. Ghimbeu, R. van Landschoot, J. Schoonman, M. Lumbreras, Tungsten trioxide thin films prepared by electrostatic spray deposition technique Thin Solid Films 515, 5498–5504 (2007). doi:10.1016/j.tsf.2007.01.014 ADS

134.

D.H. Reneker, I. Chun, Nanometre diameter fibres of polymer, produced by electrospinning Nanotechnology 7, 216–223 (1996). doi:10.1088/0957-4484/7/3/009 ADS

135.

I. Kim, A. Rothschild, B.H. Lee, D.Y. Lim, S.M. Jo, H.L. Tuller, Ultrasensitive chemiresistors based on electrospun TiO₂ nanofibres Nano Lett 6, 2009–2013 (2006). doi:10.1021/nl061197h PubMedADS

136.

Y. Dzenis, Spinning continuous fibers for nanotechnology Science 304, 1917–1919 (2004). doi:10.1126/science.1099074 PubMed

137.

C. Drew, X. Liu, D. Ziegler, X. Wang, F.F. Bruno, J. Whitten, L.A. Samuelson, J. Kumar, Metal oxide-coated polymer nanofibers Nano Lett. 3, 143–147 (2003). doi:10.1021/nl025850m ADS

138.

D. Li, Y. Xia, Fabrication of titania nanofibers by electrospinning Nano Lett 3, 555–560 (2003). doi:10.1021/nl034039o ADS

139.

Z. Liu, D.D. Sun, P. Guo, J. Leckie, An Efficient Bicomponent TiO₂/SnO₂ Nanofiber Photocatalyst Fabricated by Electrospinning with a Side-by-Side Dual Spinneret Method Nano Lett 7, 1081–1085 (2007). doi:10.1021/nl061898e PubMedADS

140.

M.C. Carotta, S. Gherardi, V. Guidi, C. Malagu, G. Martinelli, B. Vendemiati, M. Sacerdoti, G. Ghiotti, S. Morandi, A. Bismuto, P. Maddalena, A. Setaro, (Ti, Sn)O₂ binary solid solutions for gas sensing: Spectroscopic, optical and transport properties Sens. Actuators B Chem. 130, 38–45 (2008). doi:10.1016/j.snb.2007.07.112

141.

K. Sahner, P. Gouma, R. Moos, Electrodeposited and sol–gel precipitated p-type SrTi_1−xFe_xO_3−δ semiconductors for gas sensing. Sensors 7, 1871–1886 (2007)

Titel: Novel deposition techniques for metal oxide: Prospects for gas sensing
verfasst von: K. Sahner
H. L. Tuller
Publikationsdatum: 01.05.2010
Verlag: Springer US
Erschienen in: Journal of Electroceramics / Ausgabe 3/2010
Print ISSN: 1385-3449
Elektronische ISSN: 1573-8663
DOI: https://doi.org/10.1007/s10832-008-9554-7

Neuer Inhalt

Bildnachweise

VDI-Icon, Profil Icon, inhalt2, Springer Professional Modul/© Springer Fachmedien Wiesbaden GmbH, Die Gewinner und Laudatoren des Sustainability Award in Automotive 2024/© Uli Regenscheit | ATZlive, Search Icon, Banner Hanser, Sebastian Glenschek/© Hermes International, Dinko Eror/© Red Hat GmbH, Suresh Vittal/© Alteryx, Zeitschrift Wissensmanagement Cover, PatentFit-Logo/© Springer Fachmedien Wiesbaden GmbH, ATZ-Webinar: Prototypenfreie Entwicklung durch Offline- und Driver-in-the-Loop-HiL-Tests /© (c) VI-grade, chassis.tech plus 2023/© [M] ATZlive / TÜV SÜD PRODUCT SERVICE GMBH, adäsion-Webinar-Matinee/© krystiannawrocki_ Getty Images

Springer Professional

Abstract

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Weitere Artikel der Ausgabe 3/2010

Influence of the processing rates and sintering temperatures on the dielectric properties of CaCu3Ti4O12 ceramics

Grain growth kinetics of textured 0.92Na0.5Bi0.5TiO3—0.08BaTiO3 ceramics by tape casting with Bi2.5Na3.5Nb5O18 templates

Development of 2-2 piezoelectric ceramic/polymer composites by direct-write technique

State of stress in piezoelectric elements with interdigitated electrodes

Dielectric and piezoelectric properties of PZT ceramics with anisotropic porosity

Substrate effect on the electrical properties of sputtered YSZ thin films for co-planar SOFC applications

Neuer Inhalt

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.