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Journal of Materials Engineering and Performance
Erschienen in: Journal of Materials Engineering and Performance 4/2024

21.03.2023 | Technical Article

NiAl Coatings Produced by Magnetron Sputtering from Mosaic Targets

verfasst von: T. S. Ogneva, A. A. Ruktuev, N. Yu. Cherkasova, Yu. N. Malyutina, M. N. Khomyakov, V. G. Burov, I. A. Bataev

Erschienen in: Journal of Materials Engineering and Performance | Ausgabe 4/2024

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Abstract

In this study, NiAl-based intermetallic films were obtained by magnetron sputtering of mosaic targets, consisting of nickel and aluminum. Two-segment target consisted of nickel and aluminum semicircular parts; six-segment target was assembled from nickel and aluminum alternating bars. The structure and properties of coatings were evaluated depending on the type of mosaic target, target-to-substrate distance (Ht-s) and substrate material. NiAl grains had predominant (111) or (110) crystallographic orientation parallel to the substrate surface. Sputtering of the six-segment target led to the uniform elemental composition of the coatings. When using the two-segment target, the heterogeneous distribution of Ni and Al in NiAl over the substrate was observed. Ni-rich regions of the coatings had a fine-grained structure, while Al-rich areas predominantly consisted of larger columnar grains. As the Ht-s distance decreased, the morphology of the surface of all films changed from a rough island-type to a smoother one. The correlations between the texture, composition of films, and sputtering conditions are described. The obtained results are analyzed and explained based on fundamental principles of films growth during magnetron sputtering. The nanohardness of the films varied in a range from 6 to 12 GPa, and the coatings possessed high wear resistance.
Vorheriger Artikel Microstructure, Mechanical, and Tribological Properties of CoCrFeNi-Ag-Mo Self-lubricating Composite
Nächster Artikel Characterization of Microstructure and Mechanical Property Evolutions of 42CrMo Steel Served at Elevated Temperatures

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Metadaten
Titel
NiAl Coatings Produced by Magnetron Sputtering from Mosaic Targets
verfasst von
T. S. Ogneva
A. A. Ruktuev
N. Yu. Cherkasova
Yu. N. Malyutina
M. N. Khomyakov
V. G. Burov
I. A. Bataev
Publikationsdatum
21.03.2023
Verlag
Springer US
Erschienen in
Journal of Materials Engineering and Performance / Ausgabe 4/2024
Print ISSN: 1059-9495
Elektronische ISSN: 1544-1024
DOI
https://doi.org/10.1007/s11665-023-08096-w

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