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Erschienen in: Microsystem Technologies 3/2013

01.03.2013 | Technical Paper

Metal deposition on flexible membrane through the combination of localized electrochemical deposition and electroless plating

verfasst von: Meng-Chi Huang, Tein-Li Chang, Tune-Hune Kao, Chien-Chung Fu

Erschienen in: Microsystem Technologies | Ausgabe 3/2013

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Abstract

In this paper, we combined localized electrochemical deposition and electroless plating process for fabricating the metal pattern with the large area on flexible membrane. The pattern of the anode plate can rapidly transfer to the cathode membrane by localized electrochemical deposition. The thickness of the pattern can be increased by electroless plating process. The width of the mask pattern was close to the width of the final pattern. The anode plate can be used over fifty times for this process until the pattern was electrolyzed completely. This method provides a possible low cost approach to fabricate high metal structures on the flexible substrate with large area. It may have the potential to be applied in the fabrication of e-paper, flexible printed circuit and eventually adapted to roll-to-roll process.

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Metadaten
Titel
Metal deposition on flexible membrane through the combination of localized electrochemical deposition and electroless plating
verfasst von
Meng-Chi Huang
Tein-Li Chang
Tune-Hune Kao
Chien-Chung Fu
Publikationsdatum
01.03.2013
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 3/2013
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-012-1694-7

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