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Microsystem Technologies
Erschienen in: Microsystem Technologies 6/2017

30.12.2015 | Technical Paper

Fabrication of microfluidic structures in quartz via micro machining technologies

verfasst von: Ying-Chieh Lin, Chung-Ching Lee, Heng-Sheng Lin, Zheng-Han Hong, Fu-Chuan Hsu, Tsung-Pin Hung, Yu-Ting Lyu

Erschienen in: Microsystem Technologies | Ausgabe 6/2017

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Abstract

Microfluidic channels have been created for quartz material using micromechanical manufacturing technologies such as micro laser machining, micro ultrasonic machining, and ultra-precision machining. Ultra-precision machining has been used to manufacture cross-junction channels 14 µm wide and 28 µm deep with a three-dimensional triangle cross-section. Micro laser machining has been used to manufacture U-shaped and https://static-content.springer.com/image/art%3A10.1007%2Fs00542-015-2717-y/MediaObjects/542_2015_2717_Figa_HTML.gif -shaped microfluidic channels. Deep holes and microfluidic channels with a high slenderness ratio (width/depth) can be obtained by using micro ultrasonic machining technology. These three machining techniques are compared with respect to surface profiles and machining quality.
Vorheriger Artikel High resolution topography utilizing a line scan stereo vision technique
Nächster Artikel Micromirror based virtual image automotive head-up display

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Metadaten
Titel
Fabrication of microfluidic structures in quartz via micro machining technologies
verfasst von
Ying-Chieh Lin
Chung-Ching Lee
Heng-Sheng Lin
Zheng-Han Hong
Fu-Chuan Hsu
Tsung-Pin Hung
Yu-Ting Lyu
Publikationsdatum
30.12.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 6/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2717-y

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