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Microsystem Technologies
Erschienen in: Microsystem Technologies 1/2008

01.01.2008 | Technical Paper

A comprehensive model to study nonlinear behavior of multilayered micro beam switches

verfasst von: Ghader Rezazadeh

Erschienen in: Microsystem Technologies | Ausgabe 1/2008

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Abstract

A novel model to study the pull-in behavior of nonlinear electromechanically coupled systems has been developed. The proposed model is based on the multilayered cantilever and fixed–fixed micro beam type MEMS switches. Due to the complexity of the nonlinear beam mechanics, exact analytical solutions are not generally available; therefore, the derived nonlinear equation has been numerically solved fully using the nonlinear finite difference method. Furthermore, the results obtained are summarized and compared with the other existing empirical and analytical models. These results can be useful in the optimization of MEMS switch designs or other actuators. In addition, the method developed in this paper has a good potential for analyzing other types of complex MEMS devices.
Vorheriger Artikel Micromechanical characterization of electroplated permalloy films for MEMS
Nächster Artikel A comprehensive model to study nonlinear behavior of multilayered micro beam switches

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Literatur
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Sadeghian H, Rezazadeh Gh (2006b) The influence of Stress gradient on the pull-in phenomena of microelectromechanical switches. J Phys Conf Ser 34:1117–1122CrossRef
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Metadaten
Titel
A comprehensive model to study nonlinear behavior of multilayered micro beam switches
verfasst von
Ghader Rezazadeh
Publikationsdatum
01.01.2008
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 1/2008
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-007-0398-x

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