Ausgabe 4/2012
Inhalt (18 Artikel)
A review of fabrication processes for vertical comb drives
Else Gallagher, Walied Moussa, Mark McDermott
Detailed investigation of capacitive micromachined ultrasonic transducer design space
Onursal Onen, Rasim Guldiken
Development of two step carbon dioxide assisted thermal fusion PMMA bonding process
Chia-Lin Wu, Chen-Chung Li, Chia-Fong Lu, Sen-Yeu Yang
Quality control for deep x-ray lithography (LIGA): a preliminary metrology study
Pascal Meyer, James D. Claverley, Richard K. Leach
A method of water pretreatment to improve the thermal bonding rate of PMMA microfluidic chip
Liqun Du, Hongling Chang, Mancang Song, Chong Liu
Laser fabrication of micropores and their integration to microfluidic platforms for DNA electrophoresis
B. Lerner, M. S. Perez, P. A. Kler, C. L. A. Berli, A. F. Ordoñez Arias, F. Sacco, C. Toro, C. A. Rinaldi
Enhancement of PZT embedded swing arm actuator using integrated read/write performance and actuation
Yu-Cheng Lin, Po-Chien Chou, Stone Cheng
VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers
Darcy T. Haluzan, David M. Klymyshyn, Sven Achenbach, Martin Börner, Jürgen Mohr
A contact lens with integrated micro solar cells
Andrew R. Lingley, Brian P. Otis, Tueng T. Shen, Babak A. Parviz
Replication of precise polymeric microlens arrays combining ultra-precision diamond ball-end milling and micro injection molding
S. Kirchberg, L. Chen, L. Xie, G. Ziegmann, B. Jiang, K. Rickens, O. Riemer
Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy
Hugo Durou, David Pech, David Colin, Patrice Simon, Pierre-Louis Taberna, Magali Brunet
Rubber-assisted embossing of polymer thin films using molds with through-thickness microchannels
Danyang Zhao, Tom Wyatt, Minjie Wang, Allen Yi, Donggang Yao
A planar micro-concentrator/injector for low power consumption microchromatographic analysis of benzene and 1,3 butadiene
H. Lahlou, J.-B. Sanchez, Y. Mohsen, X. Vilanova, F. Berger, E. Llobet, X. Correig, V. Fierro, A. Celzard, I. Gràcia, C. Cané
A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz
Huicong Liu, Chengkuo Lee, Takeshi Kobayashi, Cho Jui Tay, Chenggen Quan
Effect of die attachment on key dynamical parameters of micromachined gyroscopes
Zhanqiang Hou, Dingbang Xiao, Xuezhong Wu, Jianbin Su, Zhihua Chen, Xu Zhang
A novel approach for increasing the strength of an Au/Si eutectic bonded interface on an oxidized silicon surface
M. Haubold, Y.-C. Lin, J. Frömel, M. Wiemer, M. Esashi, T. Geßner
Insight into the micro scale dynamics of a micro fluidic wetting-based conveying system by particle based simulation
Jan Lienemann, Dennis Weiß, Andreas Greiner, David Kauzlaric, Oliver Grünert, Jan G. Korvink