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Microsystem Technologies
Erschienen in: Microsystem Technologies 12/2014

01.12.2014 | Review Paper

A comprehensive study on RF MEMS switch

verfasst von: H. Jaafar, K. S. Beh, N. A. M. Yunus, W. Z. W. Hasan, S. Shafie, O. Sidek

Erschienen in: Microsystem Technologies | Ausgabe 12/2014

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Abstract

This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed.
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Metadaten
Titel
A comprehensive study on RF MEMS switch
verfasst von
H. Jaafar
K. S. Beh
N. A. M. Yunus
W. Z. W. Hasan
S. Shafie
O. Sidek
Publikationsdatum
01.12.2014
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 12/2014
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2276-7

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