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Microsystem Technologies

Ausgabe 9/2019

Inhalt (35 Artikel)

Technical Paper

Decoupling and control of micromotion stage based on hysteresis of piezoelectric actuation

Chao Lin, Jiang Yu, Zhaohui Wu, Zhonglei Shen

Technical Paper

UV-curable micro-imprinting method for the fabrication of microstructure arrays

He Jianyun, Zhao Changsong, Yiqiang Fan, Zhang Jinghui, Tong Jinge, Yang Weimin

Technical Paper

Fabricating chambers of inkjet printhead by bonding SU-8 nozzle plate with suitable crosslinked degree

Xing Wang, Zheng Yang, Liping Qi, Shixia Yan, Shangfei Wang, Maocong Yi, Xiao Shan, Jiangang Zhou, Helin Zou

Technical Paper

Analysis of heat generation/absorption in thermally stratified Sutterby fluid flow with Cattaneo–Christov theory

Saif-ur-Rehman, Nazir Ahmad Mir, M. S. Alqarni, Muhammad Farooq, M. Y. Malik

Technical Paper

Stability analysis of an electrostatically actuated out of plane MEMS structure

Hadi Azimloo, Ghader Rezazadeh, Rasoul Shabani, Mehrdad Sheikhlou, Hamed Sadeghian Marnani

Technical Paper

A new adaptive fractional sliding mode control of a MEMS gyroscope

Mehran Rahmani, Mohammad Habibur Rahman

Technical Paper

Moving shot, an affordable and high-throughput setup for direct imaging of fast-moving microdroplets

Ali Mehrnezhad, Tae Joon Kwak, Sunkook Kim, Woo-Jin Chang, Kidong Park

Technical Paper

Optimization of LC sensor enabling wireless passive intracranial pressure monitoring

Qiuxu Wei, Yadong Li, Jie Yu, Jian Chen, Deyong Chen, Junbo Wang

Technical Paper

Investigation on the geometry of beams for piezoelectric energy harvester

E. L. Pradeesh, S. Udhayakumar

Technical Paper

Post-buckling analysis of piezo-magnetic nanobeams with geometrical imperfection and different piezoelectric contents

Seyed Sajad Mirjavadi, Masoud Forsat, Mohammad Reza Barati, Galal M. Abdella, A. M. S. Hamouda, Behzad Mohasel Afshari, Samira Rabby

Technical Paper

Modeling, simulation and experimental validation of fatigue behavior of thin-film titanium membranes

Nireekshan Kumar Sodavaram, Daniel McCormick, Fakhrul Alam, Johan Potgieter, David M. Budgett, Khalid Mahmood Arif

Technical Paper

Design and optimization of heating plate for metal oxide semiconductor gas sensor

Yi Wu, Lijing Yuan, Zhongqiu Hua, Dong Zhen, Zhilei Qiu

Technical Paper

Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer

R. Mukhiya, P. Agarwal, S. Badjatya, M. Garg, P. Gaikwad, S. Sinha, A. K. Singh, R. Gopal

Technical Paper

Solvent-based bonding of PMMA–PMMA for microfluidic applications

Mohammad M. Faghih, M. Keith Sharp

Technical Paper

Nanoparticle transportation through a permeable duct with Joule heating influence

Zhixiong Li, Ahmad Shafee, R. Kandasamy, M. Ramzan, Qasem M. Al-Mdallal

Technical Paper

Out-of-plane deformation and pull-in voltage of cantilevers with residual stress gradient: experiment and modelling

Anna Persano, Jacopo Iannacci, Pietro Siciliano, Fabio Quaranta

Technical Paper

Development and reliability analysis of micro gas sensor platform on glass substrate

Rahul Prajesh, Vinay Goyal, Vikas Saini, Jitendra Bhargava, Ashok Sharma, Ajay Agarwal

Technical Paper

Pulsatile vibrations of viscoelastic microtubes conveying fluid

Mergen H. Ghayesh, Hamed Farokhi, Ali Farajpour

Technical Paper

An evaluation of optical profilometry techniques for CMUT characterization

Aref Bakhtazad, Sazzadur Chowdhury

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