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Microsystem Technologies
Erschienen in: Microsystem Technologies 7/2007

01.04.2007 | Technical Paper

Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors

verfasst von: Ghader Rezazadeh, Faraz Khatami, Ahmadali Tahmasebi

Erschienen in: Microsystem Technologies | Ausgabe 7/2007

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Abstract

In this paper the electromechanical behavior of a torsional micromirror was investigated using of a static model with considering torsion and bending characteristics of micro-beams. A set of nonlinear equations based on the parallel plate capacitor model was derived to represent the relationships between the applied voltage, torsion angle, and vertical displacement of the torsional micromirror. Step by step linearization method (Newton’s method) was used to calculate the rotation angle and vertical displacement of the micromirror due to the applied voltage. This method is fast and gave acceptable and accurate results which were in good agreement with the experimental data.
Vorheriger Artikel 3D-feature-based structure design for silicon fabrication of micro devices
Nächster Artikel Eutectic bonding of Al-based high aspect ratio microscale structures

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Metadaten
Titel
Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors
verfasst von
Ghader Rezazadeh
Faraz Khatami
Ahmadali Tahmasebi
Publikationsdatum
01.04.2007
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 7/2007
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-006-0362-1

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