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Microsystem Technologies
Erschienen in: Microsystem Technologies 7/2018

06.02.2018 | Technical Paper

Modelling and analysis of diaphragm integrated SU8/CB nanocomposite piezoresistive polymer microcantilever biosensor

verfasst von: Mohd. Zahid Ansari, Mahak Bisen, Chongdu Cho

Erschienen in: Microsystem Technologies | Ausgabe 7/2018

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Abstract

This study investigates the effect of cantilever size and diaphragm size on deflection, frequency, stress and sensitivity characteristics of a diaphragm integrated SU8/CB piezoresistive polymer microcantilever biosensor. It consists SU8 square diaphragm anchored by four SU8 cantilevers with SU8/CB piezoresistor inside. Analytical model for biosensor deflection is presented and validated against numerical obtained using ANSYS Multiphysics. Diaphragm size was changed as 305, 505 and 705 µm. Cantilever length and width were first changed independently and then jointly to characterise performance of biosensor. Results show good conformity between analytical and numerical results and the sensitivity results are increasing linearly with diaphragm size, and short and narrow cantilevers show higher sensitivity.
Vorheriger Artikel Investigation of free vibration response of smart sandwich micro-beam on Winkler–Pasternak substrate exposed to multi physical fields
Nächster Artikel Synthesis, green emission and photosensitivity of Al-doped ZnO film

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Metadaten
Titel
Modelling and analysis of diaphragm integrated SU8/CB nanocomposite piezoresistive polymer microcantilever biosensor
verfasst von
Mohd. Zahid Ansari
Mahak Bisen
Chongdu Cho
Publikationsdatum
06.02.2018
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 7/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-3777-6

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