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Journal of Electroceramics
Erschienen in: Journal of Electroceramics 1-4/2011

01.06.2011

MEMS interdigitated electrode pattern optimization for a unimorph piezoelectric beam

verfasst von: Ryan R. Knight, Changki Mo, William W. Clark

Erschienen in: Journal of Electroceramics | Ausgabe 1-4/2011

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Abstract

This paper presents optimization of interdigitated (d 33 ) piezoelectric MEMS unimorph cantilever beams for harvesting vibration energy or for tuning resonators. The analysis of the poling behavior of the piezoelectric material is the key feature. While it is common that simplified models of interdigitated piezoelectric devices assume some uniform and well-defined poling pattern, the finite element modeling used in this work shows that not to be the case. A percent poling factor is developed to investigate the real losses associated with non-uniform poling. A parametric study in terms of electrode patterns, piezoelectric layer dimensions, and electrode dimensions is carried out to examine their effect on the percent poling factor. Design guidelines are provided to help ensure that such piezoelectric MEMS devices are developed to obtain optimum energy harvesting or tuning performance.
Vorheriger Artikel Multiferroic ceramics Pb(Fe1/2Nb1/2)O3 doped by Li
Nächster Artikel Effect of preheating process on crystallization and optical properties of sol-gel derived ZnO semiconductor thin films

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Metadaten
Titel
MEMS interdigitated electrode pattern optimization for a unimorph piezoelectric beam
verfasst von
Ryan R. Knight
Changki Mo
William W. Clark
Publikationsdatum
01.06.2011
Verlag
Springer US
Erschienen in
Journal of Electroceramics / Ausgabe 1-4/2011
Print ISSN: 1385-3449
Elektronische ISSN: 1573-8663
DOI
https://doi.org/10.1007/s10832-010-9621-8

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