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Microsystem Technologies

Ausgabe 9/2009

Inhalt (17 Artikel)

Technical Paper

Fabrication and testing of embedded microvalves within PMMA microfluidic devices

Alicia Guek Geok Toh, Sum Huan Ng, Zhenfeng Wang

Open Access Technical Paper

Radial superresolution of the two-photon microfabrication method

Peng Wei, Qiaofeng Tan, Yu Zhu, Guanghong Duan

Technical Paper

Dynamic characteristics and forced response of an electrostatically-actuated microbeam subjected to fluid loading

Ghader Rezazadeh, Mohammad Fathalilou, Rasool Shabani, Saeid Tarverdilou, Soheil Talebian

Technical Paper

The effect of the microfluidic diodicity on the efficiency of valve-less rectification micropumps using Lattice Boltzmann Method

Ahmed Fadl, Zongqin Zhang, Sebastian Geller, Jonas Tölke, Manfred Krafczyk, Donna Meyer

Technical Paper

Fabrication, constructions and electrical property of Si2Sb2Te5 electrical probe storage system

Yanbo Liu, Zhitang Song, Ting Zhang, Guoxin Zhang, Jing Zhang, Weimin Zhou, Jianpin Zhang

Technical Paper

Filling of very deep, wide trenches by BenzoCycloButene polymer

Hicham Eldin Mahfoz Kotb, K. Isoird, F. Morancho, L. Théolier, T. Do Conto

Technical Paper

High sensitivity and small size MEMS capacitive microphone using a novel slotted diaphragm

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Open Access Technical Paper

Kinetic masks: a new approach and device for dispersing biologically relevant fluids

Ina Meiser, Stephen Graham Shirley, Heiko Zimmermann

Technical Paper

Precision manufacturing of key components for an ultra miniature gas turbine unit for power generation

Kun Liu, Tobias Waumans, Jan Peirs, Dominiek Reynaerts

Technical Paper

Comparison of micro-dispensing performance between micro-valve and piezoelectric printhead

Jie Sun, Jinh Hao Ng, Ying Hsi Fuh, Yoke San Wong, Han Tong Loh, Qian Xu

Technical Paper

Factorial experimental design applied to DRIE for optimised process in power electronics applications requiring high-aspect ratio trenches

Magali Brunet, Pascal Dubreuil, Hicham Mahfoz-Kotb, Aline Gouantes, Anne-Marie Dorthe

Technical Paper

Thermo-mechanical reliability during technology development of power chip-on-board assemblies with encapsulation

Bernhard Wunderle, K.-F. Becker, R. Sinning, O. Wittler, R. Schacht, H. Walter, M. Schneider-Ramelow, K. Halser, N. Simper, B. Michel, H. Reichl

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