Ausgabe 4-5/2008 Special issue: Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2-4 May 2007
Inhalt (33 Artikel)
Special Issue of the Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2–4 May 2007
- Editorial
B. Michel, T. Becker, U. Schmid
Silicon cantilever sensor for micro-/nanoscale dimension and force metrology
- Technical Paper
Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ
VHDL Implementation of a communication interface for integrated MEMS
- Technical Paper
E. Magdaleno Castelló, M. Rodríguez Valido, A. J. Ayala Alfonso
Development of automated microrobot-based nanohandling stations for nanocharacterization
- Technical Paper
Sergej Fatikow, Volkmar Eichhorn, Florian Krohs, Iulian Mircea, Christian Stolle, Saskia Hagemann
Novel sensor design methodology for measurements of the complex solar wind–magnetospheric–ionospheric system
- Technical Paper
G. Dekoulis, F. Honary
Characterization of aluminium nitride and aluminium oxide thin films sputter-deposited on organic substrates
- Technical Paper
U. Schmid, A. Ababneh, H. Seidel, R. Wagner, K. Bauer
Bismuth film electrodes for heavy metals determination
- Technical Paper
Vlastimil Rehacek, Ivan Hotovy, Marian Vojs, Fedor Mika
Mixed metal oxide films as pH sensing materials
- Technical Paper
Edric Gill, Khalil Arshak, Arousian Arshak, Olga Korostynska
Wafer-level plasma activated bonding: new technology for MEMS fabrication
- Technical Paper
Viorel Dragoi, Gerald Mittendorfer, Christine Thanner, Paul Lindner
Optimizing the performance of a Coriolis-based angular rate sensor applying an analytical approach
- Technical Paper
A. Kulygin, M. Gergen, U. Schmid, H. Seidel
Investigation of fabrication and encapsulation processes for a flexible tag microlab
- Technical Paper
E. Abad, B. Mazzolai, A. Juarros, D. Gómez, A. Mondini, I. Sayhan, A. Krenkow, Th. Becker
Fabrication and characterization of a passive silicon-based direct methanol fuel cell
- Technical Paper
J. P. Esquivel, N. Sabaté, J. Santander, N. Torres, C. Cané
A new micromachined sensor system for tactile measurements of high aspect ratio microstructures
- Technical Paper
M. Balke, E. Peiner, L. Doering
A liquid chromatography miniaturised system for agrofood applications
- Technical Paper
Antonella Benvenuto, Leandro Lorenzelli, Cristian Collini, Vittorio Guarnieri, Andrea Adami, Elisa Morganti
Ozone and gamma radiation sensing properties of In2O3:ZnO:SnO2 thin films
- Technical Paper
O. Korostynska, K. Arshak, G. Hickey, E. Forde
Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4 and KOH solutions
- Technical Paper
A. Ababneh, H. Kreher, U. Schmid
Design and consideration of wafer level micropackaging for distributed RF MEMS phase shifters
- Technical Paper
Xun-jun He, Qun Wu, Bo-shi Jin, Kai Tang, Ming-xin Song, Jing-hua Yin, Hui-cheng Zhu
Ultra-low-power components for an RFID Tag with physical and chemical sensors
- Technical Paper
Stefano Zampolli, Ivan Elmi, Enrico Cozzani, Gian Carlo Cardinali, Andrea Scorzoni, Michele Cicioni, Santiago Marco, Francisco Palacio, Jose M. Gómez-Cama, Ilker Sayhan, Thomas Becker
A labchip for highly selective and sensitive electrochemiluminescence detection of Hg2+ ions in aqueous solution employing integrated amorphous thin film diodes
- Technical Paper
Heiko Schäfer, Hengwei Lin, Michael Schmittel, Markus Böhm
Germanium resistors for RF MEMS based microsystems
- Technical Paper
K. Grenier, C. Bordas, S. Pinaud, L. Salvagnac, D. Dubuc
Measurement of the pressure broadening coefficients of the oxygen A-band using a low cost, polarization stabilized, widely tunable vertical-cavity surface-emitting laser
- Technical Paper
Benjamin Scherer, Jürgen Wöllenstein, Matthias Weidemüller, Wenzel Salzmann, Johannes Michael Ostermann, Fernando Rinaldi, Rainer Michalzik
Coupling coefficient determination based on simulation and experiment for ST-Cut quartz saw delay-line response
- Technical Paper
Yi-Chu Hsu, Ngoc-Bich Le
Compensation methods for a silicon tuning fork gyroscope
- Technical Paper
Eik Arnold, Franz Nuscheler
Gallium arsenide suspended microheater for MEMS sensor arrays
- Technical Paper
I. Hotovy, V. Rehacek, F. Mika, T. Lalinsky, S. Hascik, G. Vanko, M. Drzik
A compact optical multichannel system for ethylene monitoring
- Technical Paper
J. Hildenbrand, J. Wöllenstein, S. Hartwig, A. Eberhardt, B. Halford, M. Moreno, J. Fonollosa, L. Fonseca, J. Santander, R. Rubio, I. Gràcia, C. Cané
Nano- and microsized metal oxide thin film gas sensors
- Technical Paper
Stefan Palzer, Emmanuel Moretton, Francisco Hernandez Ramirez, Albert Romano-Rodriguez, Jürgen Wöllenstein
Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators
- Technical Paper
Christophe Serre, Alejandro Pérez-Rodríguez, Nuria Fondevilla, Emile Martincic, Susanna Martínez, Joan Ramon Morante, Josep Montserrat, Jaume Esteve
Dye and polymer based light sensor for tag integration
- Technical Paper
Ilker Sayhan, Marie-Luise Bauersfeld, Juergen Woellenstein, Thomas Becker
Three-dimensional simulation of sacrificial etching
- Technical Paper
Johann Cervenka, Hajdin Ceric, Siegfried Selberherr
RNA amplification chip with parallel microchannels and droplet positioning using capillary valves
- Technical Paper
Liv Furuberg, Michal Mielnik, Anja Gulliksen, Lars Solli, Ib-Rune Johansen, Jörg Voitel, Tobias Baier, Lutz Riegger, Frank Karlsen
Fabrication and characterization of a monolithic piezoelectric actuator for fiber coupling
- Technical Paper
C. Bruchmann, B. Höfer, P. Schreiber, R. Eberhardt, W. Buss, T. Peschel, S. Gebhardt, A. Tünnermann, E. Beckert
PNIPAM: a thermo-activated nano-material for use in optical devices
- Technical Paper
Solon Mias, Jan Sudor, Henri Camon
Micro actuators on the basis of thin SMA foils
- Technical Paper
M. Leester-Schädel, B. Hoxhold, C. Lesche, S. Demming, S. Büttgenbach
