Ausgabe 5-6/2007
HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10-13 Jnue 2005 (This is the second of two issues)
Inhalt (29 Artikel)
Analysis of the demolding forces during hot embossing
Yuhua Guo, Gang Liu, Xuelin Zhu, Yangchao Tian
Large area and wide dimensions X-ray lithography using energy variable synchrotron radiation
Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori, Hirotsugu Hara
Planar microreactor for biochemical application made from silicon and polymer films
Yuichi Utsumi, Yusuke Hitaka, Katsuhiro Matsui, Masahiro Takeo, Seiji Negoro, Yoshiaki Ukita
Proton beam writing: a tool for high-aspect ratio mask production
J. A. van Kan, P. G. Shao, K. Ansari, A. A. Bettiol, T. Osipowicz, F. Watt
Fluid filter fabricated by deep X-ray lithography for micro fluidics
Yoshiaki Ukita, Toshifumi Asano, Yuichi Utsumi
Fabrication of a micro reactor for vertical unit operation using multifunctional fluid filter and its application to biochemical reaction
Toshifumi Asano, Yoshiaki Ukita, Katsuhiro Matsui, Masahiro Takeo, Seiji Negoro, Yuichi Utsumi
Deep microstructuring in glass for microfluidic applications
Chantal Khan Malek, Laurent Robert, Jean-Jacques Boy, Pascal Blind
Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology
S. C. Chen, C. H. Cheng, Y. C. Lin
Parameter optimization for an ICP deep silicon etching system
S. C. Chen, Y. C. Lin, J. C. Wu, L. Horng, C. H. Cheng
Revisiting micro hot-embossing with moulds in non-conventional materials
Chantal Khan Malek, Jean-René Coudevylle, Jean-Claude Jeannot, Roland Duffait
Nanostructures on microstructured surfaces
Alexander Disch, Jörg Mick, Benedikt Bläsi, Claas Müller
Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures
K. D. Vora, A. G. Peele, B.-Y. Shew, E. C. Harvey, J. P. Hayes
Metal micromolding: further experiments and preliminary finite element analysis
D. M. Cao, J. Jiang, W. J. Meng, G. B. Sinclair
Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining
D. M. Cao, J. Jiang, W. J. Meng, J. C. Jiang, W. Wang
Production issues for high aspect ratio Lobster-eye optics using LIGA
A. G. Peele, K. D. Vora, B.-Y. Shew, B. Loechl, E. C. Harvey, J. P. Hayes
Polymeric microneedle fabrication using a microinjection molding technique
Firas Sammoura, JeongJin Kang, Young-Moo Heo, TaeSung Jung, Liwei Lin
Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments
C. K. Chung, Y. Z. Hong
Fabrication of the monolithic polymer–metal microstructure by the backside exposure and electroforming technology
C. K. Chung, Y. Z. Hong, W. T. Chang
Effect of pulse frequency on the morphology and nanoindentation property of electroplated nickel films
C. K. Chung, W. T. Chang
Fabrication of diffraction grating for X-ray Talbot interferometer
Masatake Matsumoto, Kinji Takiguchi, Makoto Tanaka, Yoichi Hunabiki, Hiroaki Takeda, Atsushi Momose, Yuichi Utsumi, Tadashi Hattori
Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization
Hiroaki Mochizuki, Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada, Tadashi Hattori
A novel reluctance actuator employing an embedded ferromagnetic foil
A. Waldschik, M. Feldmann, S. Büttgenbach
Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors
M. Feldmann, A. Waldschik, S. Büttgenbach
A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation
Yeolho Lee, Geunbae Lim, Wonkyu Moon
Study on the method for the reliability test of focused ion beam
Sang H. Lee, Hyun-Wook Kang, Dong-Woo Cho, Wonkyu Moon
Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever
Sang H. Lee, Pan K. Kim, Wonkyu Moon, Geunbae Lim
Effect of irradiation on the surface microhardness of pure poly(vinyl fluoride), poly(vinylidene fluoride) and their isomorphic blends
A. K. Gupta, R. Bajpai, J. M. Keller
UV nano embossing for polymer nano structures with non-transparent mold insert
Hyun Sup Lee, Dong Sung Kim, Tai Hun Kwon
Replication of high-aspect-ratio nanopillar array for biomimetic gecko foot-hair prototype by UV nano embossing with anodic aluminum oxide mold
Dong Sung Kim, Hyun Sup Lee, Junghyun Lee, Sungjoo Kim, Kun-Hong Lee, Wonkyu Moon, Tai Hun Kwon