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2020 | OriginalPaper | Buchkapitel

9. Mechanical Properties of Microposit S1813 Thin Layers

verfasst von : Andrey L. Nikolaev, Boris I. Mitrin, Evgeniy V. Sadyrin, Vladimir B. Zelentsov, Adair R. Aguiar, Sergei M. Aizikovich

Erschienen in: Modeling, Synthesis and Fracture of Advanced Materials for Industrial and Medical Applications

Verlag: Springer International Publishing

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Abstract

Microposit S1813 is very popular photoresist due to high resolution, simplicity of deposition methods, and high adhesion to semiconductors. The least controlled parameter of photoresist thin films deposition is the tanning process, where everything depends on the operator and therefore it is quite difficult to ensure perfect reproducibility of the process. In this work, we studied thin films of Microposit S1813, deposited by spin coating on silicon substrates, and then tanned in 30, 45, 60, 75, and 90 s at 110 \(^\circ \)C. The thickness of the films was studied using optical microscopy. The waviness and surface roughness were investigated by atomic force microscopy. To evaluate the mechanical properties of Microposit S1813 thin films, the nanoindentation method in the quasistatic mode was used. The results obtained will help to determine the region of the indenter-sample contact area as well as the measurement error, which is necessary for modern analytical mathematical models used to study the mechanical characteristics of multilayer coatings.

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Seidemann, V., Butefisch, S., Buttegenbach, S.: Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers. Sens. Actuators 97, 457–461 (2002)CrossRef

Odegard, G.M., Gates, T.S., Herring, H.M.: Characterization of viscoelastic properties of polymeric materials through nanoindentation. Exp. Mech. 45, 130–136 (2005)CrossRef

Beake, B.D., Leggett, G.J.: Nanoindentation and nanoscratch testing of uniaxially and biaxially drawn poly(ethylene terephthalate) film. Exp. Mech. 43, 319–327 (2002)

Golovin, Y.I.: Nanoindentation and mechanical properties of solids in submicrovolumes, thin near-surface layers, and films. A review. Phys. Solid State. 50(12), 2205–2236 (2008)CrossRef

Pharr, G.M., Oliver, W.C.: Measurement of thin film mechanical properties using nanoindentation. MRS Bull. 17(7), 28–33 (1992)CrossRef

Tsui, T.Y., Pharr, G.M., Oliver, W.C., Chung, Y.W., Cutiongco, E.C., Bhatia, C.S., White, R.L., Rhodes, R.L., Gorbatkin, S.M.: Nanoindentation and nanoscratching of hard coating materials for magnetic disks. MRS Online Proc. Libr. Arch. 356 (1994)

Mencik, J., Quandt, E., Munz, D.: Elastic modulus of TbDyFe films–a comparison of nanoindentation and bending measurements. Thin Solid Films 287(1–2), 208–213 (1996)CrossRef

Suresh, S., Nieh, T.G., Choi, B.W.: Influence of phosphoric acid pretreatment on self-etching bond strengths. Scr. Mater. 41(9), 951–957 (1999)CrossRef

Lai, H.D., Jian, S.R., Tuyen, L., Le, P., Luo, C.W., Juang, J.Y.: Nanoindentation of Bi2Se3 thin films. Micromachines 9(10), 518 (2018)CrossRef

10.

Xing, X., Wang, H., Xiao, G., Yang, S., Shu, X.: Impact of pH and application time of meta-phosphoric acid on resin-enamel and resin-dentin bonding. J. Mech. Behav. Biomed. Mater. 80, 235–245 (2018)CrossRef

11.

Vasiliev, A.S., Sadyrin, E.V., Mitrin, B.I., Aizikovich, S.M., Nikolaev, A.L.: Nanoindentation of ZrN coatings on silicon and copper substrates. Russ. Eng. Res. 38(9), 735–737 (2018)CrossRef

12.

Horling, A., Hultman, L., Oden, M., Sjolen, J., Karlsson, L.: Mechanical properties and machining performance of Ti1 - xAlxN - coated cutting tools. Surf. Coat. Technol. 191(2–3), 384–392 (2005)CrossRef

13.

Catauro, M., Bollino, F., Giovanardi, R., Veronesi, P.: Modification of Ti6Al4V implant surfaces by biocompatible TiO2/PCL hybrid layers prepared via sol-gel dip coating: structural characterization, mechanical and corrosion behavior. Mater. Sci. Eng. 74(3), 501–507 (2017)CrossRef

14.

Keshavarz, M., Idris, M.H., Ahmad, N.: Mechanical properties of stabilized zirconia nanocrystalline EB-PVD coating evaluated by micro and nano indentation. J. Adv. Ceram. 2(4), 333–340 (2013)CrossRef

15.

Burlakova, V.E., Tyurin, A.I., Drogan, E.G., Sadyrin, E.V., Pirozhkova, T.S., Novikova, A.A., Belikova, M.A.: Mechanical properties and size effects of self-organized film. J. Tribol. 141(5), 051601 (2009)CrossRef

16.

