Skip to main content
Fachgebiete
Automobil + Motoren Bauwesen + Immobilien Business IT + Informatik Elektrotechnik + Elektronik Energie + Nachhaltigkeit Finance + Banking Management + Führung Marketing + Vertrieb Maschinenbau + Werkstoffe Versicherung + Risiko
DE
EN
Bücher
Zeitschriften
Themenseiten
Organisationspsychologie Projektmanagement Marketing Smart Manufacturing
Weitere Formate
Podcasts Webinare Technik Webinare Wirtschaft Kongresse Veranstaltungskalender Awards
Jetzt Einzelzugang starten
Zugang für Unternehmen
Referenzkunden
SLX-Digitalkonferenz: Zukunftswerkstatt 2024

Mehr Umsatz mit Top-Kontakten

Am 7. Mai erfahren Sie, wie Vertriebsteams Leadgenerierung, Leadnurturing und Leadstrategien effizient steuern können.
Erweiterte Suche
Anmelden
nach oben
Microsystem Technologies
Erschienen in: Microsystem Technologies 10/2018

13.11.2017 | Technical Paper

Annealing effect on electrical, nanomechanical and sensing properties of ZnO/Mo/ZnO nanofilms

verfasst von: Yu-Jen Hsiao, Shi-Hao Wang, Te-Hua Fang, Liang-Wen Ji

Erschienen in: Microsystem Technologies | Ausgabe 10/2018

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

Multilayer film of zinc oxide (ZnO)/molybdenum (Mo)/ZnO was prepared by radio-frequency magnetron sputtering. We studied the optical, electrical, structural, nanomechanical properties, and sensing characteristics of ZnO/Mo/ZnO multilayer films. ZnO/Mo/ZnO films annealed temperatures about 500 °C had a sheet resistance of 1.63 × 102 Ω/□ with a transmittance of 89.3% at 395 nm, and a hardness of 6.14 GPa. In addition, the gas response of the multilayer films reached 57.2%, obtained at 60 ppm for alcohol.
Vorheriger Artikel Improving tracking error by dead reckoning and RSSI technologies with a fuzzy fusion scheme in indoor location
Nächster Artikel Preparation and photoluminescence properties of Eu3+ ion-doped Mg2LaTaO6 phosphor

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Jetzt informieren
Literatur
Barraud L, Holman ZC, Badel N, Reiss P, Descoeudres A, Battaglia C, Wolf SD, Ballif C (2013) Hydrogen-doped indium oxide/indium tin oxide bilayers for high-efficiency silicon heterojunction solar cells. Sol Energy Mater Sol Cells 115:151–156CrossRef
Choi YJ, Gong SC, Park CS, Lee HS, Jang JG, Chang HJ, Yeom GY, Park HH (2013) Improved performance of organic light-emitting diodes fabricated on Al-doped ZnO anodes incorporating a homogeneous Al-doped ZnO buffer layer grown by atomic layer deposition. ACS Appl Mater Interfaces 5:3650–3655CrossRef
Ellmer K (2012) Past achievements and future challenges in the development of optically transparent electrodes. Nat Photon 6:809–817CrossRef
Fang TH, Chang WJ (2003) Nanomechanical properties of copper thin films on different substrates using the nanoindentation technique. Microel Eng 65:231–238CrossRef
Han GS, Lee S, Jin YU, Cho IS, Jung HS (2015) Facile transfer fabrication of transparent, conductive and flexible In2O3: Sn (ITO) nanowire arrays electrode via selective wet-etching ZnO sacrificial layer. Mater Lett 158:304–308CrossRef
He X, Wang W, Li S, Liu Y, Zheng W, Shi Q, Luo X (2015) Experimental and theoretical analysis of ZnO/Au/ZnO transparent conducting thin films. Vacuum 120:17–21CrossRef
Hecht DS, Hu LB, Irvin G (2011) Emerging transparent electrodes based on thin films of carbon nanotubes, graphene, and metallic nanostructures. Adv Mater 23:1482–1513CrossRef
Ji LW, Young SJ, Fang TH, Liu CH (2007) Buckling characterization of vertical ZnO nanowires using nanoindentation. Appl Phys Lett 90:033109(1–3)
Ji LW, Peng SM, Su YK, Young SJ, Wu CZ, Cheng WB (2009) Ultraviolet photodetectors based on selectively growth ZnO nanorod arrays. Appl Phys Lett 94:203106(1–3)
Kim YH, Lee JW, Murakami RI (2013) Dependences of sputtering times on the structural and electrical properties of ZnO/Ag/ZnO thin films on PET by DC sputtering. IEEE Trans Nanotechnol 12:991–995CrossRef
Kim JH, Kang TW, Na SI, Yoo YZ, Seong TY (2015) ITO-free inverted organic solar cells fabricated with transparent and low resistance ZnO/Ag/ZnO multilayer electrode. Curr Appl Phys 15:829–832CrossRef
Lansåker PC, Petersson P, Niklasson GA, Granqvist CG (2013) Thin sputter deposited gold films on In2O3: Sn, SnO2: In, TiO2 and glass: optical, electrical and structural effects. Sol Energy Mater Sol Cells 117:462–470CrossRef
Li FS, Lin ZX, Zhang BB, Zhang YZ, Wu CX, Guo TL (2013) Fabrication of flexible conductive graphene/Ag/Al-doped zinc oxide multilayer films for application in flexible organic light-emitting diodes. Org Electron 14:2139–2143CrossRef
Moon CS, Chung YM, Jung WS, Han JG (2007) The low temperature process design for Al doped ZnO film synthesis on polymer. Surf Coat Technol 201:5035–5038CrossRef
Nomura K, Ohta H, Takagi A, Kamiya T, Hirano M, Hosono H (2004) Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature 432:488–492CrossRef
Peng SM, Su YK, Ji LW, Young SJ, Wu CZ, Tsai CN, Chao WC, Cheng WB (2011) Photoelectrical and noise characteristics of ZnO nanowire networks photosensor. IEEE Sens J 11:1173–1177CrossRef
Traviss D, Bruck R, Mills B, Abb M, Muskens OL (2013) Ultrafast plasmonics using transparent conductive oxide hybrids in the epsilon-near-zero regime. Appl Phys Lett 102:121112CrossRef
Varghese OK, Paulose M, Grimes CA (2009) Long vertically aligned titania nanotubes on transparent conducting oxide for highly efficient solar cells. Nat Nanotechnol 4:592–597CrossRef
Wang M, Ji J, Luo S, Jiang L, Ma J, Xie X, Ping Y, Ge J (2016) Sol–gel-derived ZnO/Cu/ZnO multilayer thin films and their optical and electrical properties. Mater Sci Semicond Process 51:55–59CrossRef
Young SJ, Ji LW, Chang SJ, Fang TH, Hsueh TJ, Meen TH, Chen IC (2007) Nanoscale mechanical characteristics of vertical ZnO nanowires grown on ZnO:Ga/glass templates. Nanotechnology 18:225603CrossRef
Young SJ, Yang CC, Lai LT (2017) Review—growth of Al-, Ga-, and In-doped ZnO nanostructures via a low-temperature process and their application to field emission devices and ultraviolet photosensors. J Electrochem Soc 164:B3013–B3028CrossRef
Yu S, Zhang W, Li L, Xu D, Dong H, Jin Y (2014) Characterization of SnO2/Cu/SnO2 multilayers for high performance transparent conducting electrodes. Thin Solid Films 562:501–505CrossRef
Metadaten
Titel
Annealing effect on electrical, nanomechanical and sensing properties of ZnO/Mo/ZnO nanofilms
verfasst von
Yu-Jen Hsiao
Shi-Hao Wang
Te-Hua Fang
Liang-Wen Ji
Publikationsdatum
13.11.2017
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 10/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-017-3615-2

Weitere Artikel der Ausgabe 10/2018

Microsystem Technologies 10/2018 Zur Ausgabe

Technical Paper

Hydrogel coating on soft polymeric substrates for microfluidic devices

Technical Paper

Design and fabrication of micro-LED array with application-specific integrated circuits (ASICs) light emitting display

Technical Paper

The WSN and 3G/NFC embedded into IoV (Internet-of-Vehicle) fulfill cold chain logistics

Technical Paper

3D printing of electrically conductive hybrid organic–inorganic composite materials

Technical Paper

A fusion algorithm of target dynamic information for asynchronous multi-sensors

Technical Paper

A non enzymatic glutamate sensor based on nickel oxide nanoparticle

Neuer Inhalt

    Bildnachweise