Vibration sensitivity analytical analysis for rocking mass microgyroscope

Rocking mass microgyroscope (RMG) is considered as one kind of the microgyroscopes with high sensitivity due to its unique structure. This paper provides a sensitivity analytical model and design guidelines for high sensitivity to RMG. Using Coriolis Effect and Newton’s second law, the dynamic equations of motion are built, and the parameterized sensitivity analytical model is derived by solving the equations. Based on the sensitivity model, the structural parametric analysis of RMG is carried out, and its structural parameters are also optimized. Two kinds of RMG prototypes with different structural parameters are fabricated, and their Coriolis force signals are tested by spectrum analysis. The tested results partially indicated that the sensitivity analytical model of RMG is valid. Finally, frequency split, Q factor and other factors influencing the sensitivity of RMG are discussed in details to enhance its sensitivity. Results presented in this paper are valuable in structure design and parameter optimization of RMG and other MEMS devices with high sensitivity.