Skip to main content
Erschienen in: Journal of Materials Science 19/2019

20.06.2019 | Electronic materials

Analysis on the electronic trap of β-Ga2O3 single crystal

Erschienen in: Journal of Materials Science | Ausgabe 19/2019

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

X-ray photoelectron spectroscopy (XPS), photoluminescence spectroscopy and Raman spectroscopy were applied to study β-Ga2O3 single crystals before and after annealing. By systematic analysis, the mechanism of the carrier concentration decrease after annealing was explained using electronic trap of Ga I 3+ . XPS measurements showed that the O content increases while the Ga3+ content decreases after annealing, which is related to the carrier concentration decrease. The shift of blue emission band center which related to donors was attributed to the electron capture by Ga3+ nearby conduction band. The Raman spectra confirmed this capture, as based on the Raman peak intensity changes, and the electrons were judged to be mainly captured by GaI of β-Ga2O3.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
1.
Zurück zum Zitat Galazka Z, Irmscher K, Uecker R, Bertram R, Pietsch M, Kwasniewski A, Naumann M, Schulz T, Schewski R, Klimm D, Bickermann M (2014) On the bulk β-Ga2O3 single crystals grown by the Czochralski method. J Cryst Growth 404:184–191CrossRef Galazka Z, Irmscher K, Uecker R, Bertram R, Pietsch M, Kwasniewski A, Naumann M, Schulz T, Schewski R, Klimm D, Bickermann M (2014) On the bulk β-Ga2O3 single crystals grown by the Czochralski method. J Cryst Growth 404:184–191CrossRef
2.
Zurück zum Zitat Aida H, Nishiguchi K, Takeda H, Aota N, Sunakawa K, Yaguchi Y (2008) Growth of β-Ga2O3 single crystals by the edge-defined, film fed growth method. Jpn J Appl Phys 47(11):8506–8509CrossRef Aida H, Nishiguchi K, Takeda H, Aota N, Sunakawa K, Yaguchi Y (2008) Growth of β-Ga2O3 single crystals by the edge-defined, film fed growth method. Jpn J Appl Phys 47(11):8506–8509CrossRef
3.
Zurück zum Zitat Hu ZZ, Zhou H, Feng Q, Zhang JC, Zhang CF, Dang K, Cai YC, Feng ZQ, Gao YY, Kang XW, Hao Y, Kang X, Hao Y (2018) Field-plated lateral β-Ga2O3 schottky barrier diode with high reverse blocking voltage of more than 3 kV and high DC power figure-of-merit of 500 MW/cm2. IEEE Electron Device Lett 39(10):1564–1567CrossRef Hu ZZ, Zhou H, Feng Q, Zhang JC, Zhang CF, Dang K, Cai YC, Feng ZQ, Gao YY, Kang XW, Hao Y, Kang X, Hao Y (2018) Field-plated lateral β-Ga2O3 schottky barrier diode with high reverse blocking voltage of more than 3 kV and high DC power figure-of-merit of 500 MW/cm2. IEEE Electron Device Lett 39(10):1564–1567CrossRef
4.
Zurück zum Zitat Ke Z, Abhishek V, Uttam S (2018) 1.85 kV breakdown voltage in lateral field-plated Ga2O3 MOSFETs. IEEE Electron Device Lett 39(5):1385–1388 Ke Z, Abhishek V, Uttam S (2018) 1.85 kV breakdown voltage in lateral field-plated Ga2O3 MOSFETs. IEEE Electron Device Lett 39(5):1385–1388
5.
