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Microsystem Technologies
Erschienen in: Microsystem Technologies 7/2010

01.07.2010 | Technical Paper

Reliability of RF MEMS switches due to charging effects and their circuital modelling

verfasst von: Romolo Marcelli, Giancarlo Bartolucci, George Papaioannu, Giorgio De Angelis, Andrea Lucibello, Emanuela Proietti, Benno Margesin, Flavio Giacomozzi, François Deborgies

Erschienen in: Microsystem Technologies | Ausgabe 7/2010

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Abstract

The reliability of RF MEMS switches is typically reduced by charging effects occurring in the dielectrics. The aim of this paper is to discuss these effects, and to propose analytical and equivalent circuit models which account for most of the physical contributions present in the structure.
Vorheriger Artikel Fabrication of internally driven micro centrifugal force pumps based on synchronous micro motors
Nächster Artikel Development of near hermetic silicon/glass cavities for packaging of integrated lithium micro batteries

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Literatur
Czarnecki P, Rottenberg X, Soussan P, Ekkels P, Muller P, Nolmans P, De Raedt W, Tilmans HAC, Puers R, Marchand L, De Wolf I (2008) Influence of the substrate on the lifetime of capacitive RF MEMS switches, Proceedings of MEMS-2008, pp 172–175
De Los Santos H, Fischer G, Tilmans HAC, Van Beek JTM (2004) RF MEMS for ubiquitous wireless connectivity part 1-fabrication and part 2-application. IEEE Microw Mag 5(4):36–65CrossRef
Dussopt L, Rebeiz GM (2003) Intermodulation distortion and power handling in RF MEMS switches, varactors, and tunable filters, Part 1. IEEE Trans Microw Theory Tech 51(4):1247–1256
Girbau D, Otegi N, Pradell L (2006) Study of intermodulation in RF MEMS variable capacitors. IEEE Trans Microw Theory Tech 54(3):1120–1130CrossRef
Goldsmith C, Ehmke J, Malczewski A, Pillans B, Eshelman S, Yao Z, Brank J, Eberly M (2001) Lifetime characterization of capacitive RF MEMS switches. IEEE MTT-S Dig, pp 227–230
Joung J, Shen J, Grodzinski P (2000) Micropumps based on alternating high-gradient magnetic fields. IEEE Trans Magn 36(4):2012–2014CrossRef
Kornrumpf WP, Karabudak NN, Taft WJ (2004) RF MEMS packaging for space applications. In: Proceedings of 22nd AIAA international communications satellite systems conference and exhibition 2004, Monterey, paper AIAA 2004–3106, 9–12 May 2004
Lee H-C, Parkand J-Y, Bu J-Uk (2005) Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation. IEEE Microw Wirel Compon Lett 15(4):202–204CrossRef
Melle S, De Conto D, Mazenq L, Dubuc D, Poussard B, Bordas C, Grenier K, Bary L, Vendier O, Muraro JL, Cazaux JL, Plana R (2005) Failure predictive model of capacitive RF-MEMS. Microelectron Reliab 45:1770–1775CrossRef
Mercier D, Blondy P, Barataud D, Cros D, Guillon P, Champeaux C, Tristant P, Catherinot A (2002) Model for MEMS switches power handling and phase noise. In: Proceedings of the 32nd european microwave conference, pp 1–4
Papaioannou G, Giacomozzi F, Papandreou E, Margesin B (2007a) Charging processes in RF-MEMS capacitive switches with SiO2 dielectric. In: Proceedings of MEMSWAVE 2007 workshop, Edit. Lluis Pradell and L. Jofre, pp 175–178. ISBN 978-84-96736-22-1
Papaioannou G, Papapolymerou J, Pons P, Plana R (2007b) Dielectric charging in radio frequency microelectromechanical system capacitive switches: a study of material properties and device performance. Appl Phys Lett 90:233507CrossRef
Papandreou E, Lamhamdi M, Skoulikidou CM, Pons P, Papaioannou G, Plana R (2007) Structure dependent charging process in RF MEMS capacitive switches. Microelectron Reliab 47:1812–1817CrossRef
Patton ST, Zabinski JS (2007) Effects of dielectric charging on fundamental forces and reliability in capacitive microelectromechanical systems radio frequency switch contacts. J Appl Phys 99:94910–94991CrossRef
Peng Z, Yuan X, Hwang JCM, Forehand DI, Goldsmith CL (2007) Superposition model for dielectric charging of RF MEMS capacitive switches under bipolar control-voltage waveforms. IEEE Trans Microw Theory Tech 55(12):2911–2918CrossRef
Peroulis D, Pacheco SP, Katehi LPB (2004) RF MEMS switches with enhanced power-handling capabilities. IEEE Trans Microw Theory Tech 52(1):50–68CrossRef
Rebeiz GM (2003) RF MEMS theory, design, and technology. Wiley, HobokenCrossRef
Theonas VG, Exarchos M, Konstantinidis G, Papaioannou GJ (2005) RF MEMS sensitivity to electromagnetic radiation. Second conference on microelectronics, microsystems and nanotechnology. J Phys: conference series 10:313–316
van Spengen WM, Puers R, Mertens R, De Wolf I (2004) A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches. J Micromech Microeng 14:514–521CrossRef
Vandershueren J, Casiot J (1979) In: Braunlich P (ed) Topics in applied physics: thermally stimulated relaxation in solids, vol 37, Chap 4. Springer, Berlin, pp 135–223
Yuan X, Cherepko SV, Hwang JCM, Goldsmith CL, Nordquist C (2004) Dielectric-charging effects on RF MEMS capacitive switches In: IEEE MTT-S Dig, pp 1943–1946
Yuan X, Peng Z, Hwang JCM, Forehand D, Goldsmith CL (2006) Acceleration of dielectric charging in RF MEMS capacitive switches. IEEE Trans Device Mater Reliab 6(4):556–563CrossRef
Metadaten
Titel
Reliability of RF MEMS switches due to charging effects and their circuital modelling
verfasst von
Romolo Marcelli
Giancarlo Bartolucci
George Papaioannu
Giorgio De Angelis
Andrea Lucibello
Emanuela Proietti
Benno Margesin
Flavio Giacomozzi
François Deborgies
Publikationsdatum
01.07.2010
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 7/2010
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-009-1006-z

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