nach oben

Microsystem Technologies

Erschienen in:

28.02.2020 | Technical Paper

Analytical analysis of a circular unimorph piezoelectric actuator in the range of low voltages and pressures

verfasst von: Hamid Asadi Dereshgi, Huseyin Dal, Mehmet Emin Sayan

Erschienen in: Microsystem Technologies | Ausgabe 8/2020

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

In this study, the static displacement behaviour of a three-layer axisymmetric circular piezoelectric unimorph actuator subjected to voltage and uniform pressure loads for different mechanical and geometric properties of layers was investigated. The closed-analytical model of piezoelectric actuator based on the classical laminated thin plate theory was performed. Kirchhoff’s thin plate theory for the mathematical model in closed form of the actuator was utilized. The superposition of transverse and lateral deflections expressions was used to obtain the displacement equation of the piezoelectric actuator. Then, the analytical model solutions were compared by finite element model solutions. It was observed that the results obtained from analytical model and finite element analysis were sufficiently compatible with each other. The effects of nondimensional physical and mechanical properties on the static deflection performance of the piezoelectric actuator were discussed using the analytical model. According to the results obtained, the physical and mechanical properties of the actuator had significant effects on the actuator displacement. Therefore, the results obtained in this study can be used to optimize the performance of the circular piezoelectric actuator.

Vorheriger Artikel Vulnerability assessment of a power transmission network employing complex network theory in a resilience framework

Nächster Artikel Design and development of an efficient fluid mixing for 3D printed lab-on-a-chip

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Afrasiab H, Movahhedy M, Assempour A (2011) Proposal of a new design for valveless micropumps. Sci Iran 18:1261–1266. https://doi.org/10.1016/j.scient.2011.11.023 CrossRefMATH

Chee PS, Nafea M, Leow PL, Ali MSM (2016) Thermal analysis of wirelessly powered thermo-pneumatic micropump based on planar LC circuit. J Mech Sci Technol 30:2659–2665. https://doi.org/10.1007/s12206-016-0527-5 CrossRef

Cheong HR, Lai KC, Chee PS (2018) A wireless powered electroactive polymer using magnetic resonant coupling. IOP Conf Ser Mater Sci Eng 409:012002. https://doi.org/10.1088/1757-899x/409/1/012002 CrossRef

Crawley EF, Anderson EH (1990) Detailed models of piezoceramic actuation of beams. J Intell Mater Syst Struct 1:4–25. https://doi.org/10.1177/1045389x9000100102 CrossRef

Dereshgi HA (2016) Design of novel micro-pumps for mechatronic applications. In: 4th International symposium on innovative technologies in engineering and science, pp 1435–1447

Dereshgi HA (2019) Investigation of electro-mechanical factors effecting micro-pump characteristics for biomedical applications. Ph.D. thesis, Sakarya University

Dereshgi HA, Yildiz MZ (2018a) Investigation of electro-mechanical factors effecting piezoelectric actuator for valveless micropump characteristics. J Eng Sci Technol 13:2843–2856

Dereshgi HA, Yildiz MZ (2018b) A novel micropump design: investigation of the voltage effect on the net flow rate. Sakarya Univ J Sci 22:1152–1156. https://doi.org/10.16984/saufenbilder.388658 CrossRef

Dereshgi HA, Yildiz MZ (2019) Numerical study of novel MEMS-based valveless piezoelectric micropumps in the range of low voltages and frequencies. In: 2019 Scientific meeting on electrical-electronics & biomedical engineering and computer science (EBBT). https://doi.org/10.1109/ebbt.2019.8741629

Dereshgi HA, Yildiz MZ, Parlak N (2020) Performance comparison of novel single and bi-diaphragm PZT based valveless micropumps. J Appl Fluid Mech 13:401–412. https://doi.org/10.29252/jafm.13.02.30347 CrossRef

Deshpande M, Saggere L (2007) An analytical model and working equations for static deflections of a circular multi-layered diaphragm-type piezoelectric actuator. Sens Actuators A 136:673–689. https://doi.org/10.1016/j.sna.2006.12.022 CrossRef

Dong S, Uchino K, Li L, Viehland D (2007) Analytical solutions for the transverse deflection of a piezoelectric circular axisymmetric unimorph actuator. IEEE Trans Ultrason Ferroelectr Freq Control 54:1240–1249. https://doi.org/10.1109/tuffc.2007.377 CrossRef

Fan B, Song G, Hussain F (2005) Simulation of a piezoelectrically actuated valveless micropump. Smart Mater Struct 14:400–405. https://doi.org/10.1088/0964-1726/14/2/014 CrossRef

Fox C, Chen X, Mcwilliam S (2007) Analysis of the deflection of a circular plate with an annular piezoelectric actuator. Sens Actuators A 133:180–194. https://doi.org/10.1016/j.sna.2006.03.025 CrossRef

Gidde RR, Pawar PM, Dhamgaye VP (2019) Fully coupled modeling and design of a piezoelectric actuation based valveless micropump for drug delivery application. Microsyst Technol. https://doi.org/10.1007/s00542-019-04535-8 CrossRef

Guerine A, Merzouki T, Hami AE, Zineb TB (2018) Uncertainty analysis of an actuator for a shape memory alloy micro-pump with uncertain parameters. Adv Eng Softw 122:22–30. https://doi.org/10.1016/j.advengsoft.2018.02.011 CrossRef

Hasan MI, Ali AJF, Tufah RS (2017) Numerical study of the effect of channel geometry on the performance of magnetohydrodynamic micro pump. Eng Sci Technol Int J 20:982–989. https://doi.org/10.1016/j.jestch.2017.01.008 CrossRef

He X, Xu W et al (2017) Dynamics modeling and vibration analysis of a piezoelectric diaphragm applied in valveless micropump. J Sound Vib 405(2017):133–143. https://doi.org/10.1016/j.jsv.2017.05.025 CrossRef

He X, Bian R, Lin N et al (2018) A novel valveless piezoelectric micropump with a bluff-body based on Coanda effect. Microsyst Technol 25:2637–2647. https://doi.org/10.1007/s00542-018-4215-5 CrossRef

Herz M, Horsch D, Wachutka G et al (2010) Design of ideal circular bending actuators for high performance micropumps. Sens Actuators A 163:231–239. https://doi.org/10.1016/j.sna.2010.05.018 CrossRef

Hu Y, You H, Wang W (2017) Non-linear deflection of a circular diaphragm-type piezoactuator under loads of voltage and pressure. Sens Actuators A 268:91–100. https://doi.org/10.1016/j.sna.2017.11.006 CrossRef

Kolahdouz EM, Mohammadzadeh K, Shirani E (2014) Performance of piezoelectrically actuated micropump with different driving voltage shapes and frequencies. Sci Iran Trans B Mech Eng 21:1635–1642

Li S, Chen S (2003) Analytical analysis of a circular PZT actuator for valveless micropumps. Sens Actuators A 104:151–161. https://doi.org/10.1016/s0924-4247(03)00006-2 CrossRef

Li L, Wang X, Pu Q, Liu S (2019) Advancement of electroosmotic pump in microflow analysis: a review. Anal Chim Acta 1060:1–16. https://doi.org/10.1016/j.aca.2019.02.004 CrossRef

Mo C, Wright R, Slaughter WS, Clark WW (2006) Behaviour of a unimorph circular piezoelectric actuator. Smart Mater Struct 15:1094–1102. https://doi.org/10.1088/0964-1726/15/4/023 CrossRef

Nguyen N, White R (1999) Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulation. Sens Actuators A 77:229–236. https://doi.org/10.1016/s0924-4247(99)00216-2 CrossRef

Nguyen N-T, Huang X, Chuan TK (2002) MEMS-micropumps: a review. J Fluids Eng 124:384–392. https://doi.org/10.1115/1.1459075 CrossRef

Nie C, Frijns AJH, Mandamparambil R, Toonder JMJD (2015) A microfluidic device based on an evaporation-driven micropump. Biomed Microdevice. https://doi.org/10.1007/s10544-015-9948-7 CrossRef

Reddy JN (2004) Mechanics of laminated composite plates and shells: theory and analysis. CRC Press, Boca RatonCrossRef

Rusli M, Chee PS, Arsat R et al (2018) Electromagnetic actuation dual-chamber bidirectional flow micropump. Sens Actuators A 282:17–27. https://doi.org/10.1016/j.sna.2018.08.047 CrossRef

Russel M, Selvaganapathy P, Ching C (2016) Ion drag electrohydrodynamic (EHD) micro-pumps under a pulsed voltage. J Electrostat 82:48–54. https://doi.org/10.1016/j.elstat.2016.05.003 CrossRef

Szilard R (2004) Theories and applications of plate analysis: classical, numerical, and engineering methods. Wiley, HobokenCrossRef

Tripathi D, Sharma A, Bég OA (2017) Electrothermal transport of nanofluids via peristaltic pumping in a finite micro-channel: effects of Joule heating and Helmholtz–Smoluchowski velocity. Int J Heat Mass Transf 111:138–149. https://doi.org/10.1016/j.ijheatmasstransfer.2017.03.089 CrossRef

Uhlig S, Gaudet M, Langa S et al (2018) Electrostatically driven in-plane silicon micropump for modular configuration. Micromachines 9:190. https://doi.org/10.3390/mi9040190 CrossRef

Uvarov IV, Lemekhov SS, Melenev AE et al (2016) A simple electrochemical micropump: design and fabrication. J Phys Conf Ser 741:012167. https://doi.org/10.1088/1742-6596/741/1/012167 CrossRef

Uvarov IV, Lemekhov SS, Melenev AE, Svetovoy VB (2017) Exploding microbubbles driving a simple electrochemical micropump. J Micromech Microeng 27:105009. https://doi.org/10.1088/1361-6439/aa8914 CrossRef

Wang D, Huo J (2010) Modeling and testing of the static deflections of circular piezoelectric unimorph actuators. J Intell Mater Syst Struct 21:1603–1616. https://doi.org/10.1177/1045389x10385485 MathSciNetCrossRef

Yildiz MZ, Dereshgi HA (2019) Design of PZT micropumps for biomedical applications: Glaucoma treatment. J Eng Res 7:226–241

Yun K-S, Cho I-J, Bu J-U et al (2001) A micropump driven by continuous electrowetting actuation for low voltage and low power operations. In: Technical Digest MEMS 2001 14th IEEE international conference on micro electro mechanical systems (Cat No01CH37090). https://doi.org/10.1109/memsys.2001.906585

Zhang H, Zhu R, Shi D, Wang Q (2019) A simplified plate theory for vibration analysis of composite laminated sector, annular and circular plate. Thin-Walled Struct 143:106252. https://doi.org/10.1016/j.tws.2019.106252 CrossRef

Titel: Analytical analysis of a circular unimorph piezoelectric actuator in the range of low voltages and pressures
verfasst von: Hamid Asadi Dereshgi
Huseyin Dal
Mehmet Emin Sayan
Publikationsdatum: 28.02.2020
Verlag: Springer Berlin Heidelberg
Erschienen in: Microsystem Technologies / Ausgabe 8/2020
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-020-04786-w

Springer Professional

Abstract

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Weitere Artikel der Ausgabe 8/2020

Correction to: A class of biaxial micro/meso-scale structures for isotropic in-plane inertial sensing and actuation: design, fabrication and experiments

Design and simulation of capacitive SPDT RF MEMS switch to improve its isolation

Thermo-mechanical vibration of FG curved nanobeam containing porosities and reinforced by graphene platelets

Design and of analysis of SPDT Ohmic RF MEMS switch

On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications

Comment on the paper "Microsystem Technologies (2018) 24:4965–4979”