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Erschienen in: Journal of Materials Engineering and Performance 17/2023

28.11.2022 | Technical Article

Mechanical and Tribological Properties of NbTiAlx, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz Coatings with Various Aluminum Target Currents and Nitrogen and Acetylene Flow Rates

verfasst von: Y. L. Su, W. H. Kao, B. Y. Chen

Erschienen in: Journal of Materials Engineering and Performance | Ausgabe 17/2023

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Abstract

NbTiAlX, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz coatings were deposited on SKH51 substrates using a radio frequency unbalanced magnetron sputtering system. The NbTiAl0.5Ny coatings prepared with higher nitrogen fluxes (14 sccm) exhibited a denser cross-sectional structure, a higher hardness, a better adhesion, and a lower wear rate than the NbTiAlx coatings. The friction coefficients of the NbTiAl0.5N14-CHz coatings were lower than those of the NbTiAl0.5Ny coatings. Furthermore, the NbTiAl0.5N14-CH12 coating (acetylene flux 12 sccm) had a DLC structure with enhanced adhesion properties and formed a carbon-rich transfer layer on the counterbody surface during sliding. The NbTiAl0.5N14-CH12 coating thus exhibited the best tribological properties among all the coatings.

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Metadaten
Titel
Mechanical and Tribological Properties of NbTiAlx, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz Coatings with Various Aluminum Target Currents and Nitrogen and Acetylene Flow Rates
verfasst von
Y. L. Su
W. H. Kao
B. Y. Chen
Publikationsdatum
28.11.2022
Verlag
Springer US
Erschienen in
Journal of Materials Engineering and Performance / Ausgabe 17/2023
Print ISSN: 1059-9495
Elektronische ISSN: 1544-1024
DOI
https://doi.org/10.1007/s11665-022-07681-9

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