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Erschienen in: Microsystem Technologies 8/2011

01.08.2011 | Technical Paper

Investigation of wear resistance and lifetime of diamond-like carbon (DLC) coated glass disk in flying height measurement process

verfasst von: Korakoch Phetdee, Alongkorn Pimpin, Werayut Srituravanich

Erschienen in: Microsystem Technologies | Ausgabe 8/2011

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Abstract

Flying height has been greatly reduced to less than 10 nm to achieve high-density magnetic storage. This leads to significant disk wear especially, glass disks used in flying height measurement process. This paper reports the utilization of diamond-like carbon (DLC) overcoat to increase the wear resistance and lifetime of commercial glass disks in a flying height tester. Wear resistance of the DLC coated glass disks was investigated in wear test using a triboindentor. The results showed significant wear resistance improvement of the coated disk where the wear depth reduced from 62.2 nm on an uncoated disk to 5–7 nm on 15-nm thick DLC coated disks. Furthermore, lifetime measurement of the coated disk has been performed in a flying height tester. As a result, lifetime of the coated disk has been drastically improved by more than 30 times in comparison to an uncoated disk.

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Metadaten
Titel
Investigation of wear resistance and lifetime of diamond-like carbon (DLC) coated glass disk in flying height measurement process
verfasst von
Korakoch Phetdee
Alongkorn Pimpin
Werayut Srituravanich
Publikationsdatum
01.08.2011
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 8/2011
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-011-1289-8

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