Zurück zum Zitat Yamaguchi K (2004) First principles study on electronic structure of β-Ga2O3. Solid State Commun 131:739–744CrossRef Yamaguchi K (2004) First principles study on electronic structure of β-Ga2O3. Solid State Commun 131:739–744CrossRef
6.
Zurück zum Zitat Feng ZQ, Huang L, Feng Q, Li X, Zhang H, Tang WH, Zhang JC, Hao Y (2018) Influence of annealing atmosphere on the performance of a β-Ga2O3 thin film and photodetector. Opt Mater Express 8(8):2229–2237CrossRef Feng ZQ, Huang L, Feng Q, Li X, Zhang H, Tang WH, Zhang JC, Hao Y (2018) Influence of annealing atmosphere on the performance of a β-Ga2O3 thin film and photodetector. Opt Mater Express 8(8):2229–2237CrossRef
7.
Zurück zum Zitat Heinemann MD, Berry J, Teeter G, Unold T, Ginley D (2016) Oxygen deficiency and Sn doping of amorphous Ga2O3. Appl Phys Lett 108:022107CrossRef Heinemann MD, Berry J, Teeter G, Unold T, Ginley D (2016) Oxygen deficiency and Sn doping of amorphous Ga2O3. Appl Phys Lett 108:022107CrossRef
8.
Zurück zum Zitat Son NT, Goto K, Nomura K, Thieu QT, Togashi R, Murakami H, Kumagai Y, Kuramata A, Higashiwaki M, Koukitu A, Yamakoshi S, Monemar B, Janzén E (2016) Electronic properties of the residual donor in unintentionally doped β−Ga2O3. J Appl Phys 120:235703CrossRef Son NT, Goto K, Nomura K, Thieu QT, Togashi R, Murakami H, Kumagai Y, Kuramata A, Higashiwaki M, Koukitu A, Yamakoshi S, Monemar B, Janzén E (2016) Electronic properties of the residual donor in unintentionally doped β−Ga2O3. J Appl Phys 120:235703CrossRef
9.
Zurück zum Zitat Gogova D, Wagner G, Baldini M, Schmidbauer M, Irmscher K, Schewski R, Galazka Z, Albrecht M, Fornari R (2014) Structural properties of Si-doped β-Ga2O3 layers grown by MOVPE. J Cryst Growth 401:665–669CrossRef Gogova D, Wagner G, Baldini M, Schmidbauer M, Irmscher K, Schewski R, Galazka Z, Albrecht M, Fornari R (2014) Structural properties of Si-doped β-Ga2O3 layers grown by MOVPE. J Cryst Growth 401:665–669CrossRef
10.
Zurück zum Zitat Víllora EG, Shimamura K, Yoshikawa Y, Ujiie T, Aoki K (2008) Electrical conductivity and carrier concentration control in β-Ga2O3 by Si doping. Appl Phys Lett 92:202120CrossRef Víllora EG, Shimamura K, Yoshikawa Y, Ujiie T, Aoki K (2008) Electrical conductivity and carrier concentration control in β-Ga2O3 by Si doping. Appl Phys Lett 92:202120CrossRef
11.
Zurück zum Zitat Varley JB, Weber JR, Janotti A, Van de Walle CG (2010) Oxygen vacancies and donor impurities in β-Ga2O3. Appl Phys Lett 97:142106CrossRef Varley JB, Weber JR, Janotti A, Van de Walle CG (2010) Oxygen vacancies and donor impurities in β-Ga2O3. Appl Phys Lett 97:142106CrossRef
12.
Zurück zum Zitat Verley JB, Janotti A, Franchini C, Van de Walle CG (2012) Role of self-trapping in luminescence and p-type conductivity of wide-band-gap oxides. Phys Rev B 85(8):081109CrossRef Verley JB, Janotti A, Franchini C, Van de Walle CG (2012) Role of self-trapping in luminescence and p-type conductivity of wide-band-gap oxides. Phys Rev B 85(8):081109CrossRef
13.
Zurück zum Zitat Shi Q, Wang QR, Zhang D, Wang QL, Li SH, Wang WJ, Fan QL, Zhang JY (2019) Structural, optical and photoluminescence properties of Ga2O3 thin films deposited by vacuum thermal evaporation. J Lumin 206:53–58CrossRef Shi Q, Wang QR, Zhang D, Wang QL, Li SH, Wang WJ, Fan QL, Zhang JY (2019) Structural, optical and photoluminescence properties of Ga2O3 thin films deposited by vacuum thermal evaporation. J Lumin 206:53–58CrossRef
14.
Zurück zum Zitat Rao R, Rao AM, Xu B, Dong J, Sharma S, Sunkara MK (2005) Blueshifted Raman scattering and its correlation with the [110] growth direction in gallium oxide nanowires. J Appl Phys 98(5):094312CrossRef Rao R, Rao AM, Xu B, Dong J, Sharma S, Sunkara MK (2005) Blueshifted Raman scattering and its correlation with the [110] growth direction in gallium oxide nanowires. J Appl Phys 98(5):094312CrossRef
15.
Zurück zum Zitat Tak BR, Dewanb S, Goyalc A, Pathaka R, Guptab V, Kapoorc AK, Nagarajand S, Singha R (2019) Point defects induced work function modulation of β-Ga2O3. Appl Surf Sci 465:973–978CrossRef Tak BR, Dewanb S, Goyalc A, Pathaka R, Guptab V, Kapoorc AK, Nagarajand S, Singha R (2019) Point defects induced work function modulation of β-Ga2O3. Appl Surf Sci 465:973–978CrossRef
16.
Zurück zum Zitat Atuchin VV, Pokrovsky LD, Khyzhun OYu, Sinelnichenko AK, Ramana CV (2008) Surface crystallography and electronic structure of potassium yttrium tungstate. J Appl Phys 104:033518CrossRef Atuchin VV, Pokrovsky LD, Khyzhun OYu, Sinelnichenko AK, Ramana CV (2008) Surface crystallography and electronic structure of potassium yttrium tungstate. J Appl Phys 104:033518CrossRef
17.
Zurück zum Zitat Atuchin VV, Kalabin IE, Kesler VG, Pervukhina NV (2005) Nb 3d and O 1s core levels and chemical bonding in niobates. J Electron Spectrosc Relat Phenom 142:129–134CrossRef Atuchin VV, Kalabin IE, Kesler VG, Pervukhina NV (2005) Nb 3d and O 1s core levels and chemical bonding in niobates. J Electron Spectrosc Relat Phenom 142:129–134CrossRef
18.
Zurück zum Zitat Atuchin VV, Kesler VG, Pervukhina NV, Zhang ZM (2006) Ti 2p and O 1s core levels and chemical bonding in titanium-bearing oxides. J Electron Spectrosc Relat Phenom 152:18–24CrossRef Atuchin VV, Kesler VG, Pervukhina NV, Zhang ZM (2006) Ti 2p and O 1s core levels and chemical bonding in titanium-bearing oxides. J Electron Spectrosc Relat Phenom 152:18–24CrossRef
19.
Zurück zum Zitat Atuchin VV, Aleksandrovsky AS, Chimitova OD, Diao CP, Gavrilova TA, Kesler VG, Molokeev MS, Krylov AS, Bazarov BG, Bazarova JG, Lin ZS (2015) Electronic structure of β-RbSm(MoO4)2 and chemical bonding in molybdates. Dalton Trans 44:1805–1815CrossRef Atuchin VV, Aleksandrovsky AS, Chimitova OD, Diao CP, Gavrilova TA, Kesler VG, Molokeev MS, Krylov AS, Bazarov BG, Bazarova JG, Lin ZS (2015) Electronic structure of β-RbSm(MoO4)2 and chemical bonding in molybdates. Dalton Trans 44:1805–1815CrossRef
20.
Zurück zum Zitat Atuchin VV, Isaenko LI, Kesler VG, Kang L, Lin Z, Molokeev MS, Yelisseyev AP, Zhurkov SA (2013) Structural, spectroscopic, and electronic properties of cubic G0-Rb2KTiOF5 oxyfluoride. J Phys Chem C 117:7269–7278CrossRef Atuchin VV, Isaenko LI, Kesler VG, Kang L, Lin Z, Molokeev MS, Yelisseyev AP, Zhurkov SA (2013) Structural, spectroscopic, and electronic properties of cubic G0-Rb2KTiOF5 oxyfluoride. J Phys Chem C 117:7269–7278CrossRef
21.
Zurück zum Zitat Galazka Z, Uecker R, Irmscher K, Albrecht M, Klimm D, Pietsch M, Brützam M, Bertram R, Ganschow S, Fornari R (2010) Czochralski growth and characterization of β-Ga2O3 single crystals. Cryst Res Technol 45(12):1229–1236CrossRef Galazka Z, Uecker R, Irmscher K, Albrecht M, Klimm D, Pietsch M, Brützam M, Bertram R, Ganschow S, Fornari R (2010) Czochralski growth and characterization of β-Ga2O3 single crystals. Cryst Res Technol 45(12):1229–1236CrossRef
22.
Zurück zum Zitat Zade V, Mallesham B, Roy S, Shutthanandan V, Ramana CV (2019) Electronic structure of tungsten-doped β-Ga2O3 compounds. ECS J Solid State Sci 8(7):Q3111–Q3115CrossRef Zade V, Mallesham B, Roy S, Shutthanandan V, Ramana CV (2019) Electronic structure of tungsten-doped β-Ga2O3 compounds. ECS J Solid State Sci 8(7):Q3111–Q3115CrossRef
23.
Zurück zum Zitat Onuma T, Fujioka S, Yamaguchi T, Higashiwaki M, Sasaki K, Masui T, Honda T (2013) Correlation between blue luminescence intensity and resistivity in β-Ga2O3 single crystals. Appl Phys Lett 103(4):041910CrossRef Onuma T, Fujioka S, Yamaguchi T, Higashiwaki M, Sasaki K, Masui T, Honda T (2013) Correlation between blue luminescence intensity and resistivity in β-Ga2O3 single crystals. Appl Phys Lett 103(4):041910CrossRef
24.
Zurück zum Zitat Xiao WZ, Wang LL, Xu L, Wan Q, Zou BS (2009) Electronic structure and magnetic interactions in Ni-doped β-Ga2O3 from first-principles calculations. Scripta Mater 61(5):477–480CrossRef Xiao WZ, Wang LL, Xu L, Wan Q, Zou BS (2009) Electronic structure and magnetic interactions in Ni-doped β-Ga2O3 from first-principles calculations. Scripta Mater 61(5):477–480CrossRef
25.
Zurück zum Zitat Galván C, Galván MC, Arias-Cerón JS, López-Luna E, Vilchis H, Sánchez-R VM (2016) Structural and Raman studies of Ga2O3 obtained on GaAs substrate. Mater Sci Semicond Process 41:513–518CrossRef Galván C, Galván MC, Arias-Cerón JS, López-Luna E, Vilchis H, Sánchez-R VM (2016) Structural and Raman studies of Ga2O3 obtained on GaAs substrate. Mater Sci Semicond Process 41:513–518CrossRef
26.
Zurück zum Zitat Onuma T, Fujioka S, Yamaguchi T, Itoh Y, Higashiwaki M, Sasaki K, Masui T, Honda T (2014) Polarized Raman spectra in β-Ga2O3 single crystals. J Cryst Growth 401:330–333CrossRef Onuma T, Fujioka S, Yamaguchi T, Itoh Y, Higashiwaki M, Sasaki K, Masui T, Honda T (2014) Polarized Raman spectra in β-Ga2O3 single crystals. J Cryst Growth 401:330–333CrossRef
Metadaten
Titel
Analysis on the electronic trap of β-Ga2O3 single crystal
Publikationsdatum
20.06.2019
Erschienen in
Journal of Materials Science / Ausgabe 19/2019
Print ISSN: 0022-2461
Elektronische ISSN: 1573-4803
DOI
https://doi.org/10.1007/s10853-019-03777-1

Weitere Artikel der Ausgabe 19/2019

Journal of Materials Science 19/2019 Zur Ausgabe

    Marktübersichten

    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.