Ausgabe 4/2012
Inhalt (18 Artikel)
A review of fabrication processes for vertical comb drives
- Review Paper
Else Gallagher, Walied Moussa, Mark McDermott
Detailed investigation of capacitive micromachined ultrasonic transducer design space
- Technical Paper
Onursal Onen, Rasim Guldiken
Development of two step carbon dioxide assisted thermal fusion PMMA bonding process
- Technical Paper
Chia-Lin Wu, Chen-Chung Li, Chia-Fong Lu, Sen-Yeu Yang
Quality control for deep x-ray lithography (LIGA): a preliminary metrology study
- Technical Paper
Pascal Meyer, James D. Claverley, Richard K. Leach
A method of water pretreatment to improve the thermal bonding rate of PMMA microfluidic chip
- Technical Paper
Liqun Du, Hongling Chang, Mancang Song, Chong Liu
Laser fabrication of micropores and their integration to microfluidic platforms for DNA electrophoresis
- Technical Paper
B. Lerner, M. S. Perez, P. A. Kler, C. L. A. Berli, A. F. Ordoñez Arias, F. Sacco, C. Toro, C. A. Rinaldi
Enhancement of PZT embedded swing arm actuator using integrated read/write performance and actuation
- Technical Paper
Yu-Cheng Lin, Po-Chien Chou, Stone Cheng
VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers
- Technical Paper
Darcy T. Haluzan, David M. Klymyshyn, Sven Achenbach, Martin Börner, Jürgen Mohr
A contact lens with integrated micro solar cells
- Technical Paper
Andrew R. Lingley, Brian P. Otis, Tueng T. Shen, Babak A. Parviz
Replication of precise polymeric microlens arrays combining ultra-precision diamond ball-end milling and micro injection molding
- Technical Paper
S. Kirchberg, L. Chen, L. Xie, G. Ziegmann, B. Jiang, K. Rickens, O. Riemer
Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy
- Technical Paper
Hugo Durou, David Pech, David Colin, Patrice Simon, Pierre-Louis Taberna, Magali Brunet
Rubber-assisted embossing of polymer thin films using molds with through-thickness microchannels
- Technical Paper
Danyang Zhao, Tom Wyatt, Minjie Wang, Allen Yi, Donggang Yao
A planar micro-concentrator/injector for low power consumption microchromatographic analysis of benzene and 1,3 butadiene
- Technical Paper
H. Lahlou, J.-B. Sanchez, Y. Mohsen, X. Vilanova, F. Berger, E. Llobet, X. Correig, V. Fierro, A. Celzard, I. Gràcia, C. Cané
A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz
- Technical Paper
Huicong Liu, Chengkuo Lee, Takeshi Kobayashi, Cho Jui Tay, Chenggen Quan
Effect of die attachment on key dynamical parameters of micromachined gyroscopes
- Technical Paper
Zhanqiang Hou, Dingbang Xiao, Xuezhong Wu, Jianbin Su, Zhihua Chen, Xu Zhang
A novel approach for increasing the strength of an Au/Si eutectic bonded interface on an oxidized silicon surface
- Technical Paper
M. Haubold, Y.-C. Lin, J. Frömel, M. Wiemer, M. Esashi, T. Geßner
Insight into the micro scale dynamics of a micro fluidic wetting-based conveying system by particle based simulation
- Technical Paper
Jan Lienemann, Dennis Weiß, Andreas Greiner, David Kauzlaric, Oliver Grünert, Jan G. Korvink
