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Microsystem Technologies
Erschienen in: Microsystem Technologies 5/2019

09.04.2019 | Technical Paper

Structural design and simulation of a micro-gyroscope based on nano-grating detection

verfasst von: Mengwei Li, Zi Wang, Hao Geng, Qiannan Wu, Rui Zhang, Zhiqin Cui, Xiaoyan Wang, Gao Wang

Erschienen in: Microsystem Technologies | Ausgabe 5/2019

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Abstract

The central concept underpinning the operation of the micro-gyroscope is the detection of the weak Coriolis force. We describe in detail the working principle of an optical micro-gyroscope based on nano-grating detection. A double-layer reflective metal nano-grating is used to detect the Coriolis force acting on the gyroscope. To analyze its structural sensitivity, a simulation model of the gyroscope is configured, results from which show that the structure achieves good modal matching and a structural sensitivity of 6.402 nm/°/s. Furthermore, the structure of the nano-grating is analyzed in an optical simulation, and a tolerance analysis is performed of several structural parameters to gain insight into realizing an actual device. Finally, a model of the gyroscope system was implemented in the SIMULINK environment. Using parameter values obtained from calculations, simulations of the nano-grating gyroscope gave a total sensitivity of 3.03 mv/°/s, along with a theoretical noise floor of 5.95 × 10−5°/s/√Hz. This confirms that the proposed optical micro-gyroscope performs well as designed.
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Metadaten
Titel
Structural design and simulation of a micro-gyroscope based on nano-grating detection
verfasst von
Mengwei Li
Zi Wang
Hao Geng
Qiannan Wu
Rui Zhang
Zhiqin Cui
Xiaoyan Wang
Gao Wang
Publikationsdatum
09.04.2019
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 5/2019
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-019-04420-4

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