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Microsystem Technologies

Ausgabe 1/2008

Inhalt (17 Artikel)

Technical Paper

Detection of the boundary-layer separation point based on the flexible sensor arrays

Kui Liu, Wei-zheng Yuan, Jin-jun Deng, Bing-he Ma, Cheng-yu Jiang

Technical Paper

Study of an eletrostatically actuated torsional micromirror with compliant planar springs

Jianliang You, Muthukumaran Packirisamy, Ion Stiharu

Technical Paper

Asymmetric surface roughness measurements and meniscus modeling of polysilicon surface micromachined flaps

Xiaojie Xue, Leslie M. Phinney, Andreas A. Polycarpou

Technical Paper

Fabrication of micro gear by micro powder injection molding

N. H. Loh, S. B. Tor, B. Y. Tay, Y. Murakoshi, R. Maeda

Technical Paper

Two photon absorption coefficients and processing parameters for photoresists

Zahidur R. Chowdhury, Robert Fedosejevs

Technical Paper

Post-buckling dynamic behavior of self-assembled 3D microstructures

Lionel Buchaillot, Olivier Millet, Emmanuel Quévy, Dominique Collard

Technical Paper

Design and fabrication of microchannel test rig for ultra-micro wave rotors

Florin Iancu, Xiangwei Zhu, Yuxing Tang, Dean Alsam, Norbert Müller

Technical Paper

Analytical study of resistive MEM gas flow meters

Ebrahim Abbaspour-Sani, Darioush Javan

Technical Paper

Design and simulation of a novel bridge-like coplanar waveguide for microelectromechanical systems

Xiaofeng Sun, Guifu Ding, Hong Wang, Zhenxin Jiang, Binhong Li, Minyi Shen

Technical Paper

An on-chip micro-friction tester for tribology research of silicon based MEMS devices

Zhanshe Guo, Yonggang Meng, Caijun Su, Hao Wu

Technical Paper

A nodal analysis method for simulating the behavior of electrothermal microactuators

Ren-Gang Li, Qing-An Huang, Wei-Hua Li

Technical Paper

Micromechanical characterization of electroplated permalloy films for MEMS

Xueping Li, Guifu Ding, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato

Erratum

A comprehensive model to study nonlinear behavior of multilayered micro beam switches

Ghader Rezazadeh, Hamed Sadeghian, Ebrahim Abbaspour

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