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Microsystem Technologies
Erschienen in: Microsystem Technologies 7/2018

09.05.2018 | Technical Paper

Use of double-raised-border structure for quality factor enhancement of type II piston mode FBAR

verfasst von: Xinyi Li, Jingfu Bao, Yulin Huang, Benfeng Zhang, Gongbin Tang, Tatsuya Omori, Ken-ya Hashimoto

Erschienen in: Microsystem Technologies | Ausgabe 7/2018

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Abstract

This paper investigates applicability of double raised borders to the piston mode film bulk acoustic resonator (FBAR). It is shown that it offers significant improvement of the quality factor at the anti-resonance without sacrificing the spurious level when the structure is designed appropriately. This enhancement is attributed to the reduction of the mode-conversion and the increase of the reflection coefficient at the border region.
Vorheriger Artikel Study on the size dependent effective Young modulus by EPI method based on modified couple stress theory
Nächster Artikel Investigation and analysis of the influence of excitation signal on radiation characteristics of capacitive micromachined ultrasonic transducer

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Metadaten
Titel
Use of double-raised-border structure for quality factor enhancement of type II piston mode FBAR
verfasst von
Xinyi Li
Jingfu Bao
Yulin Huang
Benfeng Zhang
Gongbin Tang
Tatsuya Omori
Ken-ya Hashimoto
Publikationsdatum
09.05.2018
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 7/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-3938-7

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