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Erschienen in: Microsystem Technologies 8/2013

01.08.2013 | Technical Paper

Design and modeling of a new robust multi-mass coupled-resonator family with dynamic motion amplification

verfasst von: M. A. Erismis

Erschienen in: Microsystem Technologies | Ausgabe 8/2013

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Abstract

This paper presents a new family of multi-mass coupled resonators that can provide robust operation and dynamic motion amplification at the same time. The basic resonator block consists of three masses coupled to each other, where the first mass is the driver unit, the second mass transfers the dynamic energy and the third mass is the final oscillating mass. This basic block can be further enhanced to a more-than-three-mass system to create a multi-mass system to improve the amplification. In order to analyze this multi-mass system, a generic analytical model is derived which is valid for a finite number of masses. This analytical model is verified for the three mass system using FEM simulations. A detailed modeling of a sample three-mass micro-resonator is provided demonstrating the robust operation and the mechanical amplification. Finally, a five-mass system is proposed to improve the mechanical amplification.

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Metadaten
Titel
Design and modeling of a new robust multi-mass coupled-resonator family with dynamic motion amplification
verfasst von
M. A. Erismis
Publikationsdatum
01.08.2013
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 8/2013
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-012-1706-7

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