Dynamic simulation and novel fabrication technique on ICPF-based micro-actuators for flexible micro dosing systems

Dynamic analysis of sandwiched driving diaphragms, made of ionic conductive polymer (ICP), and an innovative fabrication technique to micro-machine them are reported. Firstly, the dynamics of ICP film (ICPF) is theoretically studied and described by governing equations via chemical and mathematical analysis. The purpose to derive the governing equations is to explore the explicit relation of the induced lateral deflection of ICPF with respect to applied electrical field. This is the first major issue of this report. The other major issue is ICPF fabrication technology. The device structure of the micro pump unit, made of polydimethylsiloxane, and the sandwiched ICPF are successfully integrated as a monolithic driving module by the proposed innovative fabrication technique. From the viewpoint of mass production, there are three challenging targets to be achieved. First of all, the novel method to fabricate ICPF actuators is developed to overcome the conventional defect: insufficient adhesion of coated electrodes upon ICPF. Secondly, the ICPF has to be retained considerably right straight and flat as it is fabricated, even though its thickness is far less than its length. Lastly, the ICPF has to operate in aqueous environment. This has been fully taken into consideration by the proposed fabrication technique.