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Microsystem Technologies

Ausgabe 2/2009

Inhalt (15 Artikel)

Technical Paper

A nodal analysis model for the out-of-plane beamshape electrothermal microactuator

Rengang Li, Qing-An Huang, Weihua Li

Technical Paper

Effect of microstructure on blood cell clogging in blood separators based on capillary action

Duckjong Kim, Jae Young Yun, Sang-Jin Park, Seung S. Lee

Technical Paper

Performance characterization of a decoupled tri-axis micro angular rate sensor

Nan-Chyuan Tsai, Chung-Yang Sue, Chih-Che Lin

Technical Paper

Rubber-assisted micro forming of polymer thin films

Pratapkumar Nagarajan, Donggang Yao

Technical Paper

Mechanical behavior of a novel resonant microstructure for magnetic applications considering the squeeze-film damping

A. L. Herrera-May, L. A. Aguilera-Cortés, L. García-Gonzalez, E. Figueras-Costa

Technical Paper

A study on the novel micromixer with chaotic flows

Seung-Hyeon Lee, Ho-Jin Kang, Bumkyoo Choi

Technical Paper

A system-level model for a silicon thermal flow sensor

Guang-Ping Shen, Ming Qin, Qing-An Huang

Technical Paper

Micromachining of passive planar micromixer on poly (methyl methacrylate) substrate with excimer laser ablation

Heng Qi, Yuhong Liu, Xuan Wang, Feng Shen, Yong Yu, Tao Chen, Tiechuan Zuo

Technical paper

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Xun-jun He, Qun Wu, Yue Wang, Ming-xin Song, Jing-hua Yin

Technical Paper

UV surface exposure for low temperature hydrophilic silicon direct bonding

Xiaohui Lin, Guanglan Liao, Zirong Tang, Tielin Shi

Technical Paper

The mechanics of polymer swelling on microcantilever sensors

Natalya L. Privorotskaya, William P. King

Erratum

Fast patterning microstructures using inkjet printing conformal masks

C.-H. Lin, H. Yang, F.-Y. Chang, S.-H. Chang, M.-T. Yen

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