Bemporad, E., Sebastiani, M., Staia, M.H., Cabrera, E.P.: Tribological studies on PVD/HVOF duplex coatings on Ti6Al4V substrate. Surf. Coat. Technol. 203(5–7), 566–571 (2008)CrossRef

17.

Parinov, I.A., Chang, S.H., Gupta, V.K.: Advanced Materials. In: Proceedings of the International Conference on Physics and Mechanics of New Materials and Their Applications, PHENMA 2017, vol. 207. Springer Proceedings in Physics (2017)

18.

Argatov, I.I.: Depth-sensing indentation of a transversely isotropic elastic layer: second-order asymptotic models for canonical indenters. Int. J. Solids Struct. 48(25–26), 3444–3452 (2011)CrossRef

19.

Argatov, I.I., Sabina, F.J.: Small-scale indentation of an elastic coated half-space: the effect of compliant substrate. Int. J. Eng. Sci. 104, 87–96 (2016)CrossRef

20.

Schwarzer, N.: The extended Hertzian theory and its uses in analyzing indentation experiments. Philos. Mag. 86(33–35), 5179 (2006)CrossRef

21.

Chudoba, T., Schwarzer, N., Linss, V., Richter, F.: Determination of mechanical properties of graded coatings using nanoindentation. Thin Solid Films 469, 239–247 (2004)CrossRef

22.

Vasiliev, A., Volkov, S., Aizikovich, S., Jeng, Y.R.: Axisymmetric contact problems of the theory of elasticity for inhomogeneous layers. ZAMM-J. Appl. Math. Mech./Zeitschrift für Angewandte Mathematik und Mechanik 94(9), 705–712 (2014)CrossRef

23.

Guler, M.A., Erdogan, F.: Contact mechanics of graded coatings. Int. J. Solids Struct. 41, 3856–3889 (2004)CrossRef

24.

Parinov, I.A., Chang, S.H., Jani, M.A.: Advanced Materials. In: Techniques, Physics, Mechanics and Applications, vol. 193. Springer Proceedings in Physics (2017)

25.

Krenev, L.I., Aizikovich, S.M., Tokovyy, Y.V., Wang, Y.C.: Axisymmetric problem on the indentation of a hot circular punch into an arbitrarily nonhomogeneous half-space. Int. J. Solids Struct. 59, 18–28 (2015)CrossRef

26.

Ma, J., Ke, L.L., Wang, Y.C.: Frictionless contact of a functionally graded magneto-electro-elastic layered half-plane under a conducting punch. Int. J. Solids Struct. 51, 2791–2806 (2014)CrossRef

27.

Su, J., Ke, L.L., Wang, Y.C.: Axisymmetric frictionless contact of a functionally graded piezoelectric layered half-space under a conducting punch. Int. J. Solids Struct. 90, 45–59 (2016)CrossRef

28.

Kot, M., Rakowski, W., Lackner, J.M., Major, L.: Analysis of spherical indentations of coating-substrate systems: experiments and finite element modeling. Mater. Des. 43, 99–111 (2013)CrossRef

29.

Karimpour, M., Balint, D.S., Rzepiejewska-Malyska, K.A., Szerling, A., Michler, J., Lin, J.: An inverse method for extracting the mechanical properties of the constituent materials of a multilayer from nanoindentation data. Comput. Mater. Sci. 68, 384–390 (2013)CrossRef

30.

Dean, J., Aldrich-Smith, G., Clyne, T.W.: Use of nanoindentation to measure residual stresses in surface layers. Acta Mater. 7(59), 2749–2761 (2011)CrossRef

31.

Csanadi, T., Németh, D., Lofaj, F.: Mechanical properties of hard W-C coating on steel substrate deduced from nanoindentation and finite element modeling. Exp. Mech. 1–13, (2016)

32.

Gan, L., Ben-Nissan, B., Ben-David, A.: Modelling and finite element analysis of ultra-microhardness indentation of thin films. Thin Solid Films 290, 362–366 (1996)CrossRef

33.

Chang, R.C., Chen, F.Y., Yang, P.: Dynamic mechanical properties of photo resist thin films. J. Mech. Sci. Technol. 21(10), 1739 (2007)CrossRef

Titel: Mechanical Properties of Microposit S1813 Thin Layers
verfasst von: Andrey L. Nikolaev
Boris I. Mitrin
Evgeniy V. Sadyrin
Vladimir B. Zelentsov
Adair R. Aguiar
Sergei M. Aizikovich
Verlag: Springer International Publishing
Buch: Modeling, Synthesis and Fracture of Advanced Materials for Industrial and Medical Applications
Print ISBN: 978-3-030-48160-5

Electronic ISBN: 978-3-030-48161-2

Copyright-Jahr: 2020
DOI: https://doi.org/10.1007/978-3-030-48161-2_9